Buffered Analog Output Pirani (Series 315 And 345) - MKS HPS 937A Series Owner's Operation And Maintenance Manual

Buffered Analog Output
Pirani (Series 315 and 345)
10
8
6
4
2
0
10 -4
C. 2
10 -3 10 -2 10
Pressure
937A Multi-Sensor System
He
-1 10 0 10 +1
(Torr)
N
2
Ar
10 +2 10 +3