Related Manuals for MKS HPS 917
Summary of Contents for MKS HPS 917
- Page 1 Products Series 917 Pirani Vacuum Sensor System OPERATION AND MAINTENANCE MANUAL...
- Page 3 HPS™ Products Series 917 Pirani Vacuum Sensor System AUGUST 1999 PART #109170020 REV.B Pirani Vacuum Sensor System...
- Page 4 303-449-9861 800-345-1967 FAX: 303-442-6880 © 1994, 1996 by MKS Instruments Inc., HPS Products Inc. All rights reserved. SensaVac is a trademark of MKS Instruments, Inc. Teflon is a registered trademark of DuPont Co. VCR® is a registered trademark of Swagelok® Company.
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Page 5: Table Of Contents
Table of Contents Table of Contents Package Contents ..............1 Symbols Used in this Manual ............ 1 Safety Precautions and Other Procedures ........ 2 Specifications ................4 Controller ....................4 Sensor Tube .................... 5 Feature and Control Locations ..........6 Typical Applications for the Series 917 Pirani System .... - Page 6 Pirani Vacuum Sensor System...
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Page 7: Package Contents
Package Contents Please be sure that your Series 917 Pirani Vacuum Sensor System package contains these items: 1 Series 917 Pirani Controller 1 female, 15-pin, subminiature D (D-sub) accessory connector 1 power cord 1 HPS™ Series 917 Pirani Vacuum Sensor System User's Manual The Series 917 System's Pirani Sensor and its connecting cable are sold separately. -
Page 8: Safety Precautions And Other Procedures
Safety Precautions and Other Procedures Do not use te Serie 917 System's Pirani Sensor with explosive gas mixtures or with gases that are combustible in air. If the control circuit fails or an exothermic catalytic reaction occurs at the sensor wire, the wire could ignite the gas mixture. Prevent chances of explosion when using with gases other than air or nitrogen. - Page 9 Power cables should be approved by a European agency such as VDE, Semko, or SEV. The Series 917 Pirani System and all its accessories must be used as instructed by MKS Instruments, HPS Products, to ensure safe operation. Use or modification of the equipment in a manner not consistent with specifications may render the product's inherent protection useless.
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Page 10: Specifications
Specifications Controller Measuring Range 1.0 x 10 to 7.6 x 10 Torr to 7.6 x 10 mTorr 1.0 x 10 to 1.0 x 10 mbar 1.0 x 10 to 1.0 x 10 Useful Set Point Range 5.0 x 10 to 1.0 x 10 Torr to 1.0 x 10 mTorr... -
Page 11: Sensor Tube
Display 3½" wide face, 95 deflection analog meter; LED set point indicators; units shown in either Torr, mbar, Pascal, or mTorr/microns Electronic Casing Aluminum, anodized Dimensions 3¾" x 7" x 3¾" (W x D x H) (96 mm x 178 mm x 96 mm) Size ¼... -
Page 12: Feature And Control Locations
Feature and Control Locations Controller Division Front View Rear View Side View Analog Display Power On-Off Rocker Switch View Set Point Push-buttons Set Point Adjustment Potentiometers Sensor LED Set Point Indicators Power Cord Inlet w/ Fuse Holder Panel Mounting Fastener Holes Male, 15-pin Accessory Port Female, 15-pin Gauge Port Slots (for Optional Mounting Brackets) -
Page 13: Typical Applications For The Series 917 Pirani System
Typical Applications for the Series 917 Pirani System Measuring foreline and roughing pressures generated by mechanical vacuum pumps Controlling valves and pumps to automate system pumpdown using the relay set points Sensing abnormal pressure and taking appropriate security measures using the relay set points Controlling system pressure using the analog output as input to an automatic pressure controller Starting or stopping system processes using the relay set... -
Page 14: About The Hps™ Series 917 Pirani Vacuum Sensor System
About the HPS™ Series 917 Pirani Vacuum Sensor System The Series 917 Pirani System, together with its Sensor and connecting cable, provides accurate and reliable data for processes which need pressure control from atmosphere to 10 Torr at a very low cost. The Pirani Sensor is available with several standard fittings for vacuum connection. -
Page 15: Installing The Series 917 Pirani System
Installing the Series 917 Pirani System Pirani Sensor Installation Location Locate the Pirani Sensor where it can measure chamber or manifold pressure. Installing the Sensor away from pumps and gas sources gives the most representative values. Place the Sensor where vibration is minimal. Orientation Operating position has no negative effect on accuracy. -
Page 16: Pirani Controller Installation
To fit the KF 16 port to a KF 10 port, use an HPS adaptive centering ring (see Accessories, p. 21). To fit the Sensor with the " NPT, do not use the case for tightening. The ® Sensor’s vacuum tubing has "... -
Page 17: Ac Power Cord
Panel mounting system with a ¼ DIN cutout Turn off the Controller before connecting or disconnecting the cable from the Sensor or Controller. Pin 6 of the octal socket is intentionally shorter as a safety measure to prevent a voltage overload on the Sensor in case the Controller has not been shut off. -
Page 18: Fuse Replacement
Tube Controller Customizing a sensor cable Fuse Replacement The Series 917 Pirani Controller has a combined fuse holder and IEC-320 port located on the rear panel. Replace the fuse following the steps below. 1. Unplug the power cord from the IEC port. 2. -
Page 19: Relay Inductive Loads And Arc Suppression
Description Set point relay 1 - normally closed contact Set point relay 1 - common Set point relay 1 - normally open contact Set point relay 2 - normally closed contact Set point relay 2 - common Set point relay 2 - normally open contact Not used Not used Not used... -
Page 20: Operating The Series 917 Pirani System
Operating the Series 917 Pirani System Reading Pressure The Sensor must be connected to the Controller before turning on the unit. Turn the power on to display pressure or to operate the set point relays. The graph below shows the Series 917 Pirani System’s voltage output as a function of pressure for nitrogen, helium, and argon and the table on the next page gives the same information. -
Page 21: Adjusting The Set Points
Series 917 Pirani System Output Voltage vs. Pressure Torr Pascal Voltage Torr Pascal Voltage Nitrogen Argon Helium Nitrogen Argon Helium 1.0E-03 1.3E -01 0.065 0.048 0.056 9.0E -01 1.2E+02 1.950 1.545 1.988 2.0E-03 2.7E -01 0.101 0.065 0.084 1.0E+00 1.3E+02 2.012 1.596 2.086... -
Page 22: Buffered Analog Output
Buffered Analog Output The Series 917 Pirani Controller's analog output voltage is buffered. The temperature compensated signal from the Pirani Sensor is buffered by a unity gain amplifier, then connected to the Accessory port. This signal has an amplitude of approximately 0.03 V in vacuum to 3.25 V at atmosphere and follows the voltage-versus-pressure curve shown on page 14. - Page 23 Always use a probe gas in small quantities to aid in pinpointing the leak. In general, leak test sensitivity is greater for lower system pressures. 3) The Pirani Sensor is sensitive to any leak probe gas lighter or heavier than the gas in the system, however, for optimal sensitivity, select a probe gas with the largest difference between its molecular weight and that of the system gas.
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Page 24: Using The Series 917 Pirani System With Other Gases
Using the Series 917 Pirani System with Other Gases Before using the Series 917 Pirani System to measure pressure of gases other than air or nitrogen, you should read andunderstand this section. To answer further questions, contact the Customer Service Department of at 303-449-9861. -
Page 25: Maintaining The Series 917 Pirani System
Maintaining the Series 917 Pirani System Troubleshooting and Service The Series 917 Pirani Controller is designed to be maintenance-free under normal operation. In the unlikely event that problems occur, this section lists symptoms and associated possible causes. With this guide, you should be able to locate some faults. -
Page 26: Testing The Pirani Sensor
Testing the Pirani Sensor These tests are for function only. Slight Sensor damage by improper cleaning or rough handling can affect calibration, but the tube may still be functional. The Pirani Sensor contains a balanced bridge for sensing pressure and temperature compensation circuitry for pressure measurement through a wide ambient temperature range. -
Page 27: Accessories
Accessories Part # Accessory Connector Kit 100005087 Cables for the Pirani Sensor 10 ft ( 3.0 m) 100004068 25 ft ( 7.6 m) 100004069 50 ft (15.2 m) 100004070 100 ft (30.5 m) 100006188 Custom Lengths to 500 ft 100004071 Cold Cathode Interlock Cable, 2 ft (0.6 m) 100005776 Mounting Hardware Kit... -
Page 28: Product Warranty
III. This warranty gives PURCHASER specific legal rights, and PURCHASER may also have other rights which vary from state to state. IV. For HPS products sold outside of the U.S., contact your MKS representative for warranty information and service. Warranty Performance To obtain warranty satisfaction, contact the following: MKS Instruments, Inc. -
Page 29: Notes
Notes Pirani Vacuum Sensor System... - Page 30 Pirani Vacuum Sensor System...
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