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Summary of Contents for MKS HPS 903 Series
- Page 1 Products Series 903 Inverted Magnetron Transducer (IMT) Cold Cathode Ionization Vacuum Sensor OPERATION AND MAINTENANCE MANUAL...
- Page 2 Please Note: MKS Instruments provides these documents as the latest version for the revision indicated. The material is subject to change without notice, and should be verified if used in a critical application.
- Page 3 Products Series 903 Inverted Magnetron Transducer (IMT) Cold Cathode Ionization Vacuum Sensor JUNE 1999 PART #1090300 REV. A Cold Cathode Ionization Vacuum Sensor...
- Page 4 IgniTorr is a trademark of MKS Instruments, Inc. Products, Inc. Inconel is a registered trademark of Inco Alloys International, Inc. Scotch-Brite is a trademark of 3M. Is a registered trademark of MKS Instruments, Inc., HPS Products, Inc. Cold Cathode Ionization Vacuum Sensor...
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Page 5: Table Of Contents
Table of Contents Table of Contents Package Contents ..............1 Symbols Used in this Manual ............ 1 Safety Precautions ..............2 Specifications ................3 Feature and Control Locations ..........5 Typical Applications for the Series 903 (IMT) ......6 About the HPS Products Series 903 (IMT) ...... - Page 6 Accessories/Part Replacement ..........22 Product Warranty ..............23 Notes ..................24 Appendix A: How the Series 903 (IMT) Works ......A.1 Theory of a Cold Cathode Ionization Sensor .......... A.1 Notes ..................A.3 Cold Cathode Ionization Vacuum Sensor...
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Page 7: Package Contents
Package Contents Before unpacking your Series 903 Inverted Magnetron Transducer (IMT) Vacuum Sensor, check all surfaces of the packing material for shipping damage. Please be sure that your Series 903 (IMT) package contains these items: 1 (IMT) unit (integrated sensor tube and electronics) 1 female, 9-pin subminiature D (D-sub) connector 1 Series 903 Inverted Magnetron Transducer (IMT) Cold Cathode Ionization Vacuum Sensor User's Manual. -
Page 8: Safety Precautions
As much as 4 kV may be present in the (IMT) during operation. The current is limited to 100 mA. The Series 903 (IMT) must be used as instructed by MKS Instruments, Inc., HPS Products Inc., for safe operation. Using or modifying the equipment inconsistent with specifications may render the product's inherent protection useless. -
Page 9: Specifications
Specifications Measuring Range 3.0 x 10 to 5.0 x 10 Torr 3.9 x 10 to 6.5 x 10 mbar 3.9 x 10 to 6.5 x 10 Set Point Range 1.0 x 10 to 1.0 x 10 Torr 1.3 x 10 to 1.3 x 10 mbar 1.3 x 10... - Page 10 Internal Operating Voltage 4 kV maximum current limited to 133 mA Installation Orientation Internal Volume 0.9 in. (15.0 cm ) maximum Materials Exposed to Vacuum SS 304, SS 302, aluminum, glass, ® Inconel X-750, alumina ceramic Display LED indicators for set point (red), high voltage (yellow), and power (green) Electronic Casing...
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Page 11: Feature And Control Locations
Feature and Control Locations Top View Front View Side View LED Power On-Off Indicator (Green) LED High Voltage Indicator (Yellow) LED Set Point Indicator (Red) Phillips Head Screws (Access to Sensor Tube) Set Point Adjustment Potentiometer Tip Jack for Set Point Monitor Tip Jack for Common Male, 9-pin D-sub Connector Sensor Tube Vacuum Port... -
Page 12: Typical Applications For The Series 903 (Imt)
Typical Applications for the Series 903 (IMT) Measurement of high vacuum chamber pressures Control of high vacuum systems and process sequencing using the relay set point Sensing abnormal pressure and taking appropriate security measures using the relay set point Controlling system pressure using the analog output as input to an automatic pressure controller Starting or stopping system processes with the relay set point Measuring pressures of backfilled gases... -
Page 13: About The Hps Tm Products Series 903 (Imt)
About the HPS Products Series 903 (IMT) The Series 903 Inverted Magnetron Transducer (IMT) is a compact cold cathode vacuum sensor with an integrated electronic control circuit. The (IMT’s) simple modular design, high reliability, and low cost make it especially attractive to OEM equipment manufacturers. -
Page 14: Installing The Series 903 (Imt)
Installing the Series 903 (IMT) Location Locate the (IMT) where it can measure process chamber or manifold pressure. Install it away from pumps, other vibration sources, and gas sources to give the most representative values. Feed through pins Orientation The (IMT) can be installed with the body set in any direction. -
Page 15: Vacuum Connection
2¾" CF KF 40 KF 25 Vacuum Connection Standard (IMT) vacuum interfaces are shown above. Use an all-metal clamp to mount a KF 25 or KF 40 flanged sensor body. Electrical Connection 1" tube Mount the (IMT) to a grounded vacuum system. Use a cable with a mating, 9-pin D-sub connector with strain reliefs to ensure proper electrical connection and to reduce stress on the connectors. - Page 16 Description Set point relay - normally open contact Set point relay - normally closed contact Power supply input (+) Power supply input (-) Analog output voltage (+) Set point relay - common Set point relay - disable Analog output voltage (-) High voltage - enable Male, 9-pin D-sub connector The power supply input may range from 14 to 30 VDC.
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Page 17: Relay Inductive Loads And Arc Suppression
Relay Inductive Loads and Arc Suppression If the set point relay is used to switch inductive loads, e.g. solenoids, relays, transformers, etc., the arcing of the relay contacts might interfere with controller operation or reduce relay contact life. Therefore an arc suppression network, shown schematically below, is recommended. -
Page 18: Operating The Series 903 (Imt)
Operating the Series 903 (IMT) Starting the (IMT) The (IMT) starts quickly in low vacuum. In the UHV pressure range, starting may be delayed by several minutes. The SensaVac IgniTorr™ Cold Cathode Starting Device may be used to reduce starting time (see Accessories, p. -
Page 19: Equation For Converting Voltage To Pressure
Cold cathode ionization systems are gas dependent and the Series 903 (IMT's) output is defined for air/nitrogen. Refer to page 16, Using the Series 903 (IMT) with Other Gases, to determine the true pressure of another gas. Equation for Converting Voltage to Pressure The following equation converts the (IMT) voltage reading V to a pressure reading P when using air or nitrogen. -
Page 20: Venting To Atmosphere
The set point can be turned off by connecting pin 7 (set point disable) to pin 4 (power supply input (-)). If the high voltage is started in high vacuum and the sensor discharge has not yet begun, the (IMT) will indicate too low of a reading, possibly tripping the set point. - Page 21 1) Pump your vacuum system to a base pressure. 2) Slowly and methodically probe with a small amount of gas. Flooding the leak or moving quickly past the leak can confuse the search since time lags may be significant. 3) Note the pressure reading. The pressure will either rise or fall, depending upon the ionization potential of the probe gas relative to the system gas.
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Page 22: Using The Series 903 (Imt) With Other Gases
Using the Series 903 (IMT) with Other Gases Before using the (IMT) to measure pressure of gases other than air or nitrogen, you should read and understand this section. To answer further questions, contact Applications Engineering at Products at 1-303-449-9861 or 1-800-345-1967. In a cold cathode ionization sensor, the degree of ionization, hence the indicated pressure, is gas-type dependent. -
Page 23: Calibrating For Other Gases
Below is a table which shows the correction factors needed to obtain curves for selected gases other than air/nitrogen. You can make your own graph from this information or use the graph on the previous page which shows the same information. -
Page 24: Maintaining The Series 903 (Imt)
Maintaining the Series 903 (IMT) Troubleshooting and Service The Series 903 (IMT) is designed to be maintenance-free under normal operation. If a problem should occur, the following chart lists symptoms, possible causes, and their remedies. With this guide, you should be able to diagnose some problems and correct them. -
Page 25: Contamination Of The (Imt) Sensor
Contamination of the (IMT) Sensor If pressure readings appear to be erratic, the sensor tube may be contaminated. Inspect it visually. If contamination is visible, you should replace the internal components with an Internal Rebuild Kit or a Rebuild Sensor (see Accessories, p. 22). Depending on the degree of contamination and application of the (IMT), the internal parts may be cleaned —... -
Page 26: Assembly
Do not damage the leaf spring while cleaning the Sensor. Each of the above cleaning methods should be followed with multiple rinses of deionized water. Dry all internal components and the sensor body in a clean oven. The two ceramic spacers are slightly porous and will require longer drying time to drive off the absorbed water. - Page 27 Cold Cathode Ionization Vacuum Sensor...
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Page 28: Accessories/Part Replacement
Accessories/Part Replacement Part # IgniTorr™ Cold Cathode Starting Device (for use with CF flange only) 120V 100006850 220V 100007090 Internal Rebuild Kit 100002353 Cathode, Grid Washer, Ground Shield, 1 Small and 1 Large Ceramic Spacer, Spring Rebuild Sensor KF 40 104230101 2¾"... -
Page 29: Product Warranty
III. This warranty gives PURCHASER specific legal rights, and PURCHASER may also have other rights which vary from state to state. IV. For HPS products sold outside of the U.S., contact your MKS representative for warranty information and service. Warranty Performance To obtain warranty satisfaction, contact the following: MKS Instruments, Inc., HPS... -
Page 30: Notes
Notes Cold Cathode Ionization Vacuum Sensor... -
Page 31: Appendix A: How The Series 903 (Imt) Works
Appendix A: How the Series 903 (IMT) Works Theory of a Cold Cathode Ionization Sensor A cold cathode ionization sensor has a number of inherent advantages over a hot cathode sensor. These include: No filament to burn out, which makes it immune to inrushes of air, and it is relatively insensitive to vibration damage No x-ray limit for lower pressure measurement No adjustment for emission current or filament voltage is needed... - Page 32 This equation is valid for the pressure range from 10 Torr down to Torr depending upon the series resistor used. Sensitivities of 1 to 10 amperes/Torr are not unusual. Starting a cold cathode sensor depends upon some chance event such as field emission or a cosmic ray producing the first electron. This produces additional electron/ion pairs during its transit between the electrodes, and the discharge soon builds up to a stable value.
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Page 33: Notes
Notes Cold Cathode Ionization Vacuum Sensor... - Page 34 Cold Cathode Ionization Vacuum Sensor...
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