Relay Setpoints; Control Setpoints; Protection Setpoint - MKS HPS 937A Series Owner's Operation And Maintenance Manual

Table II Setpoint Values
Pressure values below are specified in Torr. Numerical values of the limits will
change depending upon the units selected; however, the acutal pressure of the
limits will be the same.
Values are not adjusted when units are changed. They will retain
the same numerical value in the new units, which is not the same
pressure. Values should be reset after changing units.

Relay Setpoints

Sensor
Cold Cathode
Convection Pirani
Pirani
Thermocouple
Capacitance Manometer 1.0% FS
1T
10 T
100 T
1000 T
10000T

Control Setpoints

Sensor
Convection Pirani
Pirani
Thermocouple
Capacitance Manometer .5% FS
1T
10 T
100 T
The specified value is the pressure at which the cold cathode
sensor is turned on as the pressure is falling. When the pressure
is rising, the cold cathode sensor is turned off at 1.05 times the
control set point value.

Protection Setpoint

Sensor
Cold Cathode
66
Lower Limit Upper Limit
-10
2.0x10 9.5x10
-3
2.0x10 9.5x10
2.0x10 -3 9.5x10
2.0x10 -3 9.5x10
95% FS
-2
1.0x10 9.5x10
-1
1.0x10 9.5x10
0
1.0x10 9.5x10
1.0x10 +1 9.5x10
1.0x10 +2 9.5x10
Lower Limit
2.0x10 -3
2.0x10 -3
-3
2.0x10
-3
5.0x10
-2
5.0x10
5.0x10 -1
Lower Limit Upper Limit
-5
1.0x10 1.0x10
937A Multi-Sensor System
-3
+2
+1
-1
-1
+0
+1
+2
+3
Upper Limit combination
9.5x10 -1 yes
9.5x10 -1 yes
-1
9.5x10 yes
-1
9.5x10 yes
-1
9.5x10 no
9.5x10 -1 no
-2