Hps™ Products Series 937A Multi-Sensor High; Vacuum System - MKS HPS 937A Series Owner's Operation And Maintenance Manual

HPS™ Products Series 937A
T HPS™ P S
HE RODUCTS
uses the technologies of the cold cathode, standard Pirani, convection Pirani,
and thermocouple sensors and the capacitance manometer together to
measure pressures from as high as 10,000 Torr down to ultra high vacuum.
The System operates as many as five sensors simultaneously. The Series
937A Controller is configured to your specifications — you choose the type
cathode, Pirani, Convection Pirani, or thermocouple sensors.
After setup, you can confirm your settings with the Controller's setup
review feature.
A display message will let you know if the Controller has detected a broken
sensor wire or improper connection for the Pirani, thermocouple, and
Convection Pirani sensors.
Multi-Sensor High

Vacuum System

937A Multi-Sensor High Vacuum System
ERIES
and number of sensors, the line voltage,
frequency, units of measure, and
communications interface.
A large, easy-to-read liquid crystal
The Controller can be set up
with a cold cathode sensor
module and two more sensor
modules to operate either
capacitance manometers or cold
937A Multi-Sensor System
display (LCD) provides
simultaneous pressure
readings for all sensors. If
a sensor is turned off, not
connected properly, or used
out of range, a relevant
message replaces its
pressure reading. The
Controller's Function Select
rotary switch and push-button
labels are color-coded to
simplify use. Near each
sensor's readout, white space
is provided so that you may
write in sensor information
specific to your system.
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