MKS HPS 937A Series Owner's Operation And Maintenance Manual page 29

Length*
CC
Pirani
CEP
CM
TC
Typical Weight (with 2¾" CF Flange)
CC
Pirani
CEP (w/ KF Flange)
Vacuum Connection
CC
Pirani, CEP
CM
TC
*Length will vary with the type of vacuum connection selected. Refer to product
brochure for dimensions prior to installation.
Series 421 – 6.3 in. (160 mm)
Series 423 – 3.4 in. (86 mm)
4.4 in. (112 mm)
4.4 in. (112 mm)
Type 122 and 622 - 4.9 in. (124 mm)
Type 626 - 4.8 in. (121 mm)
Type 722 -3.9 in. ( 99 mm)
1.3 in. (34 mm)
421 - 2.4 lb (1.1 kg)
423 - 1.8 lb (0.8 kg)
0.5 lb (0.2 kg)
0.5 lb (0.2 kg)
KF 25
KF 40
2¾" CF
8 VCR
1" tubing
KF 16
KF 25
1
/8" NPT-M with
½" compression seal
8 VCR
4 VCR
1 1 /3" CF (non-rotatable)
2¾" CF (non-rotatable)
KF 16
8 VCR
8 VCO
1
1 /3" CF (non-rotatable)
½" tube
1
/8" NPT-M
937A Multi-Sensor System
® -F (½")
®
-F
®
-F
®
-F (½")
®
-F (½")
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