Related Manuals for MKS HPS I-MAG 423 Series
Summary of Contents for MKS HPS I-MAG 423 Series
- Page 1 Products ® Series 423 I-MAG Cold Cathode Ionization Vacuum Sensor OPERATION AND MAINTENANCE MANUAL...
- Page 2 Please Note: MKS Instruments provides these documents as the latest version for the revision indicated. The material is subject to change without notice, and should be verified if used in a critical application.
- Page 3 Products ® Series 423 I-MAG Cold Cathode Ionization Vacuum Sensor September 1997 PART #104230020 REV. B Cold Cathode Ionization Vacuum Sensor...
- Page 4 © 1999 by MKS Instruments, Inc., HPS Products Inc., All rights reserved. ALCONOX is a registered trademark of Alconox, Inc. IgniTorr is a trademark of MKS Instruments, Inc., HPS Products Inc. Inconel is a registered trademark of Inco Alloys International, Inc.
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Page 5: Table Of Contents
Table of Contents Table of Contents Package Contents ..............1 Safety Information ..............2 Symbols ....................2 Symbols Used in this Manual (English) ............... 2 Symboles utilisés dans ce manuel (Français) ............3 In dieser Betriebsanleitung vorkommende Symbole (Deutsch) ......... 4 Símbolos Usados en el Manual (Español) .............. - Page 6 Cold Cathode Ionization Vacuum Sensor...
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Page 7: Package Contents
Package Contents Before unpacking your Series 423 I-MAG ® Cold Cathode Ionization Vacuum Sensor, check all surfaces of the packing material for shipping damage. ® Please be sure that your Series 423 I-MAG Sensor package contains these items: 1 I-MAG ®... -
Page 8: Safety Information
Safety Information Symbols Symbols Used in this Manual (English) Definitions of CAUTION and NOTE messages used throughout the manual. CAUTION: Risk of electrical shock. ISO 3864, No. B.3.6 CAUTION: Refer to accompanying documents. ISO 3864, No. B.3.1 This sign denotes a hazard. It calls attention to a procedure, practice, condition, or the like, which, if not correctly performed or adhered to, could... -
Page 9: Symboles Utilisés Dans Ce Manuel (Français)
Symboles utilisés dans ce manuel (Français) Définition des indications ATTENTION et REMARQUE utilisées dans ce manuel. ATTENTION: Risque de secousse électrique. ISO 3864, No. B.3.6 ATTENTION: Se reporter à la documentation. ISO 3864, No. B.3.1 L’indication signale un danger potentiel. Elle est destinée à... -
Page 10: In Dieser Betriebsanleitung Vorkommende Symbole (Deutsch)
In dieser Betriebsanleitung vorkommende Symbole (Deutsch) Definition der mit VORSICHT! und HINWEIS überschriebenen Abschnitte in dieser Betriebsanleitung. VORSICHT! Stromschlaggefahr! ISO 3864, Nr. B.3.6 VORSICHT! Bitte Begleitdokumente lesen! ISO 3864, Nr. B.3.1 Das Symbol VORSICHT! weist auf eine Gefahrenquelle hin. Es macht auf einen Arbeitsablauf, eine Arbeitsweise, einen Zustand oder eine sonstige Gegebenheit aufmerksam, deren unsachgemäße... -
Page 11: Símbolos Usados En El Manual (Español)
Símbolos Usados en el Manual (Español) Definiciones de los mensajes de PRECAUCIÓN y OBSERVACIÓN usados en el manual. PRECAUCIÓN: Riesgo de descarga eléctrica. ISO 3864, N.° B.3.6 PRECAUCIÓN: Consultar los documentos adjuntos. ISO 3864, N.° B.3.1 Esto símbolo indica un riesgo. Pone de relieve un procedimiento, práctica, condición, etc., que, de no realizarse u observarse correctamente,... -
Page 12: Safety Precautions
Safety Precautions English High voltages are present in the Sensor during operation. High voltage is present in the cable and the Sensor when a controller is turned on. Français Danger de haute tension . Une haute tension est présente dans le câble et dans le capteur lorsque le contrôleur est sous tension. -
Page 13: Specifications
1.8 lb (0.8 kg) Vacuum Connection KF 25, KF 40, 2¾" CF (rotatable), 1" tubing Controller Compatibility Series 421, 929, 937, 941, 953, and MKS Type 146 Design and/or specifications subject to change without notice. Cold Cathode Ionization Vacuum Sensor... -
Page 14: Feature Locations
Feature Locations 6-32 x 0.25" Flat Head Countersunk Screw (2) (For Removal of Magnet for Bakeout) High Voltage Feed through Pin Ion Current Feed through Pin Sensor Tube Vacuum Port Cold Cathode Ionization Vacuum Sensor... -
Page 15: Sensor
With an output equivalent to the Series 421 Sensor, the I-MAG ® Sensor, together with its cable, is fully compatible with all cold cathode sensor controllers, as well as the MKS Type 146 vacuum sensor measurement and control system. Additional features include a removable magnet,... -
Page 16: Installing And Using The Series 423 I-Mag Sensor
Installing and Using the Series ® 423 I-MAG Sensor Locating and Orienting the Sensor Locate the I-MAG ® Sensor where it can measure process chamber or manifold pressure. Install it away from pumps, other vibration sources, and gas sources to give the most representative values. The magnetic field of the Sensor should also be kept away from ion or electron beam sources. -
Page 17: Operating The Sensor
Operating the Sensor Operation at pressures above 10 Torr for extended periods will increase the likelihood of contamination. High voltage should be disabled at pressures above 10 Torr to prevent sputtering. Preparing for Bakeout Loosen the thumb screw on top of the cable and remove it. Loosen the two flathead screws located on top of the Sensor, and then remove the magnet. -
Page 18: Maintaining The Series 423 Imag Sensor
Maintaining the Series 423 ® IMAG Sensor F F F F F For this chapter, please refer to the figure shown on page 15. Contamination of the Sensor If pressure readings appear to be erratic, the Sensor tube may be contaminated. -
Page 19: Cleaning
Cleaning If ultrasonic cleaning, use high quality detergents compatible with ® aluminum, such as ALCONOX Scrubbing with mild abrasives can remove most contamination. Scotch-Brite™ or a fine emery cloth may be effective. Rinse with alcohol. Clean aluminum and ceramic parts chemically in a wash, such as a 5 to 20% sodium hydroxide solution (not for semiconductor processing), at room temperature (20°C) for one minute. - Page 20 Slide the cathode , the grid washer , and the large ceramic spacer into place. The grid washer has a concave shape. Refer to the figure to see its installation orientation. Insert the small end of the compression spring into the sensor body .
- Page 21 Cold Cathode Ionization Vacuum Sensor...
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Page 22: Accessories / Spare Parts
Accessories / Spare Parts Part # IgniTorr™ Cold Cathode Starting Device 120V 100006850 220V 100007090 I-MAG ® Cold Cathode Cable 2 ft 100002505 10 ft 100007873 25 ft 100007874 50 ft 100002395 Custom, to 500 ft 100008759 Internal Rebuild Kit 100002353 Cathode, Grid Washer, Ground Shield, Ceramic Spacers –... -
Page 23: Product Warranty
III. This warranty gives PURCHASER specific legal rights, and PURCHASER may also have other rights which vary from state to state. IV. For HPS products sold outside of the U.S., contact your MKS representative for warranty information and service. Warranty Performance To obtain warranty satisfaction, contact the following: MKS Instruments, HPS products Inc., 5330 Sterling... -
Page 24: Notes
NOTES Cold Cathode Ionization Vacuum Sensor...
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