Typical Applications For The Series 937A - MKS HPS 937A Series Owner's Operation And Maintenance Manual

Typical Applications for
the Series 937A
Measurement of high vacuum chamber pressures
Control of high vacuum systems and process
sequencing using relay set points
Sensing abnormal pressure and taking appropriate
security measures using relay set points
Controlling system pressure using the analog output as
input to an automatic pressure controller
Starting or stopping system processes with relay set points
Measuring pressures of backfilled gases
Leak testing your vacuum system
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937A Multi-Sensor System