Connecting The Series 317 Sensor - MKS HPS 937A Series Owner's Operation And Maintenance Manual

Mount the Sensor with the vacuum port facing downward to reduce
particulates and liquids falling or flowing into it. The Sensor has been
calibrated in this position.

Connecting the Series 317 Sensor

To fit a KF 16 port to a KF 10 port, use an HPS
(HPS™ PN 100315821)
To install the Sensor with a
The Sensor's vacuum tubing has
®
two turns of Teflon tape on the threads of the Sensor in the direction of
the threading to ensure a leak-free seal. Positive pressures might blow the
Sensor out of a compression fitting, damaging equipment and possibly
injuring personnel.
Do not use a compression mount (quick connect) to attach the
Sensor to a system in positive pressure applications.
Positive pressures might blow the sensor out of the compression fitting,
damaging equipment and possibly injuring personnel.
A solid electrical connection between the Sensor and the
grounded vacuum system must be provided to shield the tube
element from external radiation sources.
In applications where the system may be exposed to large voltage
fluctuations, a centering ring with a screen should be installed, and the
screen and tubing then grounded. The clamp must be tightened properly so
the flange contacts the centering ring.
1
/ " NPT, do not use the case for tightening.
8
9
/ " hex flats for tightening. Wrap about
16
937A Multi-Sensor System
TM
adaptive centering ring
A.13