Cleaning The I-Mag Sensor - MKS HPS 937A Series Owner's Operation And Maintenance Manual

4 Remove the magnet
5 Using the smooth-jaw, needle-nose pliers, firmly grab the
compression spring
6 Pull on the compression spring while rotating to free it from
the formed groove of the sensor body
until the compression spring is completely free.
7 With the vacuum port facing up, carefully remove the
remaining components (
body .
Do not bend the anode
current feedthrough pin
the Sensor.

Cleaning the I-MAG Sensor

Depending on the degree of contamination and application of the Sensor, the
internal parts may be cleaned — either ultrasonically, with mild abrasives, or
chemically.
Do not touch any vacuum exposed part after cleaning unless
wearing gloves.
Ultrasonically clean using high quality detergents compatible with aluminum
®
such as ALCONOX .
Scrub with a mild abrasive to remove most contamination. Scotch-Brite™
or fine emery cloth may be effective. Rinse with alcohol.
Clean aluminum and ceramic parts chemically in a wash (not
recommended for semiconductor processing), such as a 5 to 20% sodium
hydroxide solution, at room temperature (20°C) for one minute. Follow with a
preliminary rinse of deionized water. Remove smut (the black residue left on
aluminum parts) in a 50 to 70% nitric acid dip for about 5 minutes.
Chemical cleaning should not be used to clean the anode ; mild
abrasives or ultrasonic cleaning are acceptable.
Do not damage the leaf spring
Each of the above cleaning methods should be followed with multiple rinses
of deionized water.
Dry all internal components and the sensor body
150°C. The two ceramic spacers ,
require longer drying time in the oven to drive off the absorbed water.
.
14
at the tip closest to the flange.
1
2 through
6
or the leaf spring
8
when assembling or disassembling
13
while cleaning the Sensor.
9
and , are slightly porous and will
2 5
937A Multi-Sensor System
. Continue to pull
7
) from the sensor
on the ion
9
in a clean oven set at
7
A.3