MKS HPS 937A Series Owner's Operation And Maintenance Manual page 28

Operating Temperature Range
CC
Pirani
CEP
CM
TC
Maximum Bakeout Temperature
(Without Controller or Cables)
CC
Pirani
CEP
CM
TC
Diameter
CC
Pirani
CEP
CM
TC
20
Series 421 - 0° to 70°C
(32° to158°F)Special available that
operates up to 200°C.
Series 423 - 0° to 70°C
(32° to158°F)
0° to 50°C (32° to 122°F)
10° to 50°C (50° to 122°F)
0° to 50°C (32° to 122°F)
0° to 40°C (32° to 104°F)
Series 421 – 250°C (482°F) when
backshell subassembly removed,
125°C (257°F) otherwise ;
Series 423 – 400°C (752°F) CF
flange version only with magnet
removed
50°C (122°F)
150°C (302°F)
100°C (212°F) RF shielded
N/A
60°C (140°F)
Series 421 – 2.2 in. (56 mm)
Series 423 – 2.6 in. (66 mm)
1.3 in. (34 mm)
1.6 in. (41 mm)
Type 122 - 3.0 in. (76 mm)
Types 622 and 626 - 2.6 in. (66 mm)
Type 722- 1.5 in. (38 mm)
1.3 in. (34 mm)
937A Multi-Sensor System