P-725.Xdd Fast Pifoc High-Dynamics Piezo Scanner - PI PIFOC P-725 series User Manual

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P-725.xDD Fast PIFOC High-Dynamics Piezo Scanner

Active axes
Motion and positioning
Integrated sensor
Open-loop travel, -20 to +120 V
Closed-loop travel
Open-loop resolution
Closed-loop resolution
Closed-loop linearity error
Repeatability
Runout θ , θ
X Y
Crosstalk in X, Y
Mechanical properties
Stiffness in motion direction
Resonant frequency, no load
Resonant frequency, under load, at 200 g
Push / pull force capacity in motion
direction
Drive properties
Ceramic type
Electrical capacitance
Dynamic operating current coefficient
Miscellaneous
Operating temperature range*
Material
Mass
Cable length
Sensor / voltage connection
*Specifications assured from 17 °C to 23 °C. The piezo scanner has to be recalibrated for temperatures outside
this range.
Physik Instrumente (PI ) GmbH & Co. KG, Auf der Roemerstr. 1, 76228 Karlsruhe/Germany
Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,
P-725.CDD P-725.SDD
Z Z
Capacitive SGS
18 18
18 18
0.2 0.2
0.2 0.2
0.04 0.5
±1.5 ±5
2 2
150 150
1.5 1.5
1180 1180
450 450
100 / 20 100 / 20
PICMA® P-887 PICMA® P-887
3.1 3.1
19.4 19.4
-20 to 80 -20 to 80
Aluminum Aluminum
0.21 0.2
1.5 1.5
Sub-D 7W2 (m) LEMO
www.pi.ws
2018-11-13
P725T0010, valid for P-725
Unit Tolerance
µm min. (20 % /
-0 %)
µm
nm typ.
nm typ.
% typ.
nm typ.
µrad typ.
nm typ.
N/µm ±20 %
Hz ±20 %
Hz ±20 %
N max.
µF ±20 %
µA / (Hz ±20 %
× µm)
°C
kg ±5 %
m ±10 mm