Vacuum Products Division
Table of Contents
Table of Contents
Table of Contents
Table of Contents
Warranty ...................................................................................................................................................................................................... iii
Warranty Replacement and Adjustment ............................................................................................................................................... iii
1
Preface .............................................................................................................................................................................................. 1
1.1
Documentation Standards .................................................................................................................................................... 1
1.1.1
Symbols ............................................................................................................................................................................. 1
1.2
Hazard and Safety Information ............................................................................................................................................ 2
1.2.1
Solvents ............................................................................................................................................................................. 3
1.2.2
1.2.3
O-ring Care ......................................................................................................................................................................... 4
1.2.4
Metal Seal Care ................................................................................................................................................................ 4
1.2.5
Spectrometer .................................................................................................................................................................... 5
2
2.1
2.2
3
3.1
3.2
Table of Figures
Table of Figures
Table of Figures
Table of Figures
Figure 2-1. Covers ...................................................................................................................................................................................... 6
Figure 2-2. Spectrometer access ........................................................................................................................................................... 7
Figure 2-3. Spectrometer exploded view .............................................................................................................................................. 8
Figure 2-4. Ion support assembly ......................................................................................................................................................... 10
Figure 2-5. M4 support screws ............................................................................................................................................................. 11
Figure 2-6. Collimator wire connection ............................................................................................................................................... 12
Figure 2-7. Ion chamber and extractor plate ...................................................................................................................................... 12
Figure 2-8. Filament positioning ........................................................................................................................................................... 13
Figure 2-9. Filament alignment ............................................................................................................................................................. 13
Figure 2-10. Spectrometer alignment .................................................................................................................................................. 14
Figure 2-11. Tightening spectrometer header screws ..................................................................................................................... 14
Figure 2-12. Ion source header pin schematic .................................................................................................................................. 15
Figure 2-13. Ion source header pin locations ..................................................................................................................................... 15
Figure 3-1. Rear screws .......................................................................................................................................................................... 16
Figure 3-2. Fan assembly ....................................................................................................................................................................... 17
Figure 3-3. Cable locations .................................................................................................................................................................... 17
Figure 3-4. Spectrometer access ......................................................................................................................................................... 18
Figure 3-5. Spectrometer exploded view ............................................................................................................................................ 19
Figure 3-6. Ion Support Assembly ........................................................................................................................................................ 21
Figure 3-7. M4 support screws ............................................................................................................................................................. 22
Figure 3-8. Collimator wire connection ............................................................................................................................................... 23
Figure 3-9. Ion chamber and extractor plate ...................................................................................................................................... 23
Figure 3-10. Filament positioning ......................................................................................................................................................... 24
Figure 3-11. Filament alignment ........................................................................................................................................................... 24
Figure 3-12. Spectrometer alignment .................................................................................................................................................. 25
Figure 3-13. Tightening spectrometer header screws ..................................................................................................................... 25
Figure 3-14. Ion source header pin schematic .................................................................................................................................. 26
Figure 3-15. Ion source header pin locations ..................................................................................................................................... 26
List of Tables
List of Tables
List of Tables
List of Tables
Manual 699910005, Hot Ion Source Replacement
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