Vacuum Products Division
M6 screws
(10X)
Belleville conical
washers
(3X/Screw)
Spectrometer
Header
Detector
Housing
Inlet
Manual 699910005, Hot Ion Source Replacement
Posts (4X)
Figure 3-5. Spectrometer exploded view
Top cover
Pre-amp
plug
Ion source
plug
Ion source
header pins
Filaments
(2X)
Metal gasket
(NOT REUSABLE)
Spectrometer
Body
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