Vacuum Products Division
Refer to Figure 3-6 for reference.
Collimator
screw
M4 support
Manual 699910005, Hot Ion Source Replacement
screws
Figure 3-6. Ion Support Assembly
Filaments
(2X)
Coupler screws (5X,
for the four green
wires and the one
brown wire in this
Extractor
plate
Ion
chamber
photo)
Extractor and
chamber wires
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