Edwards SCU-801 Manuals

Edwards SCU-801 Manuals

Manuals and User Guides for Edwards SCU-801. We have 2 Edwards SCU-801 manuals available for free PDF download: Instruction Manual

Edwards SCU-801 Instruction Manual

Edwards SCU-801 Instruction Manual (149 pages)

Brand: Edwards | Category: Control Unit | Size: 2 MB

Table of Contents

Table of Contents
7
Introduction
13
Scope and Definitions
13
Electromagnetic Compatibility
14
Limited Warranty
15
Item Warranted
15
Disclaimer
15
High Voltage Device Caution Label
16
Voltage Caution Label
16
Spare Parts
16
Labels
16
Voltage Rating Label
17
Safety Instruction Label
18
Connector Caution Label
18
Label Affixing Positions
18
Turbomolecular Pumps
19
General Description
19
Cable Sets
20
Technical Data
21
Specifications
21
Installation
25
Unpacking
25
Front Panel
25
Rear Panel
28
Precautions before Installation
29
Operating Environment
29
Insulation Test
29
Installation Area
30
Example of Securing the SCU-801
31
Attaching the SCU-801 to a Rack
31
Cable Connection
32
STP Connection Cable Specification
33
STP Pump Connection Cable
33
STP Connection Cable
33
TMS Connection Cable (Standard)
34
TMS Connection Cable (STP-A1603 Series)
34
TMS Connection Cable
34
Power Cable
35
Connecting to Semiconductor Equipment
37
Connecting to Power
37
Emergency off Circuit (EMO Circuit)
37
REMOTE X7 Connector
38
Connector X3A, X3B, X6 (D-Sub 9)
38
Remote Communication
38
Parallel Communication
38
Serial Communication
38
Adjustment Methods
39
Tuning
39
Tuning Method
39
Remote Mode
41
Change of Data after Tuning
41
Confirmation Mode
42
Confirmation Method
42
Error Detailed Information
44
Parameter Set Mode
45
Remote Operation Setting
45
Rotational Speed Setting
45
TMS Setting
45
Rotational Inhibit Signal Setting
45
Emergency Vent Valve Setting
45
Second Damage Limit Setting
46
Pump Air-Cooling Fan Output Setting
46
Warning Function Setting
47
Serial Port COM1 Setting
48
Serial Port COM2 Setting
48
Serial Port COM3 Setting
48
Date/Time Setting
48
Edcentra Setting
48
Factory Setting
48
Parameter Setting Procedure
49
Parameter Setting Method
50
Parameter Setting Method (Continued)
51
Parameter Setting Method (Continued)
53
Parameter Setting Method (Continued)
54
Manual Operation Mode
56
Manual Operation Method
57
Operation
59
Before Starting the STP Pump
59
Confirmation before Starting
59
Confirmation of Vacuum System
59
Powering on
60
Self Test
60
CAUTION" Message in the Self Test State
60
How to Start/Stop the STP Pump
61
Manual Start/Stop the STP Pump
61
Starting the STP Pump
61
Stopping the STP Pump
61
Starting the STP Pump after Stopping
61
Remote Operation
63
Input Signal Pins
63
REMOTE X7 Input Signal Pins
64
REMOTE X7 Input Signal Pins
65
Output Signal Pins
65
REMOTE X7 Output Signal Pins
66
REMOTE X7 Output Signal Pins
67
Starting/Stopping the STP Pump During Remote Operation (REMOTE X7)
68
Remote Setting
68
Starting/Stopping the STP Pump
68
Rotation INHIBIT Signal Input
69
Rotation INHIBIT Signal
69
Starting the STP Pump after Stopping
70
Starting the STP Pump after a Safety Function Operates
70
Powering off
70
Operating the TMS Unit (for Use with the TMS Unit)
71
Before Starting
71
Starting/Stopping
71
Setting the TMS Unit Function
71
TMS Function Setting Value and Indication
72
Temperature Control
72
Serial Communication
73
Serial Communication Protocol
73
Introduction
73
Connector X3A/X3B (D-Sub 9)
74
Connection and Setting up
74
Signal Connection
74
X6 Pin Position
75
Connecting the RS485
76
Communication Parameters
78
Communication Parameter Setting
78
Grounding Example (both Ends Grounding)
79
Recommended Items about Communication Cable Installation
79
Grounding Example (Single Point Grounding)
80
Pump Operation Commands
82
Protocol Specifications
82
General Description
82
Standard Transmission Frame (in the RS232/RS485 Single Point Connection)
83
Control Command
84
- (In the RS232/RS485 Single Point Connection)
  84
Query Command
85
- (In the RS232/RS485 Single Point Connection)
  85
Transmission Data Format
86
Frame Control (Checksum)
86
Error Control
87
Transmission Frame in the RS485 Multi-Point Connection
88
Control Command in the RS485 Multi-Point Connection
89
Query Command in the RS485 Multi-Point Connection
91
Pump Operation Commands
92
Broadcasting Command in the RS485 Multi-Point Connection
92
Application Note
93
Example of Answer Resending Process
94
Example of Command Sending During Answer Data Reply
94
Command Specifications
97
Command List
97
Readmeas
98
Command
98
Readfailmess
99
Error Message Values
101
Error Message Values (Continued)
102
Readmodfonct
102
Pump Operation Mode
103
Control Unit
104
Readversion
104
Readcounters
105
Readsetpoint
106
Readmotortemp
106
Readstatus
107
Readevents
108
Setspeedsetpoint
109
Readspeedsetpoint
110
Readmodfonctwithwarning
111
Readmeasvalue
114
Stp-Link
117
Edcentra
119
Backup Rotational Speed
121
Maintenance
121
Safety Functions
121
Power Failure
121
States of LCD, Leds and REMOTE Output Signals at a Power Failure
122
Operation after a Power Recovery
122
Abnormal State of Magnetic Bearing
122
Excessive Vibration
123
Motor Driver Overload
123
Overheating Inside the STP Pump
123
Overheating Inside the SCU-801
123
Overspeed
123
Abnormality/Error in the TMS Unit (for Use with the TMS Unit)
124
Failure of the Air-Cooling Fan
124
WARNING" Message Function
125
WARNING" Message Display Function
125
WARNING" Message Description
126
Damage Point Function
126
First Damage Limit
126
Second Damage Limit
126
Imbalance X_H, X_B, Z
127
Pump Run Time over
127
Pump Overload
127
Low RTC Battery
127
WARNING" Function Setting
128
Default Setting of "WARNING" Function
128
Factory Setting and Variable Range
128
Error at Self Test State
129
Error Messages at Self Test State
129
Error after Self Test
130
Error Messages
130
Troubleshooting Immediately after Power Failure Occurs
130
Troubleshooting Immediately after Other Abnormality/Errors Occur
131
When Error Message Is Not Displayed on LCD
140
Abnormalities When Powering on
140
Abnormalities When Performing Rotational Operation
140
Troubleshooting When Powering on
140
Troubleshooting When Performing the STP Pump Start Operation
140
Other Abnormalities
141
Error Record" Message Display Function
141
Troubleshooting While the STP Pump Is Rotating
141
Maintenance and Inspection
142
Cleaning
143
Maintenance
143
Storage, Transportation and Disposal
145
Storage of the SCU-801
145
Transporting for Repair or Overhaul
145
Disposal
146
Service, Spares and Accessories
147
Introduction
147
Service
147
Spares
147
Power Cable
148
Accessories
148

Advertisement

Edwards SCU-801 Instruction Manual

Edwards SCU-801 Instruction Manual (37 pages)

Turbomolecular pump & control unit

Brand: Edwards | Category: Water Pump | Size: 0 MB

Table of Contents

Table of Contents
3
Introduction
5
Scope and Definitions
5
General Description
6
User Connections and Indicator for the Ethercat Interface
7
Technical Data
9
Ethercat Network Connectors
9
USB Connector
9
Operating and Storage Data
9
Installation
11
Unpacking
11
Precautions before Installation
11
Ethercat Interface Panel
11
Ethercat in and out Connector
12
Mini-USB Connector
12
Operation
15
Setting Communication Parameters
15
Led's
16
DEVICE ID Rotary Switches
16
Taking and Releasing Control
17
Using Turbo Low Speed (Available for SCU-1600/1601 Only)
18
Rotation INHIBIT (Available for SCU-1600/1601 Only)
19
Protocol
20
Alternate PDO Mapping
20
Firmware Update over Ethercat
20
Maintenance
33
Inspect the Electrical Connections
33
Service, Spares and Accessories
35
Introduction
35
Service
35
Spares
35

Advertisement

Related Products

Edwards Categories

Water Pump Control Unit Industrial Equipment Measuring Instruments Controller

More Edwards Manuals