User Manuals: Edwards SCU-800 Turbo Pump Controller

Manuals and User Guides for Edwards SCU-800 Turbo Pump Controller. We have 3 Edwards SCU-800 Turbo Pump Controller manuals available for free PDF download: Instruction Manual

Edwards SCU-800 Instruction Manual (141 pages)

Brand: Edwards | Category: Control Unit | Size: 4 MB

Declaration of Conformity
2
Table of Contents
5
Introduction
13
Scope and Definitions
13
Applied Standards
14
Limited Warranty
14
- Warranty Period
  14
- Item Warranted
  15
- Disclaimer
  15
- Spare Parts
  15
High Voltage Device Caution Label
16
Voltage Caution Label
16
Labels
16
Voltage Rating Label
17
Safety Instruction Label
18
Connector Caution Label
18
Label Affixing Positions
18
Turbomolecular Pumps
19
- Cable Sets
  20
General Description
19
Technical Data
21
- Specifications
  21
Installation
25
Unpacking
25
Front Panel
25
Rear Panel
28
Precautions before Installation
29
- Operating Environment
  29
- Insulation Test
  29
- Installation Area
  30
Example of Securing the SCU-800
31
Attaching the SCU-800 to a Rack
31
Cable Connection
32
- STP Connection Cable
  33
STP Connection Cable Specification
33
- TMS Connection Cable
  34
STP Pump Connection Cable
33
TMS Connection Cable (Standard)
34
TMS Connection Cable (STP-A1603 Series)
34
- Power Cable
  35
Connecting to Semiconductor Equipment
37
- Connecting to Power
  37
- Emergency off Circuit (EMO Circuit)
  37
Connector X3A, X3B, X6 (D-Sub 9)
38
Remote Communication
38
- Parallel Communication
  38
- Serial Communication
  38
Adjustment Methods
39
- Tuning
  39
- Tuning Method
  39
- Change of Data after Tuning
  41
Remote Mode
41
Confirmation Mode
42
- Confirmation Method
  42
Parameter Set Mode
44
- Remote Operation Setting
  44
- Rotational Speed Setting
  44
- TMS Setting
  44
- Rotational Inhibit Signal Setting
  44
- Emergency Vent Valve Setting
  44
- Second Damage Limit
  45
- Pump Air-Cooling Fan Output Setting
  45
- Warning Function Setting
  46
- Serial Port COM1 Setting
  47
- Serial Port COM2 Setting
  47
- Serial Port COM3 Setting
  47
- Date/Time Setting
  47
- Factory Setting
  47
- Parameter Setting Procedure
  48
Parameter Setting Method
49
Parameter Setting Method (Continued)
50
Parameter Setting Method (Continued)
53
Manual Operation Mode
54
Manual Operation Method
54
Operation
55
Before Starting the STP Pump
55
- Confirmation before Starting
  55
- Confirmation of Vacuum System
  55
Powering on
56
- Self Test
  56
- CAUTION" Message in the Self Test State
  56
How to Start/Stop the STP Pump
57
Manual Start/Stop the STP Pump
57
Remote Operation
59
- Input Signal Pins
  59
REMOTE X7 Input Signal Pins
60
- Output Signal Pins
  61
REMOTE X7 Input Signal Pins
61
REMOTE X7 Output Signal Pins
62
REMOTE X7 Output Signal Pins
63
- Remote Setting
  64
- Starting/Stopping the STP Pump
  64
Starting/Stopping the STP Pump During Remote Operation (REMOTE X7)
64
Rotation INHIBIT Signal Input
65
- Starting the STP Pump after Stopping
  66
- Starting the STP Pump after a Safety Function Operates
  66
Rotation INHIBIT Signal
65
Powering off
66
Operating the TMS Unit (for Use with the TMS Unit)
67
- Before Starting
  67
- Starting/Stopping
  67
- Setting the TMS Unit Function
  67
- Temperature Control
  67
Serial Communication Protocol
69
Introduction
69
Serial Communication
69
Connection and Setting up
70
- Signal Connection
  70
Connector X3A/X3B (D-Sub 9)
70
X6 Pin Position
71
- Connecting the RS485
  72
- Communication Parameter Setting
  74
Communication Parameters
74
- Recommended Items about Communication Cable Installation
  75
Grounding Example (both Ends Grounding)
75
Grounding Example (Single Point Grounding)
75
Protocol Specifications
78
- General Description
  78
Pump Operation Commands
78
Pump Operation Commands
88
- Application Note
  89
Example of Answer Resending Process
90
Example of Command Sending During Answer Data Reply
90
Example of Command Sending Process
92
Example of Answer Receiving Process
92
Command Specifications
93
- Command List
  93
- Readmeas
  94
- Command
  94
- Readfailmess
  95
Error Message Values
97
- Readmodfonct
  98
Error Message Values (Continued)
98
Pump Operation Mode
99
- Readversion
  100
Control Unit
100
- Readcounters
  101
- Readsetpoint
  102
- Readmotortemp
  102
- Readstatus
  103
- Readevents
  104
- Setspeedsetpoint
  105
- Readspeedsetpoint
  106
- Readmodfonctwithwarning
  107
- Readmeasvalue
  110
Stp-Link
113
Maintenance
115
Safety Functions
115
- Power Failure
  115
Backup Rotational Speed
115
- Operation after a Power Recovery
  116
- Abnormal State of Magnetic Bearing
  116
States of LCD, Leds and REMOTE Output Signals at a Power Failure
116
- Excessive Vibration
  117
- Motor Driver Overload
  117
- Overheating Inside the STP Pump
  117
- Overheating Inside the SCU-800
  117
- Overspeed
  117
- Abnormality/Error in the TMS Unit (for Use with the TMS Unit)
  118
- Failure of the Air-Cooling Fan
  118
WARNING" Message Function
119
- WARNING" Message Display Function
  119
WARNING" Message Description
120
- Damage Point Function
  120
- First Damage Limit
  120
- Second Damage Limit
  120
- Imbalance X_H, X_B, Z
  121
- Pump Run Time over
  121
- Pump Overload
  121
- Low RTC Battery
  121
Default Setting of "WARNING" Function
122
Factory Setting and Variable Range
122
WARNING" Function Setting
122
Error Messages at Self Test State
123
Error at Self Test State
123
Troubleshooting When Powering on
133
Troubleshooting When Performing the STP Pump Start Operation
133
- Other Abnormalities
  134
When Error Message Is Not Displayed on LCD
133
- Abnormalities When Powering on
  133
- Abnormalities When Performing Rotational Operation
  133
Troubleshooting While the STP Pump Is Rotating
134
Error Record" Message Display Function
134
Maintenance and Inspection
135
- Replacing the Fuses
  135
- Cleaning
  136
- Maintenance
  136
Storage, Transportation and Disposal
137
Storage of the SCU-800
137
- Transporting for Repair or Overhaul
  137
Disposal
138
Service, Spares and Accessories
139
Introduction
139
Service
139
Spares
139
Power Cable
140
Accessories
140

Edwards SCU-800 Instruction Manual (32 pages)

Brand: Edwards | Category: Control Unit | Size: 0 MB

Declaration of Conformity
2
Table of Contents
3
Introduction

5
Technical Data

7
Installation

10
- Unpack and Inspect
  10
- Fitting the Module
  10
- Dimensions of the Profibus Module (MM)
  10
- Component Checklist
  10
- Rack Mounting
  11
- Panel Mounting
  11
- DIN Rail Mounting
  11
- Panel Mounting the Module
  11
- Electrical Connections
  12
- DIN Rail Mounting the Module
  12
- Serial Interface Cable
  12
- Bus Termination
  13
- SCU-750 Control Unit Set up
  13
- Profibus Module Rear Connections
  13
- SCU-750 Control Unit Command Interface and Communications Parameters
  13
- SCU-800/1400/1500/1600 Control Unit Set up
  14
- IX-455 Control Unit Set up
  14
Operation

15
- Profibus System Information
  15
- Simple Set up Instructions
  15
- Front Panel Display
  15
- Profibus Front Panel Display
  15
- Address Set up
  16
- Front Panel Symbols and Their Functions
  16
- Address Switch Settings
  16
- Baud Rate
  18
- Software Format
  18
- Parameterisation
  19
- Configuration
  19
- Configuration Failure
  19
- Diagnostics Description
  20
- Data Exchange Values
  20
- Software Modules
  21
- Module 01 - Pump Command
  21
- Summary of Software Modules
  21
- Module 02 - Pump State
  22
- Module 03 - Warning Flags
  22
- Module 04 - Failure Flags
  23
- Module 05 - Pump Speed
  24
- Module 06 - Motor Current
  24
- Module 07 - Motor Temperature
  24
- Module 08 - Control Unit Temperature
  24
- Module 09 - Supervisor Software Version
  24
- Module 10 - Motor Drive Software Version
  25
- Module 11 - Active Magnetic Bearing Software Version
  25
- Module 12 - Profibus Software Version
  25
- Module 13 - Pump Serial Number
  25
- Module 14 - Control Unit Serial Number
  25
- Module 15 - Pump Run Time
  25
- Module 16 - Control Unit Run Time
  25
- Module 17 - Damage Limit Counter
  26
- Module 18 - Speed Setpoint
  26
- Module 19 - Xh Vibration
  26
- Module 20 - Xb Vibration
  26
- Module 21 - Z Vibration
  26
- Module 22 - Speed Demand
  27
Maintenance

28
- Fault Finding
  28
- Fault Finding Guide
  28
Storage and Disposal

29
- Storage
  29
- Disposal
  29
Spares and Accessories

30
- Introduction
  30
- Accessories
  30
- Index
  31

Edwards SCU-800 Instruction Manual (37 pages)

Turbomolecular pump & control unit

Brand: Edwards | Category: Water Pump | Size: 0 MB

Table of Contents
3
Introduction
5
Scope and Definitions
5
General Description
6
User Connections and Indicator for the Ethercat Interface
7
Technical Data
9
Ethercat Network Connectors
9
USB Connector
9
Operating and Storage Data
9
Installation
11
Unpacking
11
Precautions before Installation
11
Ethercat Interface Panel
11
Ethercat in and out Connector
12
Mini-USB Connector
12
Operation
15
Setting Communication Parameters
15
Led's
16
DEVICE ID Rotary Switches
16
Taking and Releasing Control
17
Using Turbo Low Speed (Available for SCU-1600/1601 Only)
18
Rotation INHIBIT (Available for SCU-1600/1601 Only)
19
Protocol
20
Alternate PDO Mapping
20
Firmware Update over Ethercat
20
Maintenance
33
Inspect the Electrical Connections
33
Service, Spares and Accessories
35
Introduction
35
Service
35
Spares
35

Edwards Categories

Water Pump Control Unit Industrial Equipment Measuring Instruments Controller

More Edwards Manuals

User Manuals: Edwards SCU-800 Turbo Pump Controller

Edwards SCU-800 Instruction Manual (141 pages)

Table of Contents

Edwards SCU-800 Instruction Manual (32 pages)

Table of Contents

Introduction

Technical Data

Installation

Operation

Maintenance

Storage and Disposal

Spares and Accessories

Edwards SCU-800 Instruction Manual (37 pages)

Table of Contents

Related Products

Edwards Categories