Parts List - Ulvac EGL-206M Instruction Manual

5.3

Parts List

EGL-206M/EGL-406M ( 1/3 )
No. Part No.
1 -
2
200001660700
3
210004014000
4
C10000000417
5
200001615100
6
200001660900
7
200001661000
8
210004030200
9
200001661200
10
200001661400
11
200001661600
12
210004016100
13
200001661800
14
200001662000
15
200001662100
16
200001662200
17
200001662400
18
200001662600
19
210004015500
20
200007218400
21
200001662900
22
200001663000
23
200001663100
24
200001663200
25
C10000000001
26
210004039700
27
210004030300
28
200001663400
29
C10000000002
30
200001663500
31
200001663600
32
200001663700
SECTION 5
EGL-206M/EGL-406M One set of E/B gun
Shield
Hearth deck
O-ring
Vacuum joint (1)
Trimming piece
Holder
Setscrew
Y-axis magnet pole (right)
Y-axis magnet pole ( left )
Y-axis iron core
Y-axis magnet coil
Main magnet pole ( right )
Main magnet pole ( left )
Hearth cover (2)
Hearth cover (1)
Adaptor ( right )
Adaptor ( left )
X-axis magnet coil
Piping
Thrust washer
Centering ring
Thrust needle bearing NTB2035
Centering ring
O-ring
Hearth
Bevel gear (1)
Bearing
O-ring
Hearth shaft
Water outlet port
Water inlet port
29
Description
SUS304
Viton JIS B2401 P9
Cu
SUS304
SUS304
SUS304
SUS304
Cu
WS2035
GS2035
Neoprene ISO No. 210
SUS304
#6907
Neoprene ISO No. 213
SUS304
SUS304
SUS304
Q'ty
-
1
1
4
2
2
1
2
1
1
2
2
1
1
1
2
1
1
1
1
1
1
1
1
1
1
1
1
4
1
1
1