Ulvac EGL-206M Instruction Manual page 21

(7) Cooling water piping (See Fig. 3.3.)
Use copper pipes more than 8 cm in diameter for the cooling water piping
inside the vacuum chamber.
Use nylon tube and pressure-proof rubber hose more than 1/2 inch in diameter
for the water feeding and draining lines outside the chamber.
Provide a pressure switch on the water supply side and a flow switch on the
water drain side. Also installation of a valve at the water supply and drain
ports for maintenance of the EB gun is recommended.
Don't use the EB gun in a humid environment. Even in low-voltage, electric
shock may occur. In case of water leakage, wipe up water and use the EB gun
after drying.
1. The flow switch recommended by ULVAC uses a magnetic float, which
may be deposited with iron powder. Periodically disassemble and clean
it.
2. The pressure switch has been so set that it is turned ON at 3 kg/cm
OFF at 2.5 kg/cm
there is back pressure.
3. Installation of a valve at the water supply and drain ports for maintenance
of the EB gun is recommended. If a valve at the water supply is not
required, water leakage may occur.
(8) Wiring of deflection coils (See Fig. 3.4)
Glass-cloth sheathed wire or Teflon sheathed wire or ceramic beads-sheathed
wire is suited to wiring inside the vacuum chamber. Place this wiring as far
away from the filament cables as possible.
Wire the deflection coils 20mm or more away from the filament cables.
If the distance between these wires is not more than 20 mm, arc discharge of
the high voltage will take place and the power supply may fail.
SECTION 3
DANGER
CAUTION
2
by initial adjustment, but it will need re-adjustment if
WARNING
11
2
and