Ulvac EGL-206M Instruction Manual page 46

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9 Is the surface of the high voltage
feed-through (high voltage
electrode) insulator contaminated?
10 Is the connection between the high
voltage cable and high voltage
feed-through secure? Check if
screws are oxidized with heat and
insulation covering on the cable
side is melted in a dangerous
condition.
11 Are all parts energized with high
voltage covered and protected to
prevent access of fingers, stick or
the like?
12 Are the screws of the emitter
assembly firmly tightened?
Check if screws tend to scuff in
disassembly.
13 Check if the vacuum gauge needle
deflects when the EB gun is rotated.
When operated eight hours a day.
SECTION 6
Checks
Frequency of check
Daily Weekly
36
Remarks
Monthly
See
Note 5.
See
Note 6.
See
Note 9.