Ulvac EGL-206M Instruction Manual page 40

EGL-206M/EGL-406M ( 2/3 )
No. Part No.
33
200001663800
34
200001663900
35
200001664000
36
200008869300
37
200008869400
38
200008869500
42
210004030400
43
200000493200
44
200000493300
45
200000495600
46
200001664300
47
200001664400
48
200001664500
49
200003019800
50
200000604100
51
200000604200
52
200003029600
53
200003029700
54
200003029900
55
200003030500
56
200001538600
57
200003031100
58
200003031400
59
210004016900
61
210004028700
62
210004028600
63
210004026400
64
210004028100
65
210004028400
66
210004029400
67
210004025900
68
210004028300
SECTION 5
Separator
Support
Base plate
Limit switch mount SUS304
Limit switch base
Limit switch cover
Bevel gear (2)
Snap ring for hole
Snap ring for shaft
Bearing #6000 special
Collar
Shaft
Housing
Allen screw
Allen screw
Allen screw
Allen screw
Allen screw
Allen screw
Allen screw
Allen screw
Allen screw
Setscrew
Emitter assembly
Set pin
Insulator mount
Anode plate
Insulator
Insulator cover
Bracket
Beam former
Fixed insulator
30
Description
SUS304
SUS304
SUS304
SUS304
SUS304
C type 26 SUS304
C type 10 SUS304
SUS304
SUS304
SUS304
SUS304 M3 6
SUS304 M4 6
SUS304 M4 8
SUS304 M4 10
SUS304 M4 12
SUS304 M4 20
SUS304 M5 10
SUS304 M5 15 (14)
SUS304 M6 40
SUS304 M5 6
SUS304
Cu
Mo
Alumina
SUS304
SUS304
Mo
Alumina
Q'ty
1
4
1
1
1
1
1
1
1
2
1
1
1
4
10
8
15
2
4
5
4
4
2
-
2
2
1
2
2
1
1
2