Ulvac EGL-206M Instruction Manual page 7

Multi-hearth electron beam soures
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This EB gun has been shipped after rigorous inspection at the factory, but if any
trouble occurs due to defects or if any component is found damaged in transit,
please contact your local ULVAC organization or representative.
This EB gun is warranted free from defects in material or workmanship for a
period of one year from the date of shipment if it is properly operated and
maintained.
If the trouble is evidently imputable to defects in material or
workmanship, ULVAC will correct it free of charge. However, troubles caused
by misuse or abuse of the equipment, negligence of operating instructions, or
modification or by force majeure are not covered by this warranty.
-Consumable parts, which are not covered by the warranty-
1. Filament
2. Insulator
3. Insulation bush
4. Fixed insulator
5. Beam former
6. Anode plate
• Verification of trouble
If any trouble is found, check the trouble symptom and verify that it is a trouble
referring to "Maintenance" in this manual. Complete information about the
trouble will prevent loss on both sides due to misunderstanding or misjudgment
and allow us to take quick actions for repair.
• Service call
If you encounter any trouble or come up with any question, please contact your
local ULVAC representative.
In your service call, please furnish us with as complete information as possible,
including the name, model number and serial number of your equipment and
trouble symptom.
Warranty and Repair
Warranty
210004027700
210004028100
210004028200
210004028300
210004025900
210004026400
In Repair
EB0007-03e

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Egl-406m

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