Ulvac EGL-206M Instruction Manual page 4

This manual is intended to serve as a guide for safe and efficient use of this
electron beam source. It contains important information, such as cautions and
operating, inspecting and maintenance procedures that are required in using this
electron beam source. Carefully read this manual and fully understand them
before operation to prevent accidents and troubles.
Read this manual before operation and fully understand operating, inspecting and
maintaining procedures.
Do not operate this electron beam source before you fully understand them.
Carefully read and fully understand Safety Cautions and Safety .
Read this manual until you fully understand it and can operate the power
supply correctly.
Keep this manual at your hand for immediate reference.
If this electron beam source is moved to other location, attach this manual to
the power supply.
The contents of this manual are subject to change without notice for
improvement.
If you come up with any question or trouble, contact your local ULVAC
representative or ULVAC,Inc..
Always use the electron beam source safely and take care of it correctly.
No part of this may be copied or reproduced for use by a third party without
consent by ULVAC in writing.
CAUTION
NOTICE
EB0007-03e