Ulvac VPC-061A Manuals

Manuals and User Guides for Ulvac VPC-061A. We have 1 Ulvac VPC-061A manual available for free PDF download: User Manual

Ulvac VPC-061A User Manual

Ulvac VPC-061A User Manual (29 pages)

Desktop vacuum Coater

Brand: Ulvac | Category: Industrial Equipment | Size: 0 MB

Table of Contents

Table of Contents
2
To Safely Use this Equipment
4
Before Using
9
Target Users
9
Read the Manual Thoroughly
9
Keep this Manual in a Safe Place
9
Warranty
9
Statutory Requirements for Disposal
9
Safety During Repair
9
Product Overview
10
Purpose of this Product and Actions that Are Prohibited
10
Safety Device and Its Purpose and Functions
10
Product Specifications
11
Individual Unit Specifications
11
Standard Accessories
13
How to Use Switches, Handles, and Operation Levers
13
Layout of Switches, Handles, and Operation Levers
14
Evacuation System Drawing
14
Electrical System Drawing
14
Opening the Package and Installation
15
General Cautions
15
Package Upon Delivery
15
Installation Site
15
Power Supply
16
Necessary Tool List
17
How to Change the Oil Cap into Exhaust Cap
17
Operations
18
Risks and Safety Measures Upon Operations
18
Device Operation Procedure
19
Preparation
19
Operations
19
Stop
19
Deposition Steps
20
Opening Bell Jar
20
Vacuum Evacuation of Bell Jar
20
Film Formation Steps
21
Preparation
21
Film Formation
21
Measures Upon Abnormal Conditions
21
Instantaneous Power Outage
21
Long Power Outage
21
Operation after Power Recovery
21
Maintenance and Repair
22
Risks and Safety Measure Upon Maintenance and Repair
22
Maintenance and Repair that Can be Made by User
22
Removal, Maintenance, and Installation of Devices
23
Oil Sealed Rotary Vacuum Pump
23
Oil Diffusion Pump
23
Oil Mist Trap
24
O-Ring at Gas Bell Jar
24
Glass Bell Jar
24
Maintenance and Inspection Points
25
Troubleshooting
26
Storage of Equipment
27
Consumable List
27
Disposal
28
Cautions Upon Disposal
28
Optional Parts
29
Standard Optional Parts List
29

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