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(7) Optional Parts
Caution
1. Standard Optional Parts List
Name of optional parts
Evaporation power
supply
Evaporation power
supply cable
Electrode set
Filament holder
Filament
φ140 material holder
8P Hermetic
Socket for 8P Hermetic
Glass bell jar
Bell jar cover
Oil mist trap
Vacuum meter
φ15GP Attachment
Do not use other manufacturer's optional parts
for modification.
We do not assume any responsibility for any damage
Avoid this action
due to such modifications.
Power supply for deposition.
Evaporation power supply output
cable
Evaporation electrode
Secure the evaporation power.
Evaporation power
Fixing material
Terminals for energizing.
Terminal socket for energizing.
Glass container for film formation.
Glass bell jar handle
Prevents glass explosion.
To prevent from oil and smoke
flow from the exhaust opening of
the oil sealed rotary vacuum
pump
Meter to measure pressure
Attachment to convert the bore
diameter
Applications
21
Installation
conditions
Factory
assembled
Factory
assembled
Installable by
user
Installable by
user
Installable by
user
Installable by
user
Installable by
user
Installable by
user
Installable by
user
Installable by
user
Installable by
user
Installable by
user
Installable by
user
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