Ulvac EGL-206M Instruction Manual page 8

• Repair period
In case of trouble, every effort will be made to correct it at the earliest possible
date, but it may take time to repair it if the unit is installed in a remote place or is
severely damaged. Replacement parts for units older than five years may not be
readily available because their production may have been discontinued. In that
event, repair will take longer.
Please comply with the state regulation or the local regulation for disposal of the
Electron Beam GUN. If hazardous material as evaporation material is used,
relegate the disposal to a professional disposal firm. You would be responsible for
the cost relating to disposal
FOR DISPOSAL
EB0007-03e