Ulvac EGL-206M Instruction Manual page 25

SECTION 3
ION BEAM
ELECTRON
GUN SHIELD
BEAM
PLASMA
SPUTTERING
EVAPORATION
FILAMENT HIGH VOLTAGE LEADS
MATERIAL
Fig. 3-3. The sputtering mechanism for EB gun
ELECTRON BEAM GUN
GUN SHILED
PUMP OUT AREA
(100ｃ㎡ MINIMUM)
H>=15mm
HIGH VOLTAGE LEADS
Fig. 3-2 Sputtering mechanism and gun shield
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