Ulvac EGL-206M Instruction Manual page 37

(7) Apply vacuum grease to the new O-ring and mount it onto the hearth shaft.
At this time, make sure that the O-ring is free from foreign matter like flint,
hair or the like. Foreign matter can cause leak.
(8) Insert the hearth into the hearth shaft straight from above.
If it is inserted obliquely, the seat surface may be scarred. So be cautious in
the work.
(9) Reassemble the electron beam gun by reversing the disassembling
procedure. Before feeding water to the hearth after reassembly, make sure
that vacuum joints and screws are firmly tightened and that there is no
water leak when water is fed.
When the electron beam gun is disassembled, carefully check the hearth shaft.
In the multi-hearth, cooling water flows only to the crucible that is visible
from the hearth deck. Therefore, the hole in the hearth shaft must face the
emitter assembly.
SECTION 5
CAUTION
WARNING
27