Status Sensor - Inficon Cygnus 2 Operating Manual

Thin film deposition controller
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9.4.30 Status Sensor

Command = SS <Command ID><Sensor>
Command ID = <Byte> See "Description" in
Sensor = <Byte> Sensor number (0 - 6)
If the Sensor number is zero the response will give the value for all six Sensors.
Response = See Data Returned in
Table 9-14 Status sensor
SS
Description
Command
ID
0
Crystal Life
(0x00)
1
Crystals
Remaining
(0x01)
2
Crystal
Position
(0x02)
3
Sensor
Status
(0x03)
4
Fundamental
Frequency
(0x04)
Number
of bytes
in the
Data Returned
response
1 or 6
<Byte> or
<Byte><Byte><Byte>
<Byte><Byte><Byte>
1 or 6
<Byte> or
<Byte><Byte><Byte>
<Byte><Byte><Byte>
1 or 6
<Byte> or
<Byte><Byte><Byte>
<Byte><Byte><Byte>
1 or 6
<Byte> or
<Byte><Byte><Byte>
<Byte><Byte><Byte>
8 or 48
<Long> or
<Long><Long><Long>
<Long><Long><Long>
Table
9-14.
Table
9-14.
One byte for each Sensor.
Range will be 0 - 100
One byte for each Sensor. Range between 0
and 12. Number of good crystals on a
CrystalTwo, Crystal6 or Crystal12 Sensor.
Returns either a 0 (current crystal failed) or a
1 (current crystal good) for a Single sensor.
The command is not intended to be used for
Generic sensor - returns NO_DATA .
One byte for each Sensor. Range between 1
and 12. The current crystal position on a
CrystalTwo, Crystal6 or Crystal12.
One byte for each Sensor.
Bit1
Bit 0
0
0
0
1
1
0
Invalid Measurement
1
1
Bit 7
Bit 6
0
0
0
1
1
0
1
1
One long integer for each Sensor.
Unconverted. To convert to Hz, multiply by
0.000873114913702011
Cygnus 2 Operating Manual
Notes
Good Crystal
Failed Crystal
on Crystal
Undefined
Auto-Z-Ratio
Sensor Z-Ratio
Material Z-Ratio
Undefined
9 - 41

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