Related Manuals for Inficon VGC083B
Summary of Contents for Inficon VGC083B
- Page 1 Operating M Manual Incl. EU Declara ation of Conform mity Vacu um G Gauge e Con ntroller VGC083 3A, VGC C083B tinb29e1 (2016 6-11)
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Page 2: Product Identification
399- -700 (VGC083A, use w with BAG050 and PGEG050) 399- -701 (VGC083B, use w with BAG051 or BA AG052/053 and P PEG050) he part numbe er (PN) can be e taken from t the product na ameplate. -
Page 3: Liability And Warranty
Labels may be located on or inside the device to alert people that dangerous voltages may be present. Liability and Warranty INFICON assumes no liability and the warranty is rendered null and void if the end- user or third parties • disregard the information in this document •... -
Page 4: Table Of Contents
Product Identification Validity Important User Information Liability and Warranty 1 Introduction / General Information 1.1 VGC083A 1.2 VGC083B 2 Technical Data 3 Important Safety Information 3.1 Safety Precautions - General 3.2 Safety Precautions - Service and Operation 3.3 Electrical Conditions 3.3.1 Proper Equipment Grounding... - Page 5 Convection Gauge 9 Communication Protocol (Serial Interface) 9.1 Device Specific Serial Communication Info 9.2 INFICON RS232 / RS485 Command Protocol Summary 9.3 INFICON RS232 and RS485 Command Protocol Summary 9.4 RS232 GP 307 and 358 Protocol 9.5 RS485 GP 307 and 358 Protocol Service 10.1...
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Page 6: Introduction / General Information
UHV EB-de egas B-A gau • One or two INFICON PG GE050 convect tion enhanced d pirani heads • Cables to in nterconnect th he VGC083A a and point-of-us se devices ®... -
Page 7: Vgc083B
• les to intercon nnect the VGC C083B and po int-of-use dev vices ® ® The V VGC083B will also o operate the Gran nville-Phillips onvectron convec ction enhanced pir rani vacuu um gauge head. Typical components o... -
Page 8: Technical Data
Functionality VGC083A (IG) powers & operates one INFICON BAG050 nude UHV EB-Degas B-A hot cathode or other equivalent brands (CG) powers & operates up to 2 INFICON PGE050 ® convection or Granville-Phillips (GP) ® Convectron VGC083B (IG) powers & operates one BAG051 or BAG052 /... - Page 9 Analog input one 0 … 10 V (dc) analog input signal from a CDG when used as an alternate gauge to CG2, or analog input from one of the following INFICON modules: PGE300, PGE500, BAG300 Serial communications Protocol RS485 / RS232 - ASCII protocol...
- Page 10 0 W protected against power reversal and transient over r-voltages Connectors IG & CG gauge cable assemb blies provided d by INFICON Digital I/O 9-pin D D-sub male Serial comm munications RS232 9-pin D D-sub female RS485 9-pin D D-sub male...
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Page 11: Important Safety Information
INFICON dis sclaims all liab bility for the cu tomer's failure to com mply with these e instructions. Althoug... -
Page 12: Electrical Conditions
Contact INFICO ON for return a authorization a and instruction ns for returnin ng the product o INFICON for r evaluation. measured pre essure exceed ds the thresho olds that are d defined under t the following... -
Page 13: Proper Equipment Grounding
3.3.1 Prop per Equipm ment ARNING! Haz zardous voltag ges that could seriously inju re or cause de eath are Grou unding present in many vacu uum processes s. Verify that t the vacuum co onnection port ts on which th he ion gauge a and the conve ection gauges... - Page 14 WARNING G! Do not use e the PGE050 in an explosiv ve atmosphere e or in the pre ence of flamm mable gases, v vapors or fume es. Do not use e the PGE050 to measure he pressure of f explosive or combustible g gases or gas m mixtures.
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Page 15: Installation
Optional EIA-standard, 19-inch, 2U height rack mount panels are available from INFICON. The optional rack mount panels are provided with panel cut- outs and mounting holes to allow efficient mounting of your VGC083 unit. - Page 16 Single cut-out panel All dimensions in inches. The single cut-out and dual cut-out rack mountable panels shown above are availa- ble from INFICON. Panel color matches the front panel of VGC083 units. Screws for mounting to rack enclosure are included. tinb29e1 (2016-11) VGC083A_B.om...
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Page 17: Mechanical Installation - Ionization Gauge
4.1.3 Mec chanical Ins stallation - Ioniz zation Gau C083A The VGC083A A can operate one INFICON N BAG050 nud de UHV EB-degas Bay yard-Alpert ho ot cathode ioni ization gauge or other brands of equ ivalent nude U UHV EB-dega... -
Page 18: Electrical Installation
Mount the PGE E050 with port t down, if poss sible, to help m minimize the e effect of any articles or con ndensation fro om collecting in n the gauge. Do not mount t the PGE050 w where it will be subjected to excessive vib ration. -
Page 19: Installation
4.2.2 Insta allation A good, recommende ed practice is t to remove pow wer from any c cable prior to c con- necting or disconnect ting it. The ele ectrical connec ctions for the V VGC083 are lo ocated on the b back panel of t the device as shown below. -
Page 20: Standard Nude And Glass Ig Cable
Part numbers → → 81. G050 nude IG G050 nude IG cable bakab ble cable 200 °C 50 °C VGC083B: BAG051, Part numbers → → 81. BAG052, B BAG053 cable BAG051 nude e IG G051 nude IG c... -
Page 21: Bakeable Nude Ig Cable
C083B able (PN → For the glass IG, conn nect the IG ca 81) at the VG C083B contro oller as describe ed in the previ ious page. Aft ter installing th he glass IG he ead on your va acuum system, connect the h... -
Page 22: Standard Ig Cable Connector Pin Out
50 °C ambie ent temperatu re. All IG cabl es provided b by INFICON ca an be used with either sing gle or dual filam ment ion gaug ges and filame ent switching is... -
Page 23: Connecting The Pge050 - Connectors Labeled "2" And "3
DE-9 D-subminiature connector to VGC083 and PGE050 connectors to "2" or "3". For your reference, the wiring chart for the PGE050 cable provided by INFICON is shown below. In addition to INFICON provided standard cable assembly lengths, INFICON will provide custom length cable assemblies upon request. -
Page 24: Power Connection
Opt tional power s upplies are als so available fr rom INFICON PN → 81). Power tact Descriptio Analo g Output contacts) nectors Power input (20 …... -
Page 25: Digital I/O Connection
When using a capacitance manometer / diaphragm gauge or INFICON modules such as the PGE300, PGE500, BAG302 as an ALTERNATE GAUGE, the gauge must be connected to the VGC083 as shown below. The alternate gauge must be provided power from an auxiliary power supply capable of providing the power re- quired by the alternate gauge connected to the VGC083. -
Page 26: Rs232 / Rs485 Serial Communications Connection
Signal: Open c collector transi stor (ground e emitter) rated a at 40 V max. V VCE, 0 mA IC max. ransistor on = = Degas on or error conditio n exists, ransistor off = = Degas off or no error cond dition exists pin (DE-9P) D D-subminiatu... - Page 27 9-co ontact (DE-9S S) D-subminia ature RS232 C Connections Socket Description RS232 Connector No connect Transmitted d Data (OUT) Received D Data (IN) No connect Signal Grou No connect No connect No connect No connect Connec ct either RS23 32 or RS485 c cable to VGC C083 - DO NO T CONNECT...
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Page 28: Operation - Ig And Cg
Electron bombardment degas (VC083A) or I R resistive degas (VGC083B) is used 5.2 IG Degas to rid a hot cathode ion gauge sensor of adsorbed gas. The intervals at which de- gas should be applied vary for each application. -
Page 29: Ig Over Pressure Shut Down
Good vacuum practice is to use a separate pressure gauge such as INFICON's PGE050 convection gauge to know when to turn on the ion gauge fila- ment. -
Page 30: Convection Gauge (Cg) Initial Setup
The information presented in sections 5.1 through 5.6, above, is intended as an introduction to the programming capabilities of the VGC083 for use in controlling the selectable parameters and functions of the BAG050 IG (VGC083A), BAG051, BAG052/053 IG (VGC083B) and PGE050 heads. tinb29e1 (2016-11) -
Page 31: Setup And Programming
6 Setup p and pro ogramm Before y you turn on po ower to the VG GC083 for the first time, ens sure the cable s from 6.1 Apply ying Powe the VGC C083 to the BA AG05x nude I G and PGE05 50 convection gauges are c... -
Page 32: User Interface Basics
he setup and programming of the VGC08 83 controller is s done via the e four pro- 6.3 U User Interf face Basic ramming-keys s located belo w the OLED s setup screen o on the left han nd side of the VGC083 front p panel. - Page 33 ION GAUGE • EMISS SELECT [Factory default = IE = 100UA] • AUTO IE1 TRIP [Factory default = DISABLED] • AUTO IE2 TRIP [Factory default = DISABLED] • SELECT FIL [Factory default = FILAMENT 1] • DEGAS TIME [Factory default = 10 MINUTES] •...
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Page 34: Programming
Select ITI LOG CG if you are using INFICON's convection gauge modules such as the PGE300 or PGE500 with a Log-linear analog output. • Select ITI LOG IG if you are using INFICON's ionization gauge module such as the BAG302 IG with a Log-linear analog output. •... -
Page 35: Ion Gauge
Example - To perform ALT GAUGE CAL if ALT GAUGE menu is selected for LOG CG, ITI LOG IG or ITI NON-LINE. When using other INFICON vacuum gauge modules such as PGE300, PGE500 or BAG302 as alternate gauges to CG2, the analog output signals from these devices can be used to display pressure in the CG2/ALT display channel. - Page 36 CAUTION N! Due to the r risk of filamen t failure cause ed by inadvert tent exposure o oxidizing gas ses or gas mix xtures, never u use another g gauge to autom matically turn ff the ion gaug ge when the io on gauge filam ment in use is c constructed o...
- Page 37 Consult reach hus@inficon.com f for further discuss sion on the use of this setting for co ompensated readin ngs. Typic cal sensitivity for th...
- Page 38 (sen sor) sensitivity y described a bove. Failure o ensure that t the VGC083B is programme ed for the actu ual sensitivity of the head it s used with ma ay result in pre...
- Page 39 Select C CG1, CG2 or A ALT GAUGE i f the pressure e measuremen nt from CG1 o or CG2 or the A Alternate Gaug ge is to be use ed to automatic cally turn the ion gauge hea filament t on and off.
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Page 40: Ion Gauge
This programming menu allows the user to set the atmospheric pressure reading (also known as the "span" adjustment) and vacuum reading ("zero" point) for con- vection gauges CG1 and CG2. INFICON advises that you first determine if the "span" (ATM) adjustment of your measurement device is set properly before set- ting the "zero"... - Page 41 ASSIGN REL 1 [Factory default = ION GAUGE] This assigns Relay #1 to the ion gauge, CG1, CG2 or ALT GAUGE (alternate gauge). ASSIGN REL 2 [Factory default = CG1] ASSIGN RELAY 2; same choices as ASSIGN RELAY 1 above ASSIGN REL 3 [Factory default = CG2] ASSIGN RELAY 3;...
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Page 42: Analog Output
ALT LINEAR Linear analog output for alternate gauge only ALT CG 1-8V Log-linear analog output if alternate gauge connected is an INFICON PGE300 or PGE500 ALT IG LOGN10 Log-linear analog output if alternate gauge connected is an INFICON BAG302 tinb29e1 (2016-11) VGC083A_B.om... - Page 43 CG1 1 - 8V Log-linear analog output for CG1 CG2 1 - 8V Log-linear analog output for CG2 CG1 0 - 7V Log-linear analog output for CG1 , output also compatible with GP 307,350,358 CG2 0 - 7V Log-linear analog output for CG2 , output also compatible with GP 307,350,358 CG1 NON - LIN Non-linear analog output for CG1...
- Page 44 V is the output signal in volts. Select "ALT IG LOGN10" only if you have selected ANALOG INPUT in the SET CG2 - ALT menu intended for use with an INFICON BAG302 ionization vacuum gauge module as an alternate gauge to CG2. Essentially, this allows retransmis- sion of the same analog input signal being received from the BAG302.
- Page 45 Select "CG2 NON - LIN" for CG2. Same as CG1 NON - LIN above, except for CG2. Select "CG1 LINEAR" as the analog output type to provide a 0-10 Vdc output signal that has a direct linear relationship to the displayed pressure measured by CG1 only.
- Page 46 formed at any pressure between 400 Torr to 999 Torr (atmosphere recommended). Note - As you adjust the analog output, the number being displayed in the AOUT CAL 1 screen represents the millivolts offset from zero volts that is being used internally for the analog output gain adjustment.
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Page 47: Serial Comm
The VGC083 supports four different protocols listed below (See section 9 for details). • RS485 RS485 with start and stop characters and address, derived from INFICON BAG302 • RS232 RS232 with start and stop characters, like RS485 above but no address •... - Page 48 NOTE o increase lon ngevity of the OLED display y, INFICON rec commends th at the screen aver function r remains ON a as shipped from m the factory. BRIGHTNE Factory defaul...
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Page 49: Analog Output Charts & Equations (Nitrogen/Air Only)
7 Analo og Outpu ut Charts s & Equa ations (N itrogen/A Air Only) This sec ction provides various chart s & equations s for analog ou utputs availabl le from the VGC C083. When th he analog outp put is setup, a as described in n section 6.5.6 6 for IG - CG1... -
Page 50: Analog Output For Ig Log N - 10 (Nitrogen / Air Only)
When the analo og output is se etup, as descr ribed in sectio on 6.5.6 for IG LOG N - 10, 7.2 A Analog Ou utput for IG he analog outp put voltage rep presents the p pressured mea asured by the IG for nitro- LOG N - 10 0 (Nitroge... -
Page 51: Analog Output For Ig Log N - 11 (Nitrogen / Air Only)
7.3 Analo og Output t for IG When th he analog outp put is setup, a as described in n section 6.5.6 6 for IG LOG N N - 11, the anal log output volt tage represen ts the pressur red measured by the IG for nitro-... -
Page 52: Analog Output For Ig Log N - 12 (Nitrogen / Air Only)
When the analo og output is se etup, as descr ribed in sectio on 6.5.6 for IG LOG N - 12, 7.4 A Analog Ou utput for IG he analog outp put voltage rep presents the p pressured mea asured by the IG for nitro- LOG N - 12 2 (Nitroge... -
Page 53: Analog Output For Ig 1.8 - 8.7 V (Nitrogen / Air Only)
7.5 Analo og Output t for IG 1.8 When th he analog outp put is setup, a as described in n section 6.5.6 6, for IG 1.8 – 8.7V, the anal log output volt tage represen ts the pressur red measured by the IG for nitro- - 8.7 V... -
Page 54: Analog Output For Ig Linear (Nitrogen / Air Only)
7.6 Analog Output for IG When the analog output is setup, as described in section 6.5.6, for IG LINEAR, the analog output voltage represents the pressure measured by the IG for nitrogen/air LINEAR (Nitrogen / Air only. The Linear analog output type provides a 0-10 V (dc) output signal that has a only) direct linear relationship to the displayed pressure measured by the ion gauge only. - Page 55 Pressu Volta Press sure Volt tage Pres ssure oltage [Torr Torr] 1.00E- 1.00 2.00E E-01 3.00 0E+02 .477 2.00E- 1.30 5.00E E-01 4.00 0E+02 .602 5.00E- 1.69 1.00E E+00 5.00 0E+02 .699 1.00E- 2.00 2.00E E+00 6.00 0E+02 .778 2.00E- 2.30 5.00E E+00...
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Page 56: Analog Output For Cg1 Or Cg2 0 - 7 V (Nitrogen / Air Only)
7.8 Analog Output for CG1 When the analog output is setup, as described in section 6.5.6, for CG1 0 – 7 V or CG2 0 – 7 V, the analog output voltage represents the pressure measured by CG1 or CG2 0 - 7 V (Nitrogen or CG2 for nitrogen/air only. -
Page 57: Analog Output For Cg1 Or Cg2 Non - Lin (Nitrogen / Air Only)
7.9 Analo og Output t for CG1 When th he analog outp put is setup, a as described in n section 6.5.6 6, for CG1 NO ON - LIN or CG2 NON - LIN, th he analog outp put voltage rep presents the p pressure meas sured by... - Page 58 Pressure Voltage Pressure Voltage Pressure Voltage [Torr] [Torr] [Torr] 0.000 0.3751 1.00E-01 0.8780 2.00E+02 5.0190 1.00E-04 0.3759 2.00E-01 1.1552 3.00E+02 5.1111 2.00E-04 0.3768 5.00E-01 1.6833 4.00E+02 5.2236 5.00E-04 0.3795 1.00E+00 2.2168 5.00E+02 5.3294 1.00E-03 0.3840 2.00E+00 2.8418 6.00E+02 5.4194 2.00E-03 0.3927 5.00E+00 3.6753...
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Page 59: Analog Output For Cg1 Or Cg2 Linear (Nitrogen / Air Only)
When the analog output is setup, as described in section 6.5.6 , for CG1 LINEAR 7.10 Analog Output for CG1 or CG2 LINEAR, the analog output voltage represents the pressure measured by or CG2 LINEAR the CG1 or CG2 for nitrogen/air only. The Linear analog output type provides a 0- (Nitrogen / Air only) 10 V (dc) output signal that has a direct linear relationship to the displayed pres- sure measured by the CG1 or CG2 only. -
Page 60: Using The Gauge With Different Gases
8 Using the Gauge with Different Gases The following tables and explanation contain important information regarding the use of ionization and convection gauges when used to measure pressure of gases other than nitrogen /air. For both types of gauge heads, corrections must be applied to both the display and analog outputs. -
Page 61: Effects Of Different Gases On Convection Gauge Display
The chart s and tables b below indicate e how different t gases affect the dis- play from m an INFICON N convection g gauge. For nitro ogen gas (N the calibration n of the conve ection gauge s... - Page 62 UTION! Do not assume e this data app plies to other c convection gau uges which m ay or may not e the same. S See Table 1 be elow and note the following examples: Example A: If th he gas is nitro ogen (N2), whe en the true tot tal pressure is...
- Page 63 The table below shows the convection gauge displayed readings at various pressures for several commonly used gas types: True Pressure Freon12 Freon22 (Torr) 1.00E-4 1.00E-4 1.00E-4 1.00E-4 1.00E-4 1.00E-4 1.00E-4 1.00E-4 1.00E-4 1.00E-4 1.00E-4 1.00E-4 2.00E-4 2.00E-4 2.00E-4 2.00E-4 2.00E-4 2.00E-4 2.00E-4 2.00E-4...
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Page 64: Effects Of Different Gases On Analog Output
he following ta ables and exp planation conta ains important t information r regarding the 8.3 E Effects of Different se of ionizatio on and convec ction gauges o on gases other r than N / Air . For both Gases on Analog O utput... - Page 65 C) App ly the sensitiv vity correction factor for the p particular gas you are using g to the pressure e value obtain ned in step A ( (Use correctio on factors and example liste below). Ion Gau uge Gas Sens itivity Correcti on Factors for r selected gas...
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Page 66: Ig-Cg1 0.5 - 7V Analog Output Correction Factors - Convection Gauge Range
8.3.2.2 IG-CG1 0.5 - 7V Analog When using the IG - CG1 analog output mode (Log-Linear 0.5 - 7 V, 0.5 V/decade) Output Correction Factors for gases other than N / Air, use the following look-up table and information to - Convection Gauge convert the analog output to pressure when operating in the pressure range of overpressure shutdown value listed in section 5.4 to 1000 Torr. -
Page 67: Cg1 1 - 8 V Or Cg2 1 - 8 V Analog Output Correction Factors - Convection Gauge
8.3.3.1 CG1 1 - 8 V or CG2 1 - 8 V When using the Log-Linear convection gauge analog output mode (Log-Linear Analog Output Correction 1 - 8 V, 1 V/decade) for gases other than N / Air, use the following look-up table Factors - Convection and information to convert the analog output to pressure. -
Page 68: Cg1 0 - 7 V Or Cg2 0 - 7 V Analog Output Correction Factors - Convection Gauge
8.3.3.2 CG1 0 - 7 V or CG2 0 - 7 V When using the Log-Linear convection gauge analog output mode (Log-Linear Analog Output Correction 0 - 7 V, 1 V/decade) for gases other than N / Air, use the following look-up table Factors - Convection and information to convert the analog output to pressure. -
Page 69: Convection Gauge
8.3.3.3 CG1 NON-LIN or CG2 When using the Non-Linear convection gauge analog output mode for gases other NON-LIN Analog Output than N / Air, use the following look-up table and information to convert the analog Correction Factors - output to pressure. The look-up table has been derived from the equation provided in section 7.9 Convection Gauge True... -
Page 70: Communication Protocol (Serial Interface)
Communication Info sub-sections of this chapter can be used to establish serial communications with the device. Four distinct protocols (COM type) are defined: INFICON RS232 and RS485 protocol as well as the RS232 and RS485 protocols compatible with GP Series 307 and 358 controllers. The user has access from the front panel main menu to change settings for COM Type, Baud Rate, Data Bits, Parity, Stop Bits and device Address (when using RS485). -
Page 71: Inficon Rs232 And Rs485 Command Protocol Summary
Responses will not return ADDRESS; the ADDRESS is replaced with Protocol Summary space characters. All pressure measurement responses are in absolute pressure units as selected by the user. Table "INFICON RS232 and RS485 Command Protocol Summary" COMMAND BRIEF DESCRIPTION COMMAND SYNTAX... - Page 72 Table "INFICON RS232 and RS485 Command Protocol Summary" (continued) COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE - EXAMPLES READ all Process Read the current state of all #xxRL<CR> *xx_003F_RL_<CR> Control (PC, or process control setpoint e.g., : #01RL<CR> In the example response above,...
- Page 73 Table "INFICON RS232 and RS485 Command Protocol Summary" (concluded) COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE - EXAMPLES SET EMISSION Choose 10 mA, 4mA or #xxSEy<CR> xx_PROGM_OK<CR> Current 100uA emission current e.g., : #01SE1<CR> When IG device is not connected: ?01_INVALID_<CR>...
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Page 74: Rs232 Gp 307 And 358 Protocol
9.4 RS232 GP 307 and 358 RS232 protocol compatible with the GP Series 307 and 358 VGC is as defined in the following table. Please see qualifying notes at bottom of table. Protocol Table "RS232 GP 307 and 358 Protocol" COMMAND BRIEF DESCRIPTION COMMAND SYNTAX... -
Page 75: Rs485 Gp 307 And 358 Protocol
Table "RS232 GP 307 and 358 Protocol" (concluded) COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE - EXAMPLES IG OFF Turn specified IG filament IGn_OFF<CR> <LF> OK<CR><LF> e.g., : IG1 OFF<CR><LF> e.g., : OK<CR><LF> where, When IG is already OFF: INVALID n = 1 = fil1, 2 = fil2 When IG device is not connected: INVALID IG DEGAS ON... - Page 76 Table "RS485 GP 307 and 358 Protocol" (concluded) COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE - EXAMPLES READ CGn Read the current CG #xxDS_CGn<CR> y.yyEzpp<CR> pressure in units of Torr only e.g.,: #01DS CG1<CR> where, y.yy = mantissa, z = sign of the exponent +/- where, and pp = the exponent n = 1 or 2 (CG1 or CG2)
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Page 77: Service
10 Service Every INFICON module is calibrated prior to shipment using nitrogen. Care should 10.1 Calibration be exercised when using gases other than nitrogen (N ) / air (see previous sections regarding the use of gases other than N /air). -
Page 78: Troubleshooting - Ig Error Messages
Replace the Ion gauge sensor tube System pressure too high Reduce pressure LV Failure The Filament voltage could not be estab- Contact INFICON lished; Electronics Failure F1 or F2 OPEN Filament 1 or 2 is open Switch to the other filament or replace the... - Page 79 From th he collector cu rrent measure ed, which is dir rectly proporti onal to the ga as den- sity insid de the ion gau uge head encl osure, the pre essure inside t the ion gauge head can be c calculated.
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Page 80: Maintenance
10.6 Maintenance In general, maintenance is not required for your INFICON ion gauge module, con- vection gauge and control unit. Periodic performance checks may be done by com- paring the gauge to a known reference standard. When using the head in gases... -
Page 81: Repair
11 Repair Return defective products to your nearest INFICON service center for repair. INFICON assumes no liability and the warranty is rendered null and void if repair work is carried out by the end-user or by third parties. 12 Accessories... -
Page 82: Storage
13 Storage Caution Caution: electronic components. Inappropriate storage (static electricity, humidity etc.) may damage electronic components. Store the product in an antistatic bag or container. Observe the rele- vant specifications under Technical Data (→ 9). 14 Disposal WARNING WARNING: substances detrimental to the environment. Products or parts thereof (mechanical and electric components, operating fluids etc.) may be detrimental to the environment. -
Page 83: Eu Declaration Of Conformity
EU Declaration of Conformity We, INFICON, hereby declare that the equipment mentioned below complies with the provisions of the Directive relating to electromagnetic compatibility 2014/30/EU and the Directive on the restriction of the use of certain hazardous substances in electrical and electronic equipment 2011/65/EU. - Page 84 LI–9496 Balzers Liechtenstein Tel +423 / 388 3111 Fax +423 / 388 3700 reachus@inficon.com Original: English www.inficon.com t i nb29e1...
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