Inficon VGC031 Operating Manual
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Inficon VGC031 Operating Manual

Vacuum gauge controller
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Vac
cuum Ga
uge Cont
troller
VGC
C031
Ope
erating Manu
al
tinb25e
e1
(2016-04)
1

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Summary of Contents for Inficon VGC031

  • Page 1 cuum Ga uge Cont troller C031 erating Manu tinb25e (2016-04)

  • Page 2: Product Identification

    In no event will INFICON be responsible or liable for indirect or consequential damages that result from the use or application of this equipment.
  • Page 3 No patent liabi lity is assumed by y INFICON with re espect to use of information circ cuits, equipment, or software descr ibed in this manual.
  • Page 4 Identifies information that is critical for successful application and understanding of the product. SHOCK HAZARD Labels may be located on or inside the device to alert people that dangerous voltages may be present. tinb25e1 (2016-04)

  • Page 5: General Safety Instructions

    Communicate the safety instructions to all other users. Liability and Warranty INFICON assumes no liability and the warranty becomes null and void if the end-user or third parties • disregard the information in this document • use the product in a non-conforming manner •...

  • Page 6: Table Of Contents

    Contents Product Identification Validity Important User Information General Safety Instructions Liability and Warranty Introduction / General Information 1.1 Description 1.2 Specifications 1.3 Dimensions 1.4 Options & Accessories Important Safety Information 2.1 Safety Precautions - General 2.2 Safety Precautions - Service and Operation 2.3 Electrical Conditions 2.3.1 Proper Equipment Grounding 2.3.2 Electrical Interface and Control...
  • Page 7 Analog Output 7.1 Log 1-8; Log-Linear Analog Output Equation & Table - Torr 7.2 Log 1-8; Log-Linear Analog Output Equation & Table - mbar 7.3 Log 0-7; Log-Linear Analog Output Equation & Table - Torr 7.4 Log 0-7; Log-Linear Analog Output Equation & Table - mbar 7.5 NONLIN 6V;...

  • Page 8: Introduction / General Information

    PGE050 Pirani Gauge Enhanced or a Granville-Phillips® 275 Convectron®. The 1/8-DIN housing can be used as a bench top, or mounted in a cutout in an instrument panel. The VGC031 is powered by user supplied 12 to 28 V (dc), 2 W, or by the INFICON power supply.

  • Page 9: Specifications

    Specifications Supply voltage 12 … 28 V (dc), 2 W protected against power reversal and tran- sient over-voltages Connection 2-pin pluggable terminal block (mating connector included) Permissible temperature Operating 0 … +40 °C Storage –40 … +70 °C Relative humidity 0 to 95%, non-condensing Operating altitude up to 2500 m (8200 ft.)
  • Page 10 Interface (digital) RS232 and 2 wire/4 wire RS485 Protocol ASCII Analog output Log-linear 0 to 7 V (dc) or 1 to 8 V (dc), 1 V/decade Linear 0 to 10 V (dc) Non-linear S-curve 0.375 to 5.659 V (dc) Non-linear S-curve 0 to 9 V (dc) Switching function relays two single-pole double-throw...

  • Page 11: Dimensions

    Dimension mm (inch) Weight ≈ ≈ 250 g (9 oz.) tinb25e (2016-04)

  • Page 12: Options & Accessories

    Options & Accessories Ordering No. Power supply f for VGC031 399-575 Input 100 … 240 V V (ac), 50 … 60 Hz Output 24 V (dc) Cable length 2 m (6 ft) The convention nal IEC60320 AC power entry recep...

  • Page 13: Important Safety Information

    Important t Safety Info ormation INFICON has d designed and test ted this product to provide safe and reliable se ervice, provided it is installed and op perated within the strict safety y guidelines provid ded in this manua l. Please read...

  • Page 14: Safety Precautions - Service And Operation

    INFICON service trained pe ersonnel. Re- turn the produc ct to an INFICON qualified service a and repair cen- ter to ensure th hat all safety featu ures are maintaine ed. Do not use...

  • Page 15: Electrical Conditions

    Contact INFICO ON for return autho orization and instructions for r returning the pro duct to INFICON f for evaluation. Electrical C Conditions WARNIN NG! When high v voltage is present in any vacuum...

  • Page 16: Proper Equipment Grounding

    The PGE050 vacuum gauge e tube and enclosu ure of the VGC031 1 controller must be conne ected directly to a good quality earth h ground. Use a ground lug on t...

  • Page 17: Overpressure And Use With Hazardous Gases

    INFICON gauge es should not be u used at pres- sures exceedin ng 1000 Torr abso olute pressure. In cases where...

  • Page 18: Gases Other Than Nitrogen / Air

    (N r air without referr ring to correction f factor data ta- bles. INFICON gaug ges and modules a are calibrated for d direct readout of nitrogen or a air. Do not attemp t to use with other...

  • Page 19: Installation

    To mount the V VGC031 in a pane 1. Make a cuto out in your instrum ment control panel as shown in the drawing above.

  • Page 20: Electrical Installation

    3. Slide the VG GC031 into the pa anel hole cutout. 4. On either sid de of the VGC031 1 are two screw-m mounting brack- ets. When th he screws in the f ront of the instrum ment are turned...
  • Page 21 Gauge connector Relay connector DC Power Input The VGC031 accepts DC power from 12 to 28 V (dc), 2 W. If the user prefers to use AC power, INFICON offers the series op- tional power supplies. 2-pin pluggable terminal strip...
  • Page 22 2) The relays are disabled by applying a continuous ground to pin # 9. This will prevent any switching of the relay contac- tors during operation of the VGC031. 9-pin D-sub male (Mating connector provided by user). Pin description Pin description...
  • Page 23 Assembly P/Ns 399-580, 399-581 and 399 9-583 are custom c cable assem- blies provided in different length s from INFICON f for connecting the VGC031 co ontroller to INFICO ON PGE050 Piran ni Gauge En- ® hanced or MKS...

  • Page 24: Setup And Operation

    Setup and Operation Initial Setup Two of the most important steps for the initial setup of the gauge are to set zero (SET VAC) and set atmosphere (SET ATM) as described in the Programming section 4.3 below. This will en- sure proper operation of the gauge and accurate pressure meas- urements.

  • Page 25: User Interface Basics

    Setting Atmo osphere (SET AT Setting zero op ptimizes performa nce of the gauge when operating at a low pressu ure range of 1.00× ×10 Torr to 1.00× ×10 Torr. If your minimum operating pressur re is higher than 1 .00×10 Torr, it is not normal...

  • Page 26: Programming

    These keys are used to select and program the various functions available. During programming of the VGC031, the display will identify what function each key repre- sents. To begin programming, press any one of the four keys.
  • Page 27 If your VGC031 has been previously configured and relay setpoints and linear analog output pressure settings have been programmed, changing units-of-measure will return the re- lays setpoints and the linear analog output pressure settings to factory default setting values in Torr. In this case, you must re- program the relay setpoints and linear analog output pressure settings in the newly programmed units-of-measure.
  • Page 28 SET SP1 OFF and SET SP2 OFF [Factory default = 200 mTORR] These setpoints correspond to the pressures at which the relays will turn of (de-energize). The relays will turn off when the pres- sure is above the programmed pressure value. If you are unable to decrease the values of SP1 OFF or SP2 OFF, you must first go to SP1 ON or SP2 ON and decrease those values to a num- ber lower than the values of SP1 OFF or SP2 OFF you are trying...
  • Page 29 BAUD [Factory default = 19,200] This sets the baud rate for the RS485 and the RS232 serial communications. The baud rate can be set to various values through the serial interface or via the front panel soft-keys. The parity can only be changed through the serial interface command set.
  • Page 30 VGC031 and the resulting pressure calculation from the analog output do not match closely. To perform this adjustment, connect the gauge to the VGC031 and connect the VGC031 analog out- put to a high resolution voltmeter, your system, PLC, etc. While...

  • Page 31: Return To Factory Default Settings

    999 Torr (atmosphere recommended). SCREEN SAVER [Factory default = ON] The VGC031 uses an OLED type display which over an ex- tended period of time can start to show divergence between pixels that are on at all times verses pixels that are not. This could result in pixels exhibiting a burned-in effect.

  • Page 32: Using The Gauge With Different Gases

    INFICON co onvection gauge. WARNIN NG! Using a therm mal conductivity g gauge with gas- es other than t...
  • Page 33 Other consid derations when using gases oth her than N Flammable or r explosive gases WARNIN NG! INFICON co nvection gauges a are neither in- trinsically safe nor explosion pro oof and are not inte ended for use in the presence...
  • Page 34 The X-axis is the pressure e reading indicated d by the convectio on gauge under test. This chart t shows readings f for an INFICON c onvection gauge (PGE) a and Granville-Phill lips® Convectron® ® gauge to illustrate that th...

  • Page 35: Display

    23 Torr. Continuing to backfill your system, attempting to in- crease the reading up to 760 Torr, you will over pressurize your chamber which may present a hazard. Example C: If the gas is helium (He), the gauge will read over pressure (OP) when pressure reaches about 10 Torr true pres- sure and opening the chamber to atmosphere prematurely may present other hazards for both people and product.
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  • Page 39: Display - Mbar

    Notes: 1) OP = overpressure indication: display will read over pressure 2) Display auto-ranges between Torr and mTorr at 1 Torr Examples: 1) Gas used is nitrogen (N ). Display shows pressure mea- surement of 10 Torr. True pressure of nitrogen is 10 Torr. 2) Gas used is argon (Ar).
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  • Page 43 Notes: 1) OP = Overpressure indication; display will read "overpressure". Examples: 1) Gas used is nitrogen. Display shows pressure measurement of 13.3 mbar. True pressure of nitrogen is 13.3 mbar. 2) Gas used is argon. Display shows pressure measurement of 11.7 mbar.

  • Page 44: Analog Output

    Analog Ou utput The VGC031 p provides either a n non-linear, log-line ear or a 0-10 V (dc) linear an nalog output signa al. These analog o output signals ® are also compa atible with various s Granville-Phillips Mini-Con- ®...
  • Page 45 Selecting the L LOG 1-8 setting fro om the INFICON V VGC031 ANA- LOG TYPE me enu duplicates the e analog outputs o of the Granville- ® Phillips Convec ctron gauge cont troller series 375 a and 475. The equations and tables shown n in section 7.1 an...
  • Page 46 , roughly in th he shape of an "S" curve, as s shown below. Selecting the N NONLIN 6V setting g from the INFICO ON VGC031 ANALOG TYP E menu duplicate s the Granville-Ph hillips Mini- Convectron® m modules original S S-curve of 0.375 to...
  • Page 47 , roughly in the e shape of an "S" curve, as shown below. Selecting the N NONLIN 9V setting g from the INFICO ON VGC031 ANALOG TYP E menu duplicate s the analog outp uts (S-Curve) of the Granville e-Phillips Convect tron®...

  • Page 48: Log 1-8; Log-Linear Analog Output Equation & Table - Torr

    LINEAR; 0-10 V (dc) Linear Analog Output The VGC031 also provides a linear 0-10 V (dc) analog output. The linear output voltage can be any value between 0.01 V and 10 V corresponding to displayed pressure between 1 mTorr and 1000 Torr.
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  • Page 52 An analog outp put of 10 volts indi icates a faulty con nvection gauge or unplugged g gauge cable. The chart on th he following page shows the graphi cal results of the table and fo ormulas given abo ove for nitrogen. True pressure ) is plotted on the X-axis with a...
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  • Page 57: Log 0-7; Log-Linear Analog Output Equation & Table - Torr

    Note - when us sing the units of pa ascals and LOG 1 1-8 is selected, (V - 5 the same equa ation of P = 10 listed above app plies. This re- sults in a log-lin near analog outpu ut range of about 3 3.00 V (dc) at .01 pascals (Pa...
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  • Page 61 An analog outp put of 10 volts indi icates a faulty con nvection gauge or unplugged g gauge cable. The chart on th he following page shows the graphi cal results of the table and fo ormulas given abo ove for nitrogen. T True pressure ) is plotted o on the X-axis with...
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  • Page 66 Note - when us sing the units of pa ascals and LOG 0 0-7 is selected, (V - 4 the same equa ation of P = 10 listed above app plies. This re- sults in a log-lin near analog outpu ut range of about 2 2.00 V (dc) at .01 pascals (Pa...
  • Page 67 For Non-Linear Analog Output voltage range of 0.375 to 2.842 volts, use this table. Coefficients for y(x) = a + bx + cx + dx + ex -0.02585 0.03767 0.04563 0.1151 -0.04158 0.008738 For Non-Linear Analog Output voltage range of 2.842 to 4.945 volts, use this table.

  • Page 68: Nonlin 6V; Non-Linear Analog Output Table - Torr

    Example: Measured analog output voltage is 0.3840 V. From first table shown above use equation: y(x) = a + bx + cx + dx + ex x = 0.3840 volts a = -0.02585, b=0.03767, c=0.04563, d=0.1151, e=-0.04158, f=0.008738 y(x) = Pressure = 1.0E-03 Torr The equations listed above are used to calculate the non-linear voltage outputs for N /air shown in tables of section 7.6 and...
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  • Page 72: Nonlin 6V; Non-Linear Analog Output Table - Mbar

    Note: By design, these values are identical to the outputs from MKS Instruments / Granville-Phillips® Convectron® gauges, Mini-Convectron® modules and controllers so that equivalent units can be interchanged without affecting your process system or software. An analog output of 10 volts indicates a faulty convection gauge or unplugged gauge cable.
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  • Page 76: Nonlin 9V; Non-Linear Analog Output Equations & Table

    Note: By design, these values are identical to the outputs from ® ® MKS Instruments / Granville-Phillips Convectron gauges, Mini- ® Convectron modules and controllers so that equivalent units can be interchanged without affecting your process system or software. An analog output of 10 volts indicates a faulty convection gauge or unplugged gauge cable.
  • Page 77 Coefficients for voltage segment range of 3.1641 to 4.3945 volts = +1.100000E+00 = -1.675000E-03 = +1.125000E-06 = +7.414069E-21 Coefficients for voltage segment range of 4.3945 to 6.54785 volts = -3.777930E+01 = +5.495931E-02 = -2.652588E-05 = +4.526774E-09 Coefficients for voltage segment range of 6.54785 to 7.3828 volts = -7.184400E+03 = +7.117083E+00 = -2.354167E-03...
  • Page 78 Coefficients for voltage segment range of 7.9102 to 9 volts = -2.417225E+05 = +1.919958E+02 = -5.106048E-02 = +4.554342E-06 Example: Measured analog output voltage is: V = 5.6243 V. Since analog output in this example is 5.6243 V, use the Coefficients from the fourth table shown in the previous page: = -3.777930E+01, = +5.495931E-02, = -2.652588E-05, K...

  • Page 79: Linear Analog Output

    An analog output of 10 volts indicates a faulty convection gauge or unplugged gauge cable. LINEAR ANALOG OUTPUT The VGC031 analog output may be setup to provide a 0-10 V (dc) output signal that has a direct linear relationship to the displayed pressure. When preparing to setup and process...
  • Page 80 10.0 volts should not exceed 1.00 torr. Doing this is considered best practice when using this type of analog output signal with the VGC031. If your application requires the analog output voltage to cover a pressure range exceeding three decades, then consider using the log-linear or non-linear analog output.

  • Page 81: Rs485 / Rs232 Serial Communications

    RS485 / RS232 serial communications Device Specific Serial Communication Info The standard VGC031 model provides RS232 / RS485 serial communications. The following information and the RS485 / RS232 command protocol summary listed on the next page should be used to set serial communications with the device.

  • Page 82: Rs485 / Rs232 Command Protocol Summary

    RS485 / RS232 Command Protocol Summary tinb25e1 (2016-04)
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  • Page 85: Service

    Torr. Care should be exercised when using gases other than nitrogen (N Maintenance In general, maintenance is not required for your INFICON sensor and controller. Periodic performance checks may be done by comparing the sensor to a known reference standard.

  • Page 86: Troubleshooting

    Troubleshooting tinb25e1 (2016-04)
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  • Page 88: Factory Service And Support

    (8:00 am to 5:00 pm Mountain time) Monday through Friday, at +423 / 388 3111. Or e-mail us at reachus@inficon.com. Storage Caution: electronic component Inappropriate storage (static electricity, humidity etc.) can damage electronic components.

  • Page 89: Disposal

    Disposal WARNING WARNING: substances detrimental to the environ- ment Products or parts thereof (mechanical and electric components, operating fluids etc.) can be detrimen- tal to the environment. Dispose of such substances in accordance with the relevant local regulations. Separating the components After disassembling the product, separate its components ac- cording to the following criteria: •...
  • Page 90 Notes tinb25e1 (2016-04)
  • Page 91 Notes tinb25e1 (2016-04)
  • Page 92 LI–9496 Balzers Liechtenstein +423 / 388 3111 Fax +423 / 388 3700 reachus@inficon.com Original: English t i nb25e1 www.inficon.com...

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