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Summary of Contents for Inficon VGC083C
- Page 1 Operating M Manual Incl. EU Declara ation of Conform mity Vacu um G Gauge e Con ntroller VGC083 tinb42e1 (2018 8-05)
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Page 2: Product Identification
INFICON be responsible o or liable for ind direct or conse equential amages that r result from the... -
Page 3: Liability And Warranty
Labels may be located on or inside the device to alert people that dangerous voltages may be present. Liability and Warranty INFICON assumes no liability and the warranty is rendered null and void if the end- user or third parties • disregard the information in this document •... -
Page 4: Table Of Contents
Liability and Warranty 1 Introduction / General Information 1.1 Description 2 Technical Data 2.1 VGC083C 2.2 Power Supply for VGC083C (Optional) 3 Important Safety Information 3.1 Safety Precautions - General 3.2 Safety Precautions - Service and Operation 3.3 Electrical Conditions 3.3.1 Proper Equipment Grounding... - Page 5 Convection Gauge 9 Communication Protocol (Serial Interface) 9.1 Device Specific Serial Communication Info 9.2 INFICON RS232 / RS485 Command Protocol Summary 9.3 INFICON RS232 and RS485 Command Protocol Summary 9.4 RS232 GP 307 and 358 Protocol 9.5 RS485 GP 307 and 358 Protocol Service 10.1...
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Page 6: Introduction / General Information
• One or two INFICON PG GE050 convect tion enhanced d pirani heads • Cables to in nterconnect th he VGC083C a and point-of-us se devices ® ® ® The VGC083C C will also operate the Granville-Phi llips... -
Page 7: Technical Data
OLED - displays state of all setpoint relays, IG emission current, error messages for fault conditions Functionality powers & operates one INFICON MAG050 or MAG060 passive Cold Cathode Gauge powers & operates up to 2 INFICON PGE050 ® convection or Granville-Phillips (GP) ® Convectron... - Page 8 Temperature Ambience Operation 0 … +40 °C Storage –40 … +70 °C Relative humidity 0 … 95, non-condensing Altitude Operating max. 2500 m (8200 ft.) Storage max. 12500 m (41000 ft.) Housing Housing aluminum extrusion tinb42e1 (2018-05) VGC083C.om...
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Page 9: Power Supply For Vgc083C (Optional)
1.7 lb.) Connec ctor 2-pin pluggab ble terminal b lock to mate w with the 2.2 Powe er Supply VGC083C VGC0 083C (Opt tional) Power in nput 100 … 240 V V (ac), 50 … 6 60 Hz Power o output 24 V (dc), 2.5... -
Page 10: Important Safety Information
Do not u use these prod ducts if they ave been dam maged. Immed diately contact t INFICON to a arrange return n of the pro- uct if it is dam maged. Due to the poss sibility of corro... -
Page 11: Electrical Conditions
Do not u use if the unit has been dro pped or the en nclosure has b been damage Contact t INFICON for return authori ization and ins structions for r returning the p product to INFIC CON for evalu ation. -
Page 12: Gases Other Than Nitrogen / Air
This could cause an exp losion which c could result in serious injury r death. tinb42 (2018-05) VGC083C.o... -
Page 13: Installation
Optional EIA-standard, 19-inch, 2U height rack mount panels are available from INFICON. The optional rack mount panels are provided with panel cut- outs and mounting holes to allow efficient mounting of your VGC083C unit. Drill four guide holes on each side of the panel cut out (two on each side) with dimensions as shown in the panel cut-out drawing above. -
Page 14: Mechanical Installation - Ionization Gauge
INFICO ON. Panel co lor matches th he front panel of VGC083C units. Screws or mounting to o rack enclosu re are include 4.1.3 Mechanic cal Installat... -
Page 15: Mechanical Installation - Convection Gauge
Use all m metal vacuum m fittings with m metal seals wh hen operating pressures are e ex- pected t to be below 1. .00 × 10 Torr r (1.33 × 10 mbar, 1.33 × Pa). Remove e the protectiv ve lid and insta all the product t to the vacuum... -
Page 16: Electrical Installation
(via he green color red screw prov vided) on the back panel of the VGC083C 4.2.2 Installatio A good, recomm mended pract tice is to remo ve power from m any cable pr... -
Page 17: Connecting Mag050 / Mag060 - Connector Labeled "1
INFICON for connecting th he VGC083C t to the MAG05 0 / 060 cold cat thode ionizatio on gauge sens sor. Changin ng cables from... -
Page 18: Power Connection
4.2.5 Power Connection The VGC083C requires an input power of 20 … 28 V (dc), 12 W to operate. One each 2-contact pluggable terminal strip mating connector is provided for connection to the power contactors. Optional power supplies are also available from INFICON (PN →... -
Page 19: Digital I/O Connection
VGC083C. The D contact is used in this configuration to protect the IG from being turned on at high pressure in case power to the alternate gauge is lost. -
Page 20: Rs232 / Rs485 Serial Communications Connection
C to your erial port. DO NOT connect t both of the R RS232 and RS S485 cables to o the VGC083C at th he same time. The VGC083 3C cannot prov vide both RS2 232 and RS485 serial co... - Page 21 No connect No connect No connect Signal Grou No connect No connect No connect Connec ct either RS23 32 or RS485 c cable to VGC C083C - DO N OT CONNECT BOTH A AT THE SAME E TIME tinb42e1 (2018-05) VGC083C.om...
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Page 22: Operation - Ig And Cg
The information presented in sections 5.1 and 5.2, above, is intended as an intro- duction to the programming capabilities of the VGC083C for use in controlling the selectable parameters and functions of the MAG050 / MAG060 IG and PEG050 CG transducers. -
Page 23: Cond Cathode Activation Delay
Activation Delay needed for the electrical discharge to establish itself at low pressures. The delay time increases at low pressures, and is typically: ≈ 0.1 minute 7.5×10 Torr ≈ 1 minute 7.5×10 Torr 7.5×10 Torr ≈ 5 minutes tinb42e1 (2018-05) VGC083C.om... -
Page 24: Setup And Programming
VGC083C C for the first ti ime, ensure th he cables from 6.1 A Applying P Power he VGC083C t to the MAG05 50 / MAG060 a and PGE050 c convection ga uges are con- ected and sec cured. Turn on... -
Page 25: User Interface Basics
6.3 User Interface Basics The setu up and progra amming of the VGC083C co ontroller is don ne via the four r pro- grammin ng-keys locate ed below the O OLED setup s screen on the left hand side of the... -
Page 26: Programming
This section provides detailed information on programming and configuration of various menus and submenus of the device. This key, on the VGC083C front panel, is referred to as the 'ENTER' key throughout this manual. From the main menu (press the MENU key if the main menu is not shown), scroll... -
Page 27: Setup Unit
• ITI LOG IG7V is reserved for future use. Currently not applicable. • Select ITI LOG IG if you are using INFICON's ionization gauge module such as the BAG302 IG with a Log-linear analog output. • Select ITI NON-LINEA if you are using INFICON's convection gauge modules such as the PGE300 or PGE500 with a non-linear analog output. -
Page 28: Ion Gauge
CG2/ALT display channel. Connect the analog output from these devices to the + and – terminals of the VGC083C Analog Input Connector labeled AI. In the ALT GAUGE CAL screen use the UP or DOWN keys to adjust the displayed pressure by the VGC083C to match the pressure reading on the modules. -
Page 29: Convec Gauge
CAL F FACTORS val ues. This men nu is intended for future enh hance- ment of the VGC083C C capabilities. Leave C0, C1 1, C2, C3, C4 , and C5 CAL FACTO RS values at t the factory de fault setting of of 50. -
Page 30: Relays
ASSIGN RELAY 2; same choices as ASSIGN RELAY 1 above ASSIGN REL 3 [Factory default = CG2] ASSIGN RELAY 3; same choices as ASSIGN RELAY 1 above ASSIGN REL 4 [Factory default = ION GAUGE] ASSIGN RELAY 4; same choices as ASSIGN RELAY 1 above tinb42e1 (2018-05) VGC083C.om... - Page 31 If you are unable to increase the value of REL 1 LO TRIP (VGC083C responding with the message "NO CHANGE"), you must first access the REL 1 HI TRIP menu below and increase that value to a number higher than the value of the REL 1 LO TRIP you are trying to set.
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Page 32: Analog Output
Relays will return to the previous state after exiting the TEST RELAYS menu. 6.5.5 Analog Output The VGC083C provides three analog outputs proportional to the pressure meas- ured by the ionization gauge, the selected convection gauge (CG1 or CG2) or a continuous, combined output signal from the IG and CG1 (IG - CG1) for full range measurement. - Page 33 INFICON convection gauges such as the PGE300 or PGE500 provide this capability. If you are using a...
- Page 34 This selection covers 3 decades of pressure change. Essentially, this allows retransmission of the same analog input signal being received by the VGC083C. For example, if ALT GAUGE selected is 1000 TORR CDG, the maxi- mum pressure should also be programmed as 1.00E03 Torr (value programmed for AOUT LIN 1 or AOUT LIN 2 or AOUT LIN 3 menu below), then the instrument provides a 10 volt analog output signal when pressure is at 1.00E03 Torr and the...
- Page 35 - CG1, CG1, CG2, CG1/CG2NON-LIN, CG1/CG2 LINEAR, ALT CG 1-8V. Connect CG1 or CG2 to the VGC083C and connect the VGC083C analog output 1 to a high resolution voltmeter, your system, PLC, etc. While in the AOUT CAL 1 screen and...
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Page 36: Serial Comm
(CG2/ALT display channel). Example: The VGC083C ANALOG OUTPUT 1 is programmed for "ALT LINEAR" and a 1000 TORR CDG is connected to the VGC083C. The VGC083C CG2/ALT display channel is registering a pressure reading of 7.60E02 Torr. For a 1000 TORR CDG with a 0-10 VDC output, the expected analog output at 760 Torr is 7.60 volts. -
Page 37: Display
COMM TYPE [Factory default = RS485] The VGC083C supports four different protocols listed below (See section 9 for details). • RS485 RS485 with start and stop characters and address, derived from INFICON BAG302 • RS232 RS232 with start and stop characters, like RS485 above but no address •... - Page 38 IG issues. SCREEN S SAVER Factory defaul lt = ON] he VGC083C set-up screen n uses an OLE ED type displa ay which over an extended eriod of time c can start to sh...
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Page 39: Analog Output Charts & Equations (Nitrogen/Air Only)
7 Analo og Outpu ut Charts s & Equa ations (N itrogen/A Air Only) This sec ction provides various chart s & equations s for analog ou utputs availabl le from the VGC C083C. When th he analog outp put is setup, a as described in n section 6.5.6 6 for IG - CG1... -
Page 40: Analog Output For Ig Log N - 10 (Nitrogen / Air Only)
Torr. Press sure is plotted d on the X-axis s with a log sc cale; the outpu ignal is plotted d on the Y-axi s on a linear s scale. tinb42 (2018-05) VGC083C.o... -
Page 41: Analog Output For Ig Log N - 11 (Nitrogen / Air Only)
7.3 Analo og Output t for IG When th he analog outp put is setup, a as described in n section 6.5.6 6 for IG LOG N N - 11, the anal log output volt tage represen ts the pressur red measured by the IG for nitro-... -
Page 42: Analog Output For Ig Log N - 12 (Nitrogen / Air Only)
T Torr. Pressure is plotted on t the X-axis wit h a log scale; he output sign al is plotted o n the Y-axis o n a linear sca ale. tinb42 (2018-05) VGC083C.o... -
Page 43: Analog Output For Ig 1.8 - 8.7 V (Nitrogen / Air Only)
7.5 Analo og Output t for IG 1.8 When th he analog outp put is setup, a as described in n section 6.5.6 6, for IG 1.8 – 8.7V, the anal log output volt tage represen ts the pressur red measured by the IG for nitro- - 8.7 V... -
Page 44: Analog Output For Ig Linear (Nitrogen / Air Only)
B) The log-linear output signal and pressure are related by the following formulas when units of measurement is in pascals: (volts - 3) P = 10 V = log (P) + 3 Where P is the pressure in pascals, and V is the output signal in volts. tinb42e1 (2018-05) VGC083C.om... - Page 45 .954 5.00E- 3.69 1.00E E+02 1.00 0E+03 .000 1.00E- 4.00 2.00E E+02 The follo owing chart sh hows the grap phical results o of table and fo ormulas above e for pressure e measureme ents in Torr. tinb42e1 (2018-05) VGC083C.om...
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Page 46: Analog Output For Cg1 Or Cg2 0 - 7 V (Nitrogen / Air Only)
2.000 2.00E+01 5.300 8.00E+02 6.900 2.00E-02 2.300 5.00E+01 5.700 9.00E+02 6.950 5.00E-02 2.700 1.00E+02 6.000 1.00E+03 7.000 1.00E-01 3.000 2.00E+02 6.300 The following chart shows the graphical results of table and formulas above for measurements in Torr. tinb42e1 (2018-05) VGC083C.om... -
Page 47: Analog Output For Cg1 Or Cg2 Non - Lin (Nitrogen / Air Only)
7.9 Analo og Output t for CG1 When th he analog outp put is setup, a as described in n section 6.5.6 6, for CG1 NO ON - LIN or CG2 NON - LIN, th he analog outp put voltage rep presents the p pressure meas sured by... - Page 48 Example: Measured analog output voltage is 0.3840 V. From first table shown above use equation: y(x) = a + bx + cx + dx + ex x = 0.3840 volts a = -0.02585, b=0.03767, c=0.04563, d=0.1151, e=-0.04158, f=0.008738 y(x) = Pressure = 1.0E-03 Torr tinb42e1 (2018-05) VGC083C.om...
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Page 49: Analog Output For Cg1 Or Cg2 Linear (Nitrogen / Air Only)
If your application requires the analog output voltage to cover a pressure range exceeding three decades, then consider using a log-linear analog output type for CG1 or CG2. Note - An analog output of above +11 volts indicates a faulty convection gauge or unplugged gauge cable. tinb42e1 (2018-05) VGC083C.om... -
Page 50: Using The Gauge With Different Gases
Torr the pressure indication is linear. For gases other than air / N2, the pressure can be determined by means of the following conversion formula: = K × indicated pressure where: Gas type Gas type Air (N , CO) These gas correction factors are average values. tinb42e1 (2018-05) VGC083C.om... -
Page 51: Effects Of Different Gases On Convection Gauge Display
Example If the gas in use is argon (Ar) and the VGC083C controller indicates a measured pressure of 7.6 x 10-6 Torr: = 0.8 × 7.60 × 10 = 6.08 × 10 Torr true pressure of argon gas NOTE Cold cathode gauges exhibit a non-linear response in the pressure range of 1×10... - Page 52 10 Torr true ressure, may present other hazards for b both personne l in the proxim mity and roduct that ma ay be inside th he chamber/ve essel. tinb42 (2018-05) VGC083C.o...
- Page 53 An O-ring compr ession fitting t type device m ay be forcibly released (eje cted) from the e fitting if inter nal pressure e exceeds the lo ocal barometri c, ambient pre essure. tinb42e1 (2018-05) VGC083C.om...
- Page 54 2.00E+00 Torr based on the conversion information pro- vided in the above table. Example: If the gas is argon (Ar), when the true pressure is 100 Torr, the gauge will read only about 9 Torr. tinb42e1 (2018-05) VGC083C.om...
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Page 55: Effects Of Different Gases On Analog Output
Gases A) Pressure range from high vacuum to the OVER PRESSURE value programmed in the VGC083C (cold cathode ion gauge range): Use the correction factors listed in section 8.3.2.1 below to determine pressure from the voltage for selected gases (ion gauge range). As discussed previously cold cathode gauges exhibit a non-linear response in the pressure range of 1×10... -
Page 56: Ig-Cg1 0.5 - 7V Analog Output Correction Factors - Ion Gauge Range
- Ion Gauge Range analog output to pressure for MAG050/060 when operating from high vacuum to the to OVER PRESSURE shut down value programmed in the VGC083C. B) Refer to section 7.1 and related equation to convert the voltage in your re- ceiving instrument to pressure. -
Page 57: Ig-Cg1 0.5 - 7V Analog Output Correction Factors - Convection Gauge Range
CG1 or CG2 for gases other than air/N , you must also apply corrections to the analog output. Use the following tables to determine pressure from voltage for gases other than nitrogen or air. tinb42e1 (2018-05) VGC083C.om... -
Page 58: Cg1 1 - 8 V Or Cg2 1 - 8 V Analog Output Correction Factors - Convection Gauge
1.00E+3 8.000 6.512 7.045 5.706 6.045 6.104 Values listed under each gas type are in volts (V). Example The gas in use is O . Voltage output is 4.288 volts. True pressure of O is 2.00E-01 Torr tinb42e1 (2018-05) VGC083C.om... -
Page 59: Cg1 0 - 7 V Or Cg2 0 - 7 V Analog Output Correction Factors - Convection Gauge
7.000 5.512 6.045 4.706 5.045 5.104 Values listed under each gas type are in volts (V (dc)). Example The gas in use is O . Voltage output is 3.288 volts. True pressure of O is 2.00E-01 Torr tinb42e1 (2018-05) VGC083C.om... -
Page 60: Convection Gauge
4.663 5.658 4.877 3.645 4.203 4.286 6.942 6.519 9.00E+2 5.6141 4.706 5.713 4.919 3.674 4.237 4.321 1.00E+3 5.6593 4.745 5.762 4.955 3.69 4.27 4.354 7.056 6.642 Values listed under each gas type are in volts (V (dc)). tinb42e1 (2018-05) VGC083C.om... -
Page 61: Communication Protocol (Serial Interface)
There is a finite period of time between the time a command is sent from a terminal (PC COM Port, for example) and the point in time in which the VGC083C starts to send a response to that command. This delay is dependent upon the command sent and the baud rate. -
Page 62: Inficon Rs232 And Rs485 Command Protocol Summary
"?". 8. A valid address must be used [Factory default = 01] when using the RS485 protocol. The VGC083C will not respond to a command with an invalid address while using RS485. 9. The command syntax examples used in the protocol summary table for ASCII are shown in scientific notation. - Page 63 Table "INFICON RS232 and RS485 Command Protocol Summary" (continued) COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE - EXAMPLES READ all Process Read the current state of all #xxRL<CR> *xx_003F_RL_<CR> Control (PC, or process control setpoint e.g.: #01RL<CR> In the example response above,...
- Page 64 1. <CR> is a carriage return (0x0D). This is the terminator character. 2. The '_' used in certain defined commands represent a space character. Space characters may be omitted from commands. 3. Hardware handshake controls do not exist on VGC083C (e.g., RTS, CTS, DTR). tinb42e1 (2018-05) VGC083C.om...
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Page 65: Rs232 Gp 307 And 358 Protocol
ON/OFF and Filament Se- n = 1 = fil1, 2 = fil2 lection are combined in the single IG ON/OFF command. When turning the IG to ON, the specific filament chosen is selected when sending the IG ON/OFF commands. (continued) tinb42e1 (2018-05) VGC083C.om... -
Page 66: Rs485 Gp 307 And 358 Protocol
3. The '_' used in certain defined commands represent a space character. Space characters may be omitted from commands. 4. GP 307 and 358 protocol response strings are variable length. 5. Hardware handshake controls do not exist on VGC083C (e.g., RTS, CTS, DTR). 9.5 RS485 GP 307 and 358 RS485 protocol compatible with the GP Series 307 and 358 VGC is as defined in the following table. - Page 67 1. <CR> is a carriage return (0x0D). This is the terminator character. 2. The '_' used in certain defined commands represent a space character. Space characters may be omitted from commands. 3. GP 307 and 358 protocol response strings are variable length. tinb42e1 (2018-05) VGC083C.om...
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Page 68: Service
10 Service Every INFICON module is calibrated prior to shipment using nitrogen. Care should 10.1 Calibration be exercised when using gases other than nitrogen (N ) / air (see previous sections regarding the use of gases other than N /air). -
Page 69: Troubleshooting - Error Messages
(sensor). The e VGC083C fro ont panel indic cation of press sure is based o on this dischar rge current lev vel. As the gas... -
Page 70: Research Screen
11 Repair Return defective products to your nearest INFICON service center for repair. INFICON assumes no liability and the warranty is rendered null and void if repair work is carried out by the end-user or by third parties. 12 Accessories... -
Page 71: Storage
Please dispose of such materials in accordance with the relevant local regulations. Separating the components After disassembling the product, separate its components in accordance with the following criteria: Electronic and non-electronic Such components must be separated according to their materials and recycled. components tinb42e1 (2018-05) VGC083C.om... -
Page 72: Eu Declaration Of Conformity
EU Declaration of Conformity We, INFICON, hereby declare that the equipment mentioned below complies with the provisions of the following directives: • 2014/30/EU, OJ L 96/79, 29.3.2014 (EMC Directive; Directive relating to electromagnetic compatibility) • 2011/65/EU, OJ L 174/88, 1.7.2011 (RoHS Directive;... - Page 73 Notes tinb42e1 (2018-05) VGC083C.om...
- Page 74 LI–9496 Balzers Liechtenstein Tel +423 / 388 3111 Fax +423 / 388 3700 reachus@inficon.com Original: English www.inficon.com t i nb42e1...