Inficon IC6 Manuals

Inficon IC6 Manuals

Manuals and User Guides for Inficon IC6. We have 1 Inficon IC6 manual available for free PDF download: Operating Manual

Inficon IC6 Operating Manual

Inficon IC6 Operating Manual (342 pages)

Thin Film Deposition Controller

Brand: Inficon | Category: Controller | Size: 9.07 MB

Table of Contents

Table of Contents

9
- Chapter 1 Introduction
  
  21
  - Related Manuals
    21
    
    IC6 Safety
    22
  - Definition of Notes, Cautions and Warnings
    22
  - General Safety Information
    23
  - Earth Ground
    24
  - Main Power Connection
    25
    
    How to Contact INFICON
    26
  - Returning Your IC6
    26
    
    IC6 Specifications
    27
  - Measurement
    27
  - Screens and Hierarchy
    27
  - IC6 Features
    28
  - Recipe Storage & Datalogging
    28
  - Sensor Parameters
    28
  - Source Parameters
    28
  - Material Parameters
    29
- Introduction and Specifications
  21
Process Layer Parameters/General Global Parameters

31
- General Global Parameters
  31
  - Display
    33
  - DAC Outputs
    34
  - Logic Processing
    35
  - Relays / Inputs
    35
  - Accessories
    36
  - Operating Environment
    36
  - Power
    36
  - Remote Communications
    36
  - Storage Temperature
    36
  - Warm up Period
    36
  - Installation Clearance Requirements
    37
  - Size
    37
- Process Layer Parameters
  31
- Connector Clearances
  37
- Cooling Clearances
  37
  - Cleaning
    37
  - Weight
    37
  - Base Configurations
    38
  - Parts and Options Overview
    38
  - Pre-Installed Options or Spares
    38
  - Unpacking and Inspection
    38
  - Optional Accessories
    39
  - Oscillator Packages
    39
  - Replacement Cables
    39
  - Sensors
    39
  - Initial Power-On Verification
    40
  - Installation and Interfaces
    43
  - Sensor Installation
    43
  - Sensor Types
    43
  - Avoiding Electrical Interference
    46
  - IC6 Installation
    46
  - Verifying/Establishing Earth Ground
    46
  - Connections to Earth Ground
    47
  - Minimizing Noise Pickup from External Cabling
    48
  - Connecting the Controller
    49
  - Interface Cable Fabrication and Pin-Out
    49
  - Routing XIU Cables
    49
  - Source Control Connection
    49
  - Crucible Indexer Connections
    50
  - DAC Option Kit 781-504-G1
    50
  - I/O Expansion Options
    51
  - RS-232C Communications
    53
  - Isolated +24 V (DC) Supply
    54
  - Operation
    55
  - Sensor Information Rate/Xtal Display Description
    63
  - Crystal Life and Starting Frequency
    65
  - Percent Life Auto-Zero
    65
- Chapter 2 Location Guidelines
  
  43
  - Function Key Selection Choices for the Sensor Information Rate/Xtal Display
    66
    
    Sensor Information Type/Freq Display Description
    67
  - Test Xiu
    68
    
    Sensor Screen
    68
    
    Source
    70
    
    Material
    71
    
    Overview Page
    71
    
    Sensor Page
    71
    
    Source Page
    71
    
    Deposit Page
    72
    
    Pre/Post Page
    72
    
    Lib A-Hf, Lib Hf-Sc, Lib Sc-Z Sub-Displays
    73
    
    Overview Page
    73
    
    Process
    73
    
    Current Process
    74
    
    Etc. Screen
    74
    
    General
    74
    
    Process Page
    74
    
    Comm Page
    76
    
    Dacs Page
    76
    
    Date/Time Page
    76
    
    Lock Page
    76
    
    Message Page
    76
    
    Test Page
    76
    
    Audio/Visual Page
    77
    
    Digital I/O
    77
    
    Counter / Timer
    78
    
    Logic
    78
    
    Maintenance
    78
    
    USB Storage
    78
    
    Defining a Process
    79
    
    Process Description
    79
    
    Executing a Process
    81
    
    Co-Deposition
    83
    
    Pre-Conditioning a Layer
    83
    
    Automating a Process
    84
    
    Multiple Layer Starts
    84
    
    State Descriptions
    86
    
    Crystal Switching
    88
    
    Special Features
    88
  - Xtaltwo (Crystaltwo)
    89
  - Xtal12 (Crystal12)
    90
  - Xtalsix (Crystalsix)
    90
  - Generic Sensor Crystal Switching
    91
    
    Source/Crucible Selection
    91
  - Example: Programming Turret Source Crucible Selection
    92
    
    Auto-Z
    93
    
    Auto Tune - Optimizing the Control Loop
    94
    
    Handheld Controller
    94
    
    Rate Watcher
    94
  - Determining Soak Power with the Handheld Controller
    95
    
    Test Mode
    95
  - Standard or Time Compressed
    95
  - Advanced Test
    96
    
    USB Storage Device
    96
    
    Datalog
    97
    
    Lock and Access Codes
    97
    
    DAC Monitoring
    100
    
    Sensor & Source Set-Up
    101
    
    Recorder Function
    114
    
    Recorder Output
    114
    
    Recorder Range
    114
    
    Pre/Post Screen Deposit
    120
    
    Post Deposit Parameters
    123
    
    Deposit
    124
    
    Process Set-Up
    129
    
    Layer Parameters
    131
- Chapter 3
  
  55
  - Front Panel Controls
    55
  - Rear Panel Interfaces
    57
  - Displays
    59
  - Main Menu Display
    59
  - Operate
    60
  - Sensor Information
    63
- Chapter 4 Sensor Set-Up Introduction
  
  101
  - Sensor Display Navigation
    101
  - Sensor Parameters
    102
    
    Source Set-Up Introduction
    104
  - Source Navigation
    104
  - Source Parameters
    105
    
    DAC Output Selection Rules
    107
    
    Material Set-Up
    109
- Chapter 5 Introduction
  
  109
  - Material Screen Overview Page
    109
  - Material Definition
    110
  - Material Screen Source
    111
  - Material Screen Sensor Parameters Page
    114
  - Layer Parameter Editing
    131
  - Layer Parameters
    132
    
    Final Thick(Ness)
    132
    
    Material
    132
    
    Thick(Ness) Limit
    132
    
    Codep(Osition)
    133
    
    Cruc(Ible)
    133
    
    Ratio C(O)Ntr(O)L
    133
    
    Skip Deposit
    133
    
    Special Layer Parameter Features
    133
    
    Active Process
    135
    
    General Parameters
    135
- Chapter 6
  
  129
  - Process Set-Up Introduction
    129
  - Overview Page
    129
  - Curr(Ent) Proc(Ess) Page
    130
  - Process Layers 1 - 10 Etc
    131
- Chapter 7
  
  135
  - General Screen Process Page
    135
  - General Set-Up Overview
    135
  - Auto Start Next (Layer)
    136
  - Layer to Start
    136
  - Layers Displayed
    136
    
    Active Layer Output
    137
    
    Dacs
    137
    
    Comm
    138
    
    Test
    138
    
    MESSAGE Page Set-Up
    140
    
    DATE / TIME Set up
    141
    
    Advanced Test
    142
    
    TEST Page Set up
    142
    
    Time Compressed
    142
    
    LOCK Page Code Set-Up
    143
    
    AUDIO / VISUAL Page Set up
    144
    
    Audio Feedback
    144
- Chapter 8
  
  145
  - Max Concurrent Layer
    136
  - All Input Page
    145
  - Digital I/O Screen
    145
  - All Output Page
    146
  - I/O Board Page
    147
    
    Output Type
    147
    
    Logic Statement Set-Up
    149
    
    Logic Statement Groups
    151
    
    Logic Statement Editing
    152
    
    AND/OR and on Logic Connectors
    154
- Chapter 9
  
  149
  - Logic Statement Overview
    149
  - Editing the Logic Statements
    150
  - ON Operator
    154
    
    IF Event Definitions
    155
    
    THEN Action Definitions
    164
    
    Logic Statement Example
    168
    
    Remote Communications
    171
    
    RS-232C Serial Port
    171
    
    TCP/IP Ethernet Port
    172
- Chapter 10
  
  171
  - Physical Connections
    171
  - Remote Communication Configuration Overview
    171
  - How to Set up the Network Protocol on the PC
    172
    
    Message Format
    175
    
    Protocol
    175
  - Network Connection
    172
  - Command Packet (Host to IC6 Message)
    175
  - Response Packet (IC6 to Host Message)
    177
  - Timeouts
    178
    
    Data Type Codes
    178
  - Encode
    179
  - Integer
    179
  - Lockcode
    179
    
    Communication Commands
    180
    
    Query and Update Commands
    180
    
    HELLO Command
    181
    
    Query Source Parameter
    181
    
    Status Commands
    181
    
    Update Source Parameter
    182
    
    Query General Parameter
    183
    
    Update General Parameter
    183
  - Real_Xxx and Real_Xfx
    179
  - Time
    179
  - USB Datalog Format
    184
  - DAC 1 to 12 Scale
    185
    
    Query Input Name
    187
    
    Query Process Name
    187
    
    Update Input Name
    187
    
    Update Process Name
    187
    
    Query Logic Statement
    188
    
    IC6 Event List
    190
    
    Update Logic Statement
    190
    
    IC6 Action List
    194
    
    Query Material Parameter
    196
    
    Update Material Parameter
    196
    
    Query Material Name
    206
    
    Query Output Name
    206
    
    Update Material Name
    206
    
    Update Output Name
    206
    
    Query Process Layer Parameter
    207
    
    Update Process Layer Parameter
    207
    
    Query Sensor Parameter
    208
    
    Update Sensor Parameter
    208
    
    Query Output Type
    210
    
    Query User Message
    210
    
    Update Output Type
    210
    
    Update User Message
    210
    
    Status General
    211
    
    Status Layer
    214
    
    Status Sensor
    216
    
    Remote General Action
    219
    
    Remote Layer Action
    222
    
    IC6 Communications Examples
    224
  - General Command Packet Format
    224
  - General Response Packet Format
    224
  - HELLO Command, ASCII Name and Version
    224
  - Query General Parameter
    225
  - Update General Parameter
    225
    
    Query Material Parameter
    225
    
    Query Sensor Parameter
    225
    
    Update Material Parameter
    225
    
    Update Sensor Parameter
    226
  - Query Process Layer Parameter
    226
  - Query Source Parameter
    226
  - Update Source Parameter
    226
  - Update Process Layer Parameter
    227
  - Query Input Name
    228
  - Query Material Name
    228
  - Query Process Name
    228
  - Update Material Name
    228
  - Update Process Name
    228
  - Query Output Name
    229
  - Query Output Type
    229
  - Update Input Name
    229
  - Update Output Name
    229
  - Update Output Type
    229
  - Query Logic Statement
    230
  - Query User Message
    230
  - Update User Message
    230
  - Status General
    231
  - Update Logic Statement
    231
  - Remote General Action
    232
  - Remote Layer Action
    232
  - Status Layer
    232
  - Status Sensor
    232
  - Example for Interpreting Float Responses
    233
- Chapter 11 Multiple Sensor Deposition Control
  
  235
  - IC6 Parameters and Corrections for Multiple Sensor Operation
    237
    
    Trend Analysis
    239
  - IC6 Parameters Associated with the Trend Analysis Feature
    239
    
    IC6 Cygnus Emulation
    240
    
    IC6 Four & Six Layer (Cygnus Emulation) Configuration
    241
  - Configure Sensors 1 to 6
    242
  - Configure Six Materials
    242
  - Configure Sources 1 to 6
    242
  - Configure the Process
    243
  - General Parameters
    243
  - Logic Functions Table
    243
  - Idle
    244
    
    Maintenance and Calibration Procedures
    245
- Chapter 12
  
  245
  - Nondepcntl State
    244
  - State Descriptions
    244
  - Suspend
    244
  - Determining Density
    245
  - Importance of Density, Tooling and Z-Ratio
    245
  - Determining Tooling
    246
  - Laboratory Determination of Z-Ratio
    247
  - Autotune Preparation Instructions
    249
  - Autotuning
    249
  - Autotune Parameters
    252
  - Autotune Manual Display
    253
  - Autotune Description
    254
    
    Determining Cross Talk Calibration
    257
    
    For Co-Deposition
    257
  - Autotune Tuning Display
    254
  - Cross Talk Calibration Procedural Notes
    258
  - Procedure Set-Up
    258
  - Cross Talk Calibrate Parameters
    260
    
    Cross Talk Calibration MANUAL Display
    261
  - Function Key Selection Choices
    261
    
    Cross Talk Calibration CALIBRATE Display
    262
    
    Cross Talk Calibration SELECT Display
    263
  - Function Key Selection Choices for Cross Talk Calibration Select
    263
    
    Source Maintenance
    264
    
    Source Maintenance Parameters
    265
  - Crucible Rotation
    265
  - Start/Stop Manual Power
    265
    
    System Status
    266
    
    Counters & Timers
    267
    
    Directory Structure
    269
    
    USB Storage Devices
    269
    
    Configuration Files
    270
    
    Data Logs
    271
    
    Screen Captures
    272
    
    Status Messages
    273
    
    Troubleshooting, Status and Error Messages
    273
    
    User Messages
    277
    
    Autotune and Calibration Messages
    278
    
    STOP Messages
    279
    
    Transient Messages
    281
    
    Input Error Messages
    286
    
    Troubleshooting Guide
    288
    
    Troubleshooting the IC6
    289
    
    Troubleshooting Transducers/Sensors
    292
    
    Troubleshooting Computer Communications
    296
    
    Front Load
    299
    
    Replacing the Crystal
    299
    
    Cool Drawer
    300
    
    Bakeable Sensor
    302
    
    Shuttered and Dual Sensors
    302
    
    Sputtering Sensor
    303
    
    Crystal Snatcher
    304
    
    Crystalsix (Xtalsix)
    304
    
    Crystal Sensor Emulator IPN 760-601-G1 or 760-601-G2
    305
    
    Diagnostic Procedures
    306
- Chapter 13 Introduction
  
  267
  - Toggle Sensor and Source Shutter
    265
- Chapter 14 File Handling (USB)
  
  269
  - USB Storage
    269
  - Measurement System Diagnostic Procedure
    306
  - Feedthrough or In-Vacuum Cable
    307
    
    Diagnostic Procedure
    307
  - Sensor Head or Monitor Crystal Diagnostic Procedure
    308
  - System Diagnostics Pass but Crystal Fail Message Remains
    309
    
    XTAL Life
    309
    
    Sensor Cover Connection
    310
  - Compatible Sensor Heads
    310
  - Incompatible Sensor Heads
    310
    
    Specifications
    311
    
    Measurement and Control Theory
    313
    
    Monitor Crystals
    314
    
    Period Measurement Technique
    316
    
    Z-Match Technique
    317
    
    Active Oscillator
    318
    
    Modelock Oscillator
    319
    
    Auto-Z Theory
    321
    
    Control Loop Theory
    323
    
    Material Table
    329
- Chapter 15
  
  273
- Chapter 16 Basics
  
  313
- Appendix A
  
  329
  - Introduction
    329
  - A.1 Introduction
    329

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