Inficon Cygnus 2 Operating Manual page 11

Thin film deposition controller
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9.4.30
Status Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-41
9.4.31
Remote General Action . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-43
9.4.32
Remote Material Action . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-46
9.4.33
Cygnus 2 Communications Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-48
9.4.33.1
General Command Packet Format. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-48
9.4.33.2
General Response Packet Format . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-48
9.4.33.3
HELLO Command, ASCII name and version . . . . . . . . . . . . . . . . . . . . . . . 9-48
9.4.33.4
Query Material Parameter, Z-Ratio (2), Material 1 . . . . . . . . . . . . . . . . . . . 9-49
9.4.33.5
Update Material Parameter, Control Loop (4), Material 1, PID (2) . . . . . . . 9-49
9.4.33.6
9.4.33.7
9.4.33.8
Query Source Parameter, Shutter Output (2), Source 1 . . . . . . . . . . . . . . 9-49
9.4.33.9
9-49
9.4.33.10
Query Material Name, Material 1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-50
9.4.33.11
9.4.33.12
Query Input Name, Input 1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-50
9.4.33.13
9.4.33.14
Query Output Name, Output 1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-50
9.4.33.15
9.4.33.16
Query Output Type, Output 1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-51
9.4.33.17
Update Output Type, Output 1, Normally Closed (1) . . . . . . . . . . . . . . . . . 9-51
9.4.33.18
Query User Message, Message 1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-51
9.4.33.19
9.4.33.20
Query Logic Statement, Statement 1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-51
9.4.33.21
9.4.33.22
Status Material, Thickness (4), Material 1 . . . . . . . . . . . . . . . . . . . . . . . . . 9-53
9.4.33.23
Status Sensor, Crystal Life (0), Sensor 1 . . . . . . . . . . . . . . . . . . . . . . . . . . 9-53
9.4.33.24
Remote General Action, Stop All . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-53
9.4.33.25
Remote Material Action, Open Source Shutter (8) . . . . . . . . . . . . . . . . . . . 9-53
9.4.33.26
Example for Interpreting Float Responses . . . . . . . . . . . . . . . . . . . . . . . . . 9-54
Chapter 10
10.1
Importance of Density, Tooling and Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . . 10-1
10.2
Determining Density . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-1
10.3
Determining Tooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-2
10.4
Laboratory Determination of Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-3
10.5
Source Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-5
Cygnus 2 Operating Manual
TOC - 7

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