Inficon VGC083C Operating Manual
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Inficon VGC083C Operating Manual

Vacuum gauge controller
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Operating Manual
Incl. EU Declaration of Conformity
Vacuum Gauge Controller
VGC083C
1
tinb42e1-a
(2019-10)

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Summary of Contents for Inficon VGC083C

  • Page 1 Operating Manual Incl. EU Declaration of Conformity Vacuum Gauge Controller VGC083C tinb42e1-a (2019-10)

  • Page 2: Product Identification

    INFICON cannot assume responsibility or liability for any actual use based on the examples and diagrams. No patent liability is assumed by INFICON with respect to use of information cir- cuits, equipment, or software described in this manual.

  • Page 3: Liability And Warranty

    Labels may be located on or inside the device to alert people that dangerous voltages may be present. Liability and Warranty INFICON assumes no liability and the warranty is rendered null and void if the end- user or third parties • disregard the information in this document •...

  • Page 4: Table Of Contents

    Liability and Warranty 1 Introduction / General Information 1.1 Description 2 Technical Data 2.1 VGC083C 2.2 Power Supply for VGC083C (Optional) 3 Important Safety Information 3.1 Safety Precautions - General 3.2 Safety Precautions - Service and Operation 3.3 Electrical Conditions 3.3.1 Proper Equipment Grounding...
  • Page 5 Convection Gauge 9 Communication Protocol (Serial Interface) 9.1 Device Specific Serial Communication Info 9.2 INFICON RS232 / RS485 Command Protocol Summary 9.3 INFICON RS232 and RS485 Command Protocol Summary 9.4 RS232 GP 307 and 358 Protocol 9.5 RS485 GP 307 and 358 Protocol Service 10.1...

  • Page 6: Introduction / General Information

    Cold Cathode Gauge heads please refer to the Operating Manual for each of this products. Read the Operating Manuals in their entirety for any device you intend to connect to the VGC083C prior to connecting and using the external devices and cables that the VGC083C is intended to be used with.

  • Page 7: Technical Data

    OLED - displays state of all setpoint relays, IG emission current, error messages for fault conditions Functionality powers & operates one INFICON MAG050 or MAG060 passive Cold Cathode Gauge powers & operates up to 2 INFICON PGE050 ® convection or Granville-Phillips (GP) ® Convectron...
  • Page 8 Ambience Temperature Operation 0 … +40 °C Storage –40 … +70 °C Relative humidity 0 … 95, non-condensing Altitude Operating max. 2500 m (8200 ft.) Storage max. 12500 m (41000 ft.) Housing Housing aluminum extrusion tinb42e1-a (2019-10) VGC083C.om...

  • Page 9: Power Supply For Vgc083C (Optional)

    Mains specifications Voltage 20 … 28 V (dc), 12 W protected against power reversal and transient over-voltages Connectors IG & CG gauge cable assemblies provided by INFICON Digital I/O 9-pin D-sub male Serial communications RS232 9-pin D-sub female RS485 9-pin D-sub male...

  • Page 10: Important Safety Information

    3 Important Safety Information INFICON has designed and tested this product to provide safe and reliable service, provided it is installed and operated within the strict safety guidelines provided in this manual. Please read and follow all warnings and instructions.

  • Page 11: Electrical Conditions

    Turn off power to the unit if a cable or plug is damaged or the product is not operat- ing normally according to this instruction manual. Contact qualified INFICON ser- vice personnel for any service or troubleshooting condition that may not be covered by this operating manual.

  • Page 12: Gases Other Than Nitrogen / Air

    Nitrogen / air without referring to correction factor data tables. INFICON gauges and modules are calibrated for direct readout of nitrogen or air. Do not attempt to use with other gases such as argon (Ar) or carbon dioxide (CO unless you have applied correction factors to both the displayed pressure and the analog output to determine the true measured pressure.

  • Page 13: Installation

    Optional EIA-standard, 19-inch, 2U height rack mount panels are available from INFICON. The optional rack mount panels are provided with panel cut- outs and mounting holes to allow efficient mounting of your VGC083C unit.  Drill four guide holes on each side of the panel cut out (two on each side) with dimensions as shown in the panel cut-out drawing above.

  • Page 14: Mechanical Installation - Ionization Gauge

    All dimensions in inches. The single cut-out and dual cut-out rack mountable panels shown above are availa- ble from INFICON. Panel color matches the front panel of VGC083C units. Screws for mounting to rack enclosure are included. 4.1.3 Mechanical Installation -...

  • Page 15: Mechanical Installation - Convection Gauge

    ® wraps of pipe thread seal tape such as PTFE (Teflon ) tape and hand tighten the gauge into the gauge port. Do not use a wrench or other tool which may damage the gauge. tinb42e1-a (2019-10) VGC083C.om...

  • Page 16: Electrical Installation

    12-AWG earthing conductor between a known facility earth ground connection and the location marked with the earth ground symbol (via the green colored screw provided) on the back panel of the VGC083C. 4.2.2 Installation A good, recommended practice is to remove power from any cable prior to con- necting or disconnecting it.

  • Page 17: Connecting Mag050 / Mag060 - Connector Labeled "1

    "1" The custom cable / connector assembly are custom cable assemblies provided in different lengths from INFICON for connecting the VGC083C to the MAG050 / 060 cold cathode ionization gauge sensor. Changing cables from one device to another when power is applied is not only bad...

  • Page 18: Power Connection

    4.2.5 Power Connection The VGC083C requires an input power of 20 … 28 V (dc), 12 W to operate. One each 2-contact pluggable terminal strip mating connector is provided for connection to the power contactors. Optional power supplies are also available from INFICON (PN →...

  • Page 19: Digital I/O Connection

    VGC083C. The D contact is used in this configuration to protect the IG from being turned on at high pressure in case power to the alternate gauge is lost.

  • Page 20: Rs232 / Rs485 Serial Communications Connection

    Either RS232 or RS485 serial communications may be used to send / receive com- Communications mands to / from the VGC083C. There are two DE9 (D-subminiature, shell size E, 9 pole) connectors that allow independent cable connections to the RS232 and Connection RS485 serial communication ports.
  • Page 21 No connection Signal Ground No connection No connection No connection No connection Connect either RS232 or RS485 cable to VGC083C - DO NOT CONNECT BOTH AT THE SAME TIME 9-pin (DE-9P) D-subminiature RS485 Connections Description RS485 Connector DATA A (–)

  • Page 22: Operation - Ig And Cg

    The information presented in sections 5.1 and 5.2, above, is intended as an intro- duction to the programming capabilities of the VGC083C for use in controlling the selectable parameters and functions of the MAG050 / MAG060 IG and PEG050 CG transducers.

  • Page 23: Cond Cathode Activation Delay

    Activation Delay needed for the electrical discharge to establish itself at low pressures. The delay time increases at low pressures, and is typically: 7.5×10 Torr ≈ 0.1 minute 7.5×10 Torr ≈ 1 minute 7.5×10 Torr ≈ 5 minutes tinb42e1-a (2019-10) VGC083C.om...

  • Page 24: Setup And Programming

    6 Setup and programming 6.1 Applying Power Before you turn on power to the VGC083C for the first time, ensure the cables from the VGC083C to the MAG050 / MAG060 and PGE050 convection gauges are con- nected and secured. Turn on power by pressing the Power key.

  • Page 25: User Interface Basics

    6.3 User Interface Basics The setup and programming of the VGC083C controller is done via the four pro- gramming-keys located below the OLED setup screen on the left hand side of the VGC083C front panel. During programming of the VGC083C, the OLED display will identify what function each key represents.

  • Page 26: Programming

    This section provides detailed information on programming and configuration of various menus and submenus of the device. This key, on the VGC083C front panel, is referred to as the 'ENTER' key throughout this manual. From the main menu (press the MENU key if the main menu is not shown), scroll...

  • Page 27: Setup Unit

    ITI LOG IG7V is reserved for future use. Currently not applicable. • • Select ITI LOG IG if you are using INFICON's ionization gauge module such as the BAG302 IG with a Log-linear analog output. • Select ITI NON-LINEA if you are using INFICON's convection gauge modules such as the PGE300 or PGE500 with a non-linear analog output.

  • Page 28: Ion Gauge

    CG2/ALT display channel. Connect the analog output from these devices to the + and – terminals of the VGC083C Analog Input Connector labeled AI. In the ALT GAUGE CAL screen use the UP or DOWN keys to adjust the displayed pressure by the VGC083C to match the pressure reading on the modules.

  • Page 29: Convec Gauge

    (sensor) sensitivity described above. Failure to ensure that the VGC083C is programmed for the actual sensitivity of the head it is used with may result in pressure readings that are not true pressure. Equipment damage due to incorrect pressure readings and improper system control functions as a result of incorrect pressure measurement readings may result.

  • Page 30: Relays

    ASSIGN RELAY 2; same choices as ASSIGN RELAY 1 above ASSIGN REL 3 [Factory default = CG2] ASSIGN RELAY 3; same choices as ASSIGN RELAY 1 above ASSIGN REL 4 [Factory default = ION GAUGE] ASSIGN RELAY 4; same choices as ASSIGN RELAY 1 above tinb42e1-a (2019-10) VGC083C.om...
  • Page 31 If you are unable to increase the value of REL 1 LO TRIP (VGC083C responding with the message "NO CHANGE"), you must first access the REL 1 HI TRIP menu below and increase that value to a number higher than the value of the REL 1 LO TRIP you are trying to set.

  • Page 32: Analog Output

    Relays will return to the previous state after exiting the TEST RELAYS menu. 6.5.5 Analog Output The VGC083C provides three analog outputs proportional to the pressure meas- ured by the ionization gauge, the selected convection gauge (CG1 or CG2) or a continuous, combined output signal from the IG and CG1 (IG - CG1) for full range measurement.
  • Page 33 INFICON convection gauges such as the PGE300 or PGE500 provide this capability. If you are using a...
  • Page 34 This selection covers 3 decades of pressure change. Essentially, this allows retransmission of the same analog input signal being received by the VGC083C. For example, if ALT GAUGE selected is 1000 TORR CDG, the maxi- mum pressure should also be programmed as 1.00E03 Torr (value programmed for AOUT LIN 1 or AOUT LIN 2 or AOUT LIN 3 menu below), then the instrument provides a 10 volt analog output signal when pressure is at 1.00E03 Torr and the...
  • Page 35 - CG1, CG1, CG2, CG1/CG2NON-LIN, CG1/CG2 LINEAR, ALT CG 1-8V. Connect CG1 or CG2 to the VGC083C and connect the VGC083C analog output 1 to a high resolution voltmeter, your system, PLC, etc. While in the AOUT CAL 1 screen and...

  • Page 36: Serial Comm

    (CG2/ALT display channel). Example: The VGC083C ANALOG OUTPUT 1 is programmed for "ALT LINEAR" and a 1000 TORR CDG is connected to the VGC083C. The VGC083C CG2/ALT display channel is registering a pressure reading of 7.60E02 Torr. For a 1000 TORR CDG with a 0-10 VDC output, the expected analog output at 760 Torr is 7.60 volts.

  • Page 37: Display

    COMM TYPE [Factory default = RS485] The VGC083C supports four different protocols listed below (See section 9 for details). RS485 RS485 with start and stop characters and address, derived from • INFICON BAG302 RS232 RS232 with start and stop characters, like RS485 above but •...
  • Page 38 SCREEN SAVER [Factory default = ON] The VGC083C set-up screen uses an OLED type display which over an extended period of time can start to show divergence between pixels that are on at all times verses pixels that are not. This could result in pixels exhibiting a burned-in effect.

  • Page 39: Analog Output Charts & Equations (Nitrogen/Air Only)

    7 Analog Output Charts & Equations (Nitrogen/Air Only) This section provides various charts & equations for analog outputs available from the VGC083C. 7.1 Analog Output wide When the analog output is setup, as described in section 6.5.6 for IG - CG1 / CG2 / ALT 0.5-7V, the analog output voltage represents a combination of the IG and CG1...

  • Page 40: Analog Output For Ig Log N - 10 (Nitrogen / Air Only)

    The following chart shows the graphical results of table and formulas above for measurements in Torr. Pressure is plotted on the X-axis with a log scale; the output signal is plotted on the Y-axis on a linear scale. tinb42e1-a (2019-10) VGC083C.om...

  • Page 41: Analog Output For Ig Log N - 11 (Nitrogen / Air Only)

    The following chart shows the graphical results of table and formulas above for pressure measurements in Torr. Pressure is plotted on the X-axis with a log scale; the output signal is plotted on the Y-axis on a linear scale. tinb42e1-a (2019-10) VGC083C.om...

  • Page 42: Analog Output For Ig Log N - 12 (Nitrogen / Air Only)

    The following chart shows the graphical results of table and formulas above for pressure measurements in Torr. Pressure is plotted on the X-axis with a log scale; the output signal is plotted on the Y-axis on a linear scale. tinb42e1-a (2019-10) VGC083C.om...

  • Page 43: Analog Output For Ig 1.8 - 8.7 V (Nitrogen / Air Only)

    The following chart shows the graphical results of table and formulas above for pressure measurements in Torr. Pressure is plotted on the X-axis with a log scale; the output signal is plotted on the Y-axis on a linear scale. tinb42e1-a (2019-10) VGC083C.om...

  • Page 44: Analog Output For Ig Linear (Nitrogen / Air Only)

    B) The log-linear output signal and pressure are related by the following formulas when units of measurement is in pascals: (volts - 3) P = 10 V = log (P) + 3 Where P is the pressure in pascals, and V is the output signal in volts. tinb42e1-a (2019-10) VGC083C.om...
  • Page 45 2.00E+01 6.301 8.00E+02 7.903 2.00E-02 3.301 5.00E+01 6.699 9.00E+02 7.954 5.00E-02 3.699 1.00E+02 7.000 1.00E+03 8.000 1.00E-01 4.000 2.00E+02 7.301 The following chart shows the graphical results of table and formulas above for pressure measurements in Torr. tinb42e1-a (2019-10) VGC083C.om...

  • Page 46: Analog Output For Cg1 Or Cg2 0 - 7 V (Nitrogen / Air Only)

    2.000 2.00E+01 5.300 8.00E+02 6.900 2.00E-02 2.300 5.00E+01 5.700 9.00E+02 6.950 5.00E-02 2.700 1.00E+02 6.000 1.00E+03 7.000 1.00E-01 3.000 2.00E+02 6.300 The following chart shows the graphical results of table and formulas above for measurements in Torr. tinb42e1-a (2019-10) VGC083C.om...

  • Page 47: Analog Output For Cg1 Or Cg2 Non - Lin (Nitrogen / Air Only)

    "S-curve". The non-linear analog output of the VGC083C duplicates the original S-curve of 0.375 volts at pressure less than 1.00 × 10 Torr to 5.659 volts at 1000 Torr, nitrogen or air.
  • Page 48 Example: Measured analog output voltage is 0.3840 V. From first table shown above use equation: y(x) = a + bx + cx + dx + ex x = 0.3840 volts a = -0.02585, b=0.03767, c=0.04563, d=0.1151, e=-0.04158, f=0.008738 y(x) = Pressure = 1.0E-03 Torr tinb42e1-a (2019-10) VGC083C.om...

  • Page 49: Analog Output For Cg1 Or Cg2 Linear (Nitrogen / Air Only)

    If your application requires the analog output voltage to cover a pressure range exceeding three decades, then consider using a log-linear analog output type for CG1 or CG2. Note - An analog output of above +11 volts indicates a faulty convection gauge or unplugged gauge cable. tinb42e1-a (2019-10) VGC083C.om...

  • Page 50: Using The Gauge With Different Gases

    Torr the pressure indication is linear. For gases other than air / N2, the pressure can be determined by means of the following conversion formula: = K × indicated pressure where: Gas type Gas type Air (N , CO) These gas correction factors are average values. tinb42e1-a (2019-10) VGC083C.om...

  • Page 51: Effects Of Different Gases On Convection Gauge Display

    Example If the gas in use is argon (Ar) and the VGC083C controller indicates a measured pressure of 7.6 x 10-6 Torr: = 0.8 × 7.60 × 10 = 6.08 × 10 Torr true pressure of argon gas NOTE Cold cathode gauges exhibit a non-linear response in the pressure range of 1×10...
  • Page 52 The Y- axis of the above chart is actual pressure as measured by a capacitance manometer, a diaphragm gauge that measures true total pressure independent of gas composition. The X-axis is the pressure reading indicated by the convection gauge under test. This chart shows readings for an INFICON convection gauge ® ®...
  • Page 53 An O-ring compression fitting type device may be forcibly released (ejected) from the fitting if internal pressure exceeds the local barometric, ambient pressure. tinb42e1-a (2019-10) VGC083C.om...
  • Page 54 2.00E+00 Torr based on the conversion information pro- vided in the above table. Example: If the gas is argon (Ar), when the true pressure is 100 Torr, the gauge will read only about 9 Torr. tinb42e1-a (2019-10) VGC083C.om...

  • Page 55: Effects Of Different Gases On Analog Output

    Gases A) Pressure range from high vacuum to the OVER PRESSURE value programmed in the VGC083C (cold cathode ion gauge range): Use the correction factors listed in section 8.3.2.1 below to determine pressure from the voltage for selected gases (ion gauge range). As discussed previously cold cathode gauges exhibit a non-linear response in the pressure range of 1×10...

  • Page 56: Ig-Cg1 0.5 - 7V Analog Output Correction Factors - Ion Gauge Range

    - Ion Gauge Range analog output to pressure for MAG050/060 when operating from high vacuum to the to OVER PRESSURE shut down value programmed in the VGC083C. B) Refer to section 7.1 and related equation to convert the voltage in your re- ceiving instrument to pressure.

  • Page 57: Ig-Cg1 0.5 - 7V Analog Output Correction Factors - Convection Gauge Range

    CG1 or CG2 for gases other than air/N , you must also apply corrections to the analog output. Use the following tables to determine pressure from voltage for gases other than nitrogen or air. tinb42e1-a (2019-10) VGC083C.om...

  • Page 58: Cg1 1 - 8 V Or Cg2 1 - 8 V Analog Output Correction Factors - Convection Gauge

    1.00E+3 8.000 6.512 7.045 5.706 6.045 6.104 Values listed under each gas type are in volts (V). Example The gas in use is O . Voltage output is 4.288 volts. True pressure of O is 2.00E-01 Torr tinb42e1-a (2019-10) VGC083C.om...

  • Page 59: Cg1 0 - 7 V Or Cg2 0 - 7 V Analog Output Correction Factors

    7.000 5.512 6.045 4.706 5.045 5.104 Values listed under each gas type are in volts (V (dc)). Example The gas in use is O . Voltage output is 3.288 volts. True pressure of O is 2.00E-01 Torr tinb42e1-a (2019-10) VGC083C.om...
  • Page 60 4.663 5.658 4.877 3.645 4.203 4.286 6.942 6.519 9.00E+2 5.6141 4.706 5.713 4.919 3.674 4.237 4.321 1.00E+3 5.6593 4.745 5.762 4.955 3.69 4.27 4.354 7.056 6.642 Values listed under each gas type are in volts (V (dc)). tinb42e1-a (2019-10) VGC083C.om...

  • Page 61: Communication Protocol (Serial Interface)

    There is a finite period of time between the time a command is sent from a terminal (PC COM Port, for example) and the point in time in which the VGC083C starts to send a response to that command. This delay is dependent upon the command sent and the baud rate.

  • Page 62: Inficon Rs232 And Rs485 Command Protocol Summary

    "?". 8. A valid address must be used [Factory default = 01] when using the RS485 protocol. The VGC083C will not respond to a command with an invalid address while using RS485. 9. The command syntax examples used in the protocol summary table for ASCII are shown in scientific notation.
  • Page 63 Table "INFICON RS232 and RS485 Command Protocol Summary" (continued) COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE - EXAMPLES READ all Process Read the current state of all #xxRL<CR> *xx_003F_RL_<CR> Control (PC, or process control setpoint e.g.: #01RL<CR> In the example response above,...
  • Page 64 1. <CR> is a carriage return (0x0D). This is the terminator character. 2. The '_' used in certain defined commands represent a space character. Space characters may be omitted from commands. 3. Hardware handshake controls do not exist on VGC083C (e.g., RTS, CTS, DTR). tinb42e1-a (2019-10) VGC083C.om...

  • Page 65: Rs232 Gp 307 And 358 Protocol

    ON/OFF and Filament Se- n = 1 = fil1, 2 = fil2 lection are combined in the single IG ON/OFF command. When turning the IG to ON, the specific filament chosen is selected when sending the IG ON/OFF commands. (continued) tinb42e1-a (2019-10) VGC083C.om...

  • Page 66: Rs485 Gp 307 And 358 Protocol

    3. The '_' used in certain defined commands represent a space character. Space characters may be omitted from commands. 4. GP 307 and 358 protocol response strings are variable length. 5. Hardware handshake controls do not exist on VGC083C (e.g., RTS, CTS, DTR). 9.5 RS485 GP 307 and 358 RS485 protocol compatible with the GP Series 307 and 358 VGC is as defined in the following table.
  • Page 67 1. <CR> is a carriage return (0x0D). This is the terminator character. 2. The '_' used in certain defined commands represent a space character. Space characters may be omitted from commands. 3. GP 307 and 358 protocol response strings are variable length. tinb42e1-a (2019-10) VGC083C.om...

  • Page 68: Service

    10 Service 10.1 Calibration Every INFICON module is calibrated prior to shipment using nitrogen. Care should be exercised when using gases other than nitrogen (N ) / air (see previous sections regarding the use of gases other than N /air).

  • Page 69: Troubleshooting - Error Messages

    This voltage will change with increasing pressure. If the pressure reading that you see in the VGC083C LED IG display line is lower than expected, these two indications in the RESEARCH Screen may be viewed to, perhaps, discern the relative conditions of the measurement being made.

  • Page 70: Cleaning The Vgc083C

    11 Repair Return defective products to your nearest INFICON service center for repair. INFICON assumes no liability and the warranty is rendered null and void if repair work is carried out by the end-user or by third parties. 12 Accessories...

  • Page 71: Storage

    Please dispose of such materials in accordance with the relevant local regulations. Separating the components After disassembling the product, separate its components in accordance with the following criteria: Electronic and non-electronic Such components must be separated according to their materials and recycled. components tinb42e1-a (2019-10) VGC083C.om...

  • Page 72: Eu Declaration Of Conformity

    EU Declaration of Conformity We, INFICON, hereby declare that the equipment mentioned below complies with the provisions of the following directives: 2014/30/EU, OJ L 96/79, 29.3.2014 • (EMC Directive; Directive relating to electromagnetic compatibility) • 2011/65/EU, OJ L 174/88, 1.7.2011 (RoHS Directive;...
  • Page 73 Notes tinb42e1-a (2019-10) VGC083C.om...
  • Page 74 LI–9496 Balzers Liechtenstein Tel +423 / 388 3111 Fax +423 / 388 3700 reachus@inficon.com Original: English www.inficon.com...

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