Basic Specifications; Table 1-3: Ant130Lz Series Specifications - Aerotech ANT130LZ Series Hardware Manual

Hardware Manual

1.3. Basic Specifications

Resolution is dependent on encoder resolution and controller interpolation.
Table 1-3: ANT130LZ Series Specifications
Travel
(1)
Accuracy
Bidirectional Repeatability
Resolution (Minimum
Incremental Motion)
(1)
Straightness
(1)
Flatness
Pitch
Roll
Yaw
Maximum Speed
Maximum Acceleration (No Load)
In-Position Stability
Load Capacity (Vertical)
Moving Mass
Stage Mass
Material
Mean Time Between Failure
1. Certified with each stage.
2. Requires the selection of an applicable amplifier with sufficient voltage and current.
3. In-position stability is reported as 3-sigma value (requires a 1 Vpp encoder).
4. Payload specifications assume that the payload is centered on-axis.
5. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system
depend upon the payload and workpoint. Consult the Aerotech factory for multi-axis or non-standard applications.
6. -PL2 performance requires the use of an Aerotech controller.
7. To ensure the achievement and repeatability of specifications over an extended period of time, environmental
temperature must be controlled to within 0.25°C per 24 hours. Consult the Aerotech factory for more information.
8. The air supply for the pneumatic counterbalance must be clean, dry to 0°F dewpoint, and filtered to 0.25 µm or better.
Use nitrogen at 99.9% purity for best results. Supply pressure is determined by the amount of payload carried by the stage.
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-PL1
-PL2 (-E1, -E2)
-PL2 (-E4)
(1)
-E1
-E4
-E1, -E4
(2)
-E2
(2)
-E1
(3)
-E4
(4)
ANT130LZ-035
35 mm
±3.0 µm
±300 nm
±200 nm
±75 nm
2 nm
1 nm
±2.0 µm
±2.0 µm
10 arc sec
10 arc sec
5 arc sec
200 mm/s
145 mm/s
1 g
<2 nm
<1 nm
10.0 kg
1.3 kg
5.0 kg
Anodized Aluminum
30,000 Hours
ANT130LZ
ANT130LZ-060
60 mm
1.5 kg
5.7 kg
19