Index - Aerotech ANT130LZ Series Hardware Manual

Single-axis z direct-drive nanopositioning stage
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ANT130LZ Hardware Manual

Index

2006/42/EC
Acceleration
Accuracy
Accuracy and Temperature Effects
Accuracy of the Ballscrew
air
nitrogen
Altitude
Ambient Temperature
Attaching the Payload
cleaning
mounting surface
Cleaning
cleaning solvent
compressed air
Dimensions
Directive 2006/42/EC
Electrical Installation
Electrical Warnings
EN 60204-1 2010
EN ISO 12100 2010
Encoder Specifications
EU 2015/863
Flatness
Hall-Effect Sensors Specifications
Handling
Humidity
www.aerotech.com
2
A
C
22,26
D
E
F
H
In-Position Stability
Inspection Schedule
isopropyl alcohol
6
label
19
Limit Switch Specifications
19
Load Capacity
18
Lubrication
18
20
Mass
18
Motor-Related Warnings
18
mounting surface
26
cleaning
securing stage
multiaxis combinations
42
nitrogen
42
20
packing list
part number
21
Pitch
6
Possible Cause
Protection Rating
protective ground connection
29
10
6-7
Repeatability
6-7
Resolution
36
Roll
6
serial number
19
shimming
Solution
solvents
36
14
18
Index
I
L
14-15
M
22,26
N
P
14-15
R
S
14-15
19
41
42
37
19
43
19
11
22
42
20
14
19
45
18
30
19
19
19
22
45
42
51

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