Basic Specifications; Table 1-3: Abl1500Z Series Specifications - Aerotech ABL1500Z Hardware Manual

ABL1500Z Hardware Manual

1.3. Basic Specifications

Table 1-3: ABL1500Z Series Specifications
Basic Model
Travel
-E1
(1)
Accuracy
-E3
-E1
Repeatability (Bi-
(1)
Directional)
-E3
(1)
Straightness
(1)
Flatness
Pitch
Roll
Yaw
Maximum Speed
Maximum Acceleration
Maximum Force (Continuous)
(2)
Load Capacity
(3)
Operating Pressure
(4)
Air Consumption
Moving Mass (no load)
Stage Mass
Material
Mean Time Between Failure
(1) Certified with each stage.
(2) Axis orientation for on-axis loading is listed (refer to
(3) To protect air bearing against under-pressure, an in-line pressure switch tied to the motion controller/amplifier E-Stop is
recommended.
(4) Air supply must be clean, dry to 0° F dew point and filtered to 0.25 μm or better. Recommend nitrogen at 99.9% purity.
NOTES:
Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is payload
l
and workpoint dependent. Consult the Aerotech factory for multi-axis or non-standard applications.
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ABL15005Z-
050
50 mm
±0.3 µm
Calibrated
±2.0 µm
Standard
±0.2 µm
Calibrated
±1.5 µm
Standard
±0.1 µm
±0.1 µm
±0.4 µm
±0.4 µm
±1 arc sec
±1 arc sec
±1 arc sec
23.8 kg
Section 2.4. for offset loading behavior).
Chapter 1
ABL15010Z- ABL15015Z-
100 150
100 mm 150 mm
±0.3 µm ±0.4 µm
±3.0 µm ±5.0 µm
±0.2 µm ±0.3 µm
±2.5 µm ±4.0 µm
±0.1 µm ±0.15 µm
±0.1 µm ±0.15 µm
±0.6 µm ±0.8 µm
±0.6 µm ±0.8 µm
±1.5 arc sec ±2 arc sec
±1.5 arc sec ±2 arc sec
±1.5 arc sec ±2 arc sec
300 mm/s
2 g (no load)
93.6 N
15.0 kg
80 psi ±5 psig
Stage: 24 - 30 SLPM @ 551 kPa;
Counterbalance: 60 SLPM max
5.9 kg
26.6 kg 28.5 kg
Aluminum
20,000 Hours
Overview
ABL15020Z-
200
200 mm
±0.5 µm
±8.0 µm
±0.5 µm
±6.0 µm
±0.2 µm
±0.2 µm
±1.0 µm
±1.0 µm
±2.5 arc sec
±2.5 arc sec
±2.5 arc sec
30.5 kg
13