Motor And Feedback Specifications; Table 3-7: Hall-Effect Sensor Specifications; Table 3-8: Thermistor Specifications; Table 3-9: Encoder Specifications - Aerotech ANT130LZ Series Hardware Manual

Single-axis z direct-drive nanopositioning stage
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ANT130LZ

3.3. Motor and Feedback Specifications

IMPORTANT: All 5 V supplies share one common connection within the stage.
Table 3-7:
Hall-Effect Sensor Specifications
Supply Voltage
Supply Current
Output Type
Output Voltage
Output Current
Table 3-8:
Thermistor Specifications
Polarity
Cold Resistance
Hot Resistance
Note: 1K pull-up to +5V recommended.
Table 3-9:
Encoder Specifications
Supply Voltage
Supply Current
Output Signals
(Differential)
Table 3-10:
Encoder Resolution
Encoder Option
[-E1] w/ x4000 Interpolation
[-E1] w/ x16000 Interpolation
[-E2]
[-E3] w/ x4000 Interpolation
[-E3] w/ x16000 Interpolation
[-E4] w/ x4000 Interpolation
[-E4] w/ x16000 Interpolation
(1) 78 nm resolution for absolute encoder track used for initialization.
36
Specification
5 V ±5%
50 mA
Open Collector
24 V max (pull up)
5 mA (sinking)
Specification
Logic "0" (no fault)
Logic "1" (over-temperature fault)
∼100 Ω
∼10 K
Specification
5 V ±5%
250 mA (typical)
Sinusoidal Type (Incremental Encoder): 
Analog: SIN+, SIN-, COS+, COS-, 1V 
l
Digital (RS422): MRK+, MRK- signals.
l
Digital Output (Incremental Encoder): TTL Encoder line-driver signals; RS422/485
compatible
Serial Output (Absolute Encoder): EnDat 2.2 with 36 bit word
Fundamental Signal Period
.
pk-pk
20 micron
20 micron
20 micron
20 micron
20 micron
4 micron
4 micron
Hardware Manual
Resolution
5 nm
1.25 nm
5 nm
(1)
5 nm
(1)
1.25 nm
1 nm
0.25 nm
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