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Lifting Systems
ANT130LZ Series
Hardware manual
Table Of Contents - Aerotech ANT130LZ Series Hardware Manual
Single-axis z direct-drive nanopositioning stage
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Hardware manual
(40 pages)
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Contents
Table of Contents
Troubleshooting
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Table of Contents
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Hardware Manual
Table of Contents
ANT130LZ Series Single-Axis Z Direct-Drive Nanopositioning Stage
Table of Contents
List of Figures
List of Tables
EU Declaration of Incorporation
UKCA Declaration of Incorporation
Safety Procedures and Warnings
Installation and Operation
Electrical Warnings
Motor-Related Warnings
Pinch Points
Magnetic Hazards
Handling and Storage
Chapter 1: Overview
1.1. Environmental Specifications
1.2. Accuracy and Temperature Effects
1.3. Basic Specifications
1.4. Air Requirements
Chapter 2: Installation
2.1. Dimensions
2.2. Securing the Stage to the Mounting Surface
2.2.1. Setting up the Pneumatic Counterbalance
2.3. Attaching the Payload to the Stage
Chapter 3: Electrical Installation
3.1. Motor and Feedback Connectors
3.2. Motor and Feedback Wiring
3.3. Motor and Feedback Specifications
3.4. Limits, Marker, and Machine Direction
3.5. Motor and Feedback Phasing
Chapter 4: Maintenance
4.1. Service and Inspection Schedule
4.2. Cleaning and Lubrication
4.3. Counterbalance Maintenance
4.4. Troubleshooting
Appendix A: Warranty and Field Service
Appendix B: Revision History
Index
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ANT130LZ
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This manual is also suitable for:
Ant130lz-035
Ant130lz-060
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