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Aerotech Manuals
Lifting Systems
ANT130LZ Series
Hardware manual
List Of Tables - Aerotech ANT130LZ Series Hardware Manual
Single-axis z direct-drive nanopositioning stage
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Hardware manual
(40 pages)
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Contents
Table of Contents
Troubleshooting
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Table of Contents
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Hardware Manual
List of Tables
Table 1-1:
Model Numbers and Ordering Options
Table 1-2:
Environmental Specifications
Table 1-3:
ANT130LZ Series Specifications
Table 2-1:
Stage Mounting Surface Flatness Requirement
Table 2-2:
Stage to Mounting Surface Hardware
Table 2-3:
Payload Mounting Surface Flatness Requirement
Table 2-4:
Payload to Stage Surface Hardware
Table 3-1:
25-Pin Motor and Feedback Connector Pinout (-CN1)
Table 3-2:
25-Pin Mating Connector Part Numbers
Table 3-3:
4-Pin Motor Connector Pinout (-CN2 Option)
Table 3-4:
4-Pin Motor Mating Connector Part Numbers
Table 3-5:
25-Pin Feedback Connector Pinout (-CN2 Option)
Table 3-6:
25-Pin Feedback Mating Connector Part Numbers
Table 3-7:
Hall-Effect Sensor Specifications
Table 3-8:
Thermistor Specifications
Table 3-9:
Encoder Specifications
Table 3-10:
Encoder Resolution
Table 3-11:
Limit Switch Specifications
Table 3-12:
ANT130LZ Motor Specifications
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ANT130LZ
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Table of Contents
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This manual is also suitable for:
Ant130lz-035
Ant130lz-060
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