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Lifting Systems
ANT130LZ Series
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Air Requirements; Figure 1-2: Counterbalance Air Flow Vs. Counterbalance Pressure; Figure 1-3: Air Inlet Location - Aerotech ANT130LZ Series Hardware Manual
Single-axis z direct-drive nanopositioning stage
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ANT130LZ
1.4. Air Requirements
The air supply to the counterbalance should be clean and liquid water should not be present.
If nitrogen is used, it must be 99.99% pure and filtered to 0.25 microns. [Recommended]
l
If compressed air is used, it must be filtered to 0.25 microns, dry to 0º F dew point, and oil free.
l
The maximum allowable input pressure specification is 0.6 MPa (87 psi).
The low friction air cylinder consumes air as described in
Figure 1-2:
Counterbalance Air Flow vs. Counterbalance Pressure
Figure 1-3:
Air Inlet Location
20
Figure
1-2.
Hardware Manual
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Ant130lz-035
Ant130lz-060
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