Secondary Control Block - Fuji Electric CC-M Instruction Manual

13.2.2 Secondary control block

41
RM2SPV
CUT
Alarm
Filter
PV
PV
TRACK
Limiter
SCC
RSV
SCC
-CMD
GAP
KnL
U/D
Limiter
SCC-SV
44
RM2MVO
Foult
MV
SCC-CMD
"M"
MV
"HMV"
HOLD
EX-MV
SCC-MV
MVA
EX-CMD
MV read back
value
INP-TN1PDA3-E
42
RM2PID
PV
D
Derivative
+
+
SV
I
Integral
+
DV
+
P
Proportional
RSV-PV
Position
type
48
RM2FFD
MV
K F ( I N — B 1 F ) + B 2 F
IN
Feedforward element
To wafer 43
INH
43
RM2ITG
∆MV
+
∆MV
+
PID
+ +
∆MV
Normal/
reverse
PI
selection
MV
MV Normal/
reverse
MV output
D
selection
not—A
MV
(D)
Feedforward element
40
RM2BSC
OUT
PV
41
Secondary Secondary
PID-1 PID-2
RSV
43
Secondary Secondary
U/D
PID-3 PID-4
Change
MV
ratio limiter
∆MV
+
MV
—
For current
output
PV
42
SV
MV
44
DV
13 - 5