Brooks GF Series Supplemental Manual
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Brooks GF Series Supplemental Manual

Ethercat mass flow controllers and meters
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Installation and Operation Manual
X-DPT-EtherCAT-GF1XX-MFC-eng
Part Number: 541B219AAG
April, 2017
Supplemental Manual for
®
®
Brooks
EtherCAT
Mass Flow Controllers
and Meters
GF Series

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  • Page 1 Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG April, 2017 Supplemental Manual for ® ® Brooks EtherCAT Mass Flow Controllers and Meters GF Series...
  • Page 2 Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG April, 2017 Brooks EtherCAT MFCs...
  • Page 3 EtherCAT® thermal mass flow controllers and meters. Should you require any additional information concerning the EtherCAT thermal mass flow controllers and meters, please feel free to contact your local Brooks Sales and Service Office; see back cover for contact information, or visit us on the web at www.BrooksInstrument.com. We appreciate this opportunity to service your fluid measurement and control requirements, and trust that we will be able to provide you with further assistance in the future.
  • Page 4 Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG Brooks EtherCAT MFCs April, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...

  • Page 5: Table Of Contents

    Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG Brooks EtherCAT MFCs April, 2017 Contents 1. General Information ..........................9 1.1. Introduction ..........................9 1.2. Definition of Terms ........................10 1.3. Numbers ..........................10 2. Quick Start .............................. 11 2.1. Master Hardware ........................11 2.2.
  • Page 6 Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG Brooks EtherCAT MFCs April, 2017 4.1. Error and Warning Condition Descriptions ................44 4.1.1. Non-Volatile Memory Failures (Display Codes 1,2,3) ..........45 4.1.2. Network Interface Failure (Display Code 4) ............45 4.1.3. Selected Calibration Invalid (Display Code 5) ............45 4.1.4.
  • Page 7 Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG Brooks EtherCAT MFCs April, 2017 Tables Table 1-1 – Definition of Terms ........................10 Table 2-1 – RUN Indicator States ........................ 14 Table 2-2 – ERROR Indicator States ......................14 Table 2-3 – Display Code Summary ......................15 Table 3-1 –...
  • Page 8 Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG Brooks EtherCAT MFCs April, 2017 Figures Figure 2-1 – Top View of GF EtherCAT Device ..................12 Figure 2-2 – M8 Power Connector Location ....................13 Figure 2-3 – M8 Power Connector Drawing ....................13 Figure 5-1 –...

  • Page 9: General Information

    Brooks Instrument now introduces the EtherCAT® interface on its GF Series platform. This manual is a supplement to the Brooks GF Series installation and operation manual. It is assumed that the owner of this EtherCAT mass flow controller or meter is thoroughly familiar with the theory and operation of this device.

  • Page 10: Definition Of Terms

    Section 1 - General Information Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG Brooks EtherCAT MFCs April, 2017 1.2. Definition of Terms Table 1-1 – Definition of Terms Abbreviation Description Common Device Profile CAN Application Protocol over EtherCAT EtherCAT Slave Controller...

  • Page 11: Quick Start

    PDO and mailbox data communication. Both types of data communication modes are supported by the Brooks GF EtherCAT device. Brooks® GF Series Mass Flow Controllers and Meters conform to the ETG.5003 Semiconductor Device Profile specification. This specification consists of two parts:...

  • Page 12: Physical Interfaces

    Section 2 - Quick Start Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG April, 2017 Brooks EtherCAT MFCs 2.2. Physical Interfaces The available physical interfaces on the EtherCAT device are listed below. Refer to the GF100 Series Installation and Operation Manual for more details.

  • Page 13: Leds

    Section 2 - Quick Start Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG April, 2017 Brooks EtherCAT MFCs Figure 2-2 – M8 Power Connector Location Figure 2-3 – M8 Power Connector Drawing Pin 1: +24V Pin 3: Power Common 2.2.2. LEDs The POWER LED indicates that the device is supplied sufficiently with power.

  • Page 14: Table 2-1 - Run Indicator States

    Section 2 - Quick Start Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG April, 2017 Brooks EtherCAT MFCs Table 2-1 – RUN Indicator States Indicator States Slave State Description INITIALIZATION The device is in state INIT Blinking PRE-OPERATIONAL The device is in state PRE-OPERATIONAL...

  • Page 15: Exceptions Display Codes And Reporting

    Section 2 - Quick Start Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG April, 2017 Brooks EtherCAT MFCs Flickering Booting Error Booting Error was detected. Checksum error in Application INIT state reached, but Error controller flash memory. Indicator bit is set to 1 in AL...
  • Page 16 Section 2 - Quick Start Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG April, 2017 Brooks EtherCAT MFCs High Process Flow Out of Range 0x00000002 Error Manufacturer Error Pressure Sensor Error 0x00400000 Error Manufacturer Error Process Pressure Out of 0x00000004...

  • Page 17: Slave Configuration

    (ESI, device description in XML format) and/or the EEPROM, master applications are able to configure the EtherCAT network. For the EtherCAT network configuration of the GF Series devices, ESI files are provided on the Brooks website or contact Brooks Technical Support for more info.

  • Page 18: Process Data Object (Pdo) Mapping

    Inputs. During network configuration, the user must configure the data to be exchanged. The Brooks GF1xx Series devices provide a default and a flexible PDO Mapping object for each of the RxPDO and the TxPDO. The user may select either the default or the flexible PDO Mapping, or both by using the PDO Assignment objects 0x1C12 and 0x1C13.

  • Page 19: Txpdo Mapping

    COE Mailbox. 3.2.2. TxPDO Mapping The Brooks GF1xx Series device supports one preconfigured, default TxPDO at 0x1A00 and one user configurable TxPDO at 0x1A01. The default TxPDO for each device profile are defined in the tables below: Table 3-4 –...

  • Page 20: Table 3-5 - Default Txpdo (Mfc Profile)

    Section 3 – Slave Information Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG April, 2017 Brooks EtherCAT MFCs 0x1Ann 0x01 0xF380 0x00 Active Exception Status 0x02 0x6000 0x01 Flow Reading [REAL] 0x03 0x6001 0x01 Pressure Reading [REAL] 0x04 0x6002 0x01...

  • Page 21: Communication Specific Data

    Section 3 - Slave Configuration Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG April, 2017 Brooks EtherCAT MFCs  None 3.3. Communication Specific Data Table 3-8 – Communication Specific Data Index Data Type Access Name Description Index 0x1000 UDINT Device Type 5003.

  • Page 22: Manufacturer Specific Data

    Section 3 – Slave Information Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG April, 2017 Brooks EtherCAT MFCs 0x1A01 Flexible TxPDO Map See Section 3.2 0x1C00 USINT Communication Type Sync Manager 0x01 Communication 0: unused Type Sync Manager 1: mailbox receive...

  • Page 23: Manufacturer Specific Inputs

    Section 3 - Slave Configuration Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG April, 2017 Brooks EtherCAT MFCs 3.4.1. Manufacturer Specific Inputs Table 3-9 – Manufacturer Specific Inputs Index Data Access Name Description Device Profile(s) Index Type Supported 0x2000 USINT...

  • Page 24: Sdp Device Type Specific Data

    Section 3 – Slave Information Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG April, 2017 Brooks EtherCAT MFCs Manufacturer the reporting of Manufacturer Errors Errors on the display per Table 2-3. 0x04 UDINT Display Mask, A Bitmask to Enable/Disable Manufacturer...

  • Page 25: Output Data

    Section 3 - Slave Configuration Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG April, 2017 Brooks EtherCAT MFCs TxPDO Reading Units: COUNTS(-32768 to +32767, 24576=100%FS) 0x6006 Sensor: EMFC, EMFM Temperature (integer) 0x01 Temperature Current Temperature Reading EMFC, EMFM TxPDO Reading...

  • Page 26: Configuration Data

    Section 3 – Slave Information Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG April, 2017 Brooks EtherCAT MFCs mapped in PDO, the "Flow SP [REAL]" shall be excluded from PDO mapping. Units: COUNTS(-32768 to +32767, 24576=100%FS) 0x7008 Controller: MFC, EMFC...

  • Page 27: Information Data

    Section 3 - Slave Configuration Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG April, 2017 Brooks EtherCAT MFCs Pa= 0x00220000 This value is non-volatile 0x8002 Sensor: EMFC, EMFM Temperature (floating) 0x01 UDINT Temperature Data Unit for Temperature EMFC, EMFM Data Unit Reading (Ref.
  • Page 28 Section 3 – Slave Information Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG April, 2017 Brooks EtherCAT MFCs Offset Offset service command executed. Units %FS 0x9001 Sensor: Pressure EMFC, EMFM (floating) 0x01 REAL Pressure Sensor Full Units: Per Pressure Data...

  • Page 29: Semi Device Profile Area

    Section 3 - Slave Configuration Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG April, 2017 Brooks EtherCAT MFCs in sub index 02 Units: SCCM 0x08 REAL Minimum Flow SP Manufacturer Defined, for this Gas and Bin with Configured Full Scale...

  • Page 30: Value Range Setting

    Section 3 – Slave Information Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG April, 2017 Brooks EtherCAT MFCs consecutive modules (for ETG.5003 = 0x10), e.g. 0x7000, 0x7010 0x02 UNIT Maximum Number of Up to 255 modules are possible. A device Modules can support less than this.
  • Page 31 Section 3 - Slave Configuration Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG April, 2017 Brooks EtherCAT MFCs Details 0xF383 0x01 UDINT Active Expanded details of the SDP TxPDO Device Error specific device error exceptions Details Bit 0 - Temperature High - Alarm Bit 1 - Temperature Low –...

  • Page 32: Manufacturer Specific Device Data

    Section 3 – Slave Information Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG April, 2017 Brooks EtherCAT MFCs Warning corresponding device warning Mask exception bits (as defined in the device warning details) in the active and latched exception status objects (0xF380 bit 0 and 0xF390 bit 0), if the corresponding bit is TRUE.

  • Page 33: Sdp And Cdp Device Specific Inputs

    Section 3 - Slave Configuration Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG April, 2017 Brooks EtherCAT MFCs 0xF500 STRING(n) Manufacturer Model Number 0xF501 STRING(n) Product Device Configuration 0xF502 USINT Diagnostics Reserved for future EMFC 0x01 REAL Diagnostics Zero Reserved for future...
  • Page 34 Section 3 – Slave Information Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG April, 2017 Brooks EtherCAT MFCs 0xF9F0 STRING(n) Manufacturer A string representing the manufacturer’s serial Serial Number number for the device. Note: This may have the same value as 0x1018:04.

  • Page 35: Sdp And Cdp Command Objects

    Section 3 - Slave Configuration Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG April, 2017 Brooks EtherCAT MFCs 3.11. SDP and CDP Command Objects Table 3-20 – SDP and CDP Command Objects Index Data Access Name Description Device Index Type...
  • Page 36 Section 3 – Slave Information Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG April, 2017 Brooks EtherCAT MFCs Index Data Access Name Description Device Index Type Profile(s) Supported BYTE 0x02 USINT Status Supported values: EMFC, 0: last command completed, no...
  • Page 37 Section 3 - Slave Configuration Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG April, 2017 Brooks EtherCAT MFCs Index Data Access Name Description Device Index Type Profile(s) Supported power cycle. This includes an ESC reset. Some devices may require this reset to maintain a specific...
  • Page 38 Section 3 – Slave Information Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG April, 2017 Brooks EtherCAT MFCs Index Data Access Name Description Device Index Type Profile(s) Supported sequence is sent. Byte 0: 0x74 Byte 1: 0x65 Byte 2: 0x73...
  • Page 39 Section 3 - Slave Configuration Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG April, 2017 Brooks EtherCAT MFCs Index Data Access Name Description Device Index Type Profile(s) Supported 100-200: indicates how much of the command has been executed (in %, 100 = 0%, 200 = 100%) 201-254: Reserved;...
  • Page 40 Section 3 – Slave Information Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG April, 2017 Brooks EtherCAT MFCs Index Data Access Name Description Device Index Type Profile(s) Supported Command volatile memory. If a device automatically saves all non-volatile parameters at the time they are written, this command will not take any action.

  • Page 41: Exceptions Implementation

    Manufacturer Warnings is specified by the manufacturer for each device type. EtherCAT defines objects to report Exception information and objects to control the reporting of exceptions as shown in Table 4-1. In addition, the Brooks MFC defines 1 additional object to control the display of active errors and warnings.

  • Page 42: Table 4-1 - Objects For Reporting And Controlling Exceptions

    X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG April, 2017 Brooks EtherCAT MFCs Each error and warning condition can be enabled/disabled using the Mask objects 0xF3A1, 0xF3A2, 0xF3A3, and 0xF3A4. A set bit in the mask enables the error or warning. See Table 4-2, Table 4-3, and Table 4-4 for the appropriate mask object and bit for each error or warning condition.

  • Page 43: Table 4-2 - Device Errors

    Section 4 - Exceptions Implementation Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG April, 2017 Brooks EtherCAT MFCs Data Index Index Type Access Name Description 0xF3A3 0x01 UDINT Device Error Mask A Bitmask to Enable/Disable the reporting of Manufacturer Warnings per Table 4-2. A bit defined as a 1 enables the corresponding exception.

  • Page 44: Error And Warning Condition Descriptions

    Section 4 - Exceptions Implementation Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG April, 2017 Brooks EtherCAT MFCs Display Condition Detected Reported As Severity Exception Type Code Hardware Incompatibility 0x00000800 Failure Manufacturer Error Sensor Failure (also reported 0x80000000 Failure Manufacturer Error...

  • Page 45: Non-Volatile Memory Failures (Display Codes 1,2,3)

    This condition is reported when the device detects the calibration linearization table stored in the selected gas page is not valid. This should never occur if this table is created by Brooks Instrument supplied calibration tool. 4.1.4. Identity Information Mismatch (Display Code 6) This condition is reported when the product and revision code do not match the firmware SII.

  • Page 46: Hardware Incompatibility (Display Code 7)

    4.1.5. Hardware Incompatibility (Display Code 7) This condition is reported when there is a hardware/firmware incompatibility detected. Contact Brooks Technical Support for more information. 4.1.6. Flow Sensor Failure & Error (Display Code 10 and 110) This condition is reported when the device detects failures of the flow sensor and/or related electronics, connector, or cable.

  • Page 47: Pressure Sensor Error (Display Code 120)

    Section 4 - Exceptions Implementation Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG April, 2017 Brooks EtherCAT MFCs 0x02 Real Alarm Threshold Low Specified in Flow Units -10% FS (0x8000:01) 0x03 Real Alarm Settling Time milliseconds 0 ms 4.1.10. Pressure Sensor Error (Display Code 120) This condition is reported when the device detects a failure of the pressure sensor and/or related electronics.

  • Page 48: Temperature Out Of Range (Display Codes 135 And 136)

    Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG April, 2017 Brooks EtherCAT MFCs Note: This condition is reported as both Sensor Failure and Temperature Sensor Error. 4.1.13. Temperature Out of Range (Display Codes 135 and 136) This condition is reported when the measured temperature (0x6002:01) is out of the device allowable limits.

  • Page 49: Temperature Stability (Display Code 230)

    Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG April, 2017 Brooks EtherCAT MFCs 4.1.16. Temperature Stability (Display Code 230) The temperature stability calculation is performed. This alert will not occur when the Warm-up is active. 4.1.17. Mounting Orientation Alert (Display Code 251)

  • Page 50: Device Id Switch Changed Alert (No Display Code)

    X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG April, 2017 Brooks EtherCAT MFCs 4.1.21. Device ID Switch Changed Alert (No Display Code) This condition is reported when the device EtherCAT address rotary switches have been changed and do not represent the address last reported to the Master.

  • Page 51: Appendix

    Section 5- Appendix Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG April, 2017 Brooks EtherCAT MFCs 5. Appendix 5.1. Ramping Feature Setting the Ramp Time (0x7008) to a valid non-zero value activates the Ramping Feature. A valid Ramp Time is a time that is within the limits specified by 0x9008:01, Min Ramp Time and 0x8008:01, Max Ramp Time.

  • Page 52: Figure 5-1 - Ramping Feature

    If a setpoint of zero is received, the device will immediately act on the zero setpoint and stop flow without ramping. Note: Ramping to zero can be enabled by special order. Contact Brooks Technical Support for more information. The Ramp feature can be monitored using the following:...
  • Page 53 X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG April, 2017 Brooks EtherCAT MFCs 0x600F:03 – Ramp Active is set when the device is ramping from one setpoint to another. The bit is cleared when the ramp is complete. 0xF383 bit 5 – Active Device Error Details, Ramp Data is set when an invalid Ramp Time is received.
  • Page 54 Installation and Operation Manual X-DPT-EtherCAT-GF1XX-MFC-eng Part Number: 541B219AAG Brooks EtherCAT MFCs April, 2017...

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