Brooks SLAMf50 Installation And Operation Manual
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Brooks SLAMf50 Installation And Operation Manual

Mass flow controllers and mass flow meters
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Installation and Operation Manual
X-TMF-SLAMf-MFC-eng
Part Number: 541B032AAG
August, 2009
®
Brooks
Models SLAMf50, SLAMf51, SLAMf53
Mass Flow Controllers and Models SLAMf60,
SLAMf61, SLAMf63 Mass Flow Meters
®
Brooks
Industrial Digital Series MFC's and MFM's
Model SLAMf50S
Analog I/O MFC
with RS-485
®
Brooks
Digital MFC's and MFM's
Model SLAMf50F
Digital I/O
F
®
Fieldbus MFC
OUNDATION
Model SLAMf53D
Digital I/O
TM
DeviceNet
MFC

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  • Page 1 ® Brooks Industrial Digital Series MFC's and MFM's Brooks Digital MFC's and MFM's August, 2009 ® Brooks Models SLAMf50, SLAMf51, SLAMf53 Mass Flow Controllers and Models SLAMf60, SLAMf61, SLAMf63 Mass Flow Meters Model SLAMf50F Digital I/O ® Fieldbus MFC OUNDATION...
  • Page 2 Essential Instructions Read this page before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they continue to operate within their normal specifications.
  • Page 3 We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more.
  • Page 4 Installation and Operation Manual X-TMF-SLAMf-MFC-eng Part Number: 541B032AAG ® Brooks Digital MFC's and MFM's August, 2009 THIS PAGE WAS INTENTIONALLY LEFT BLANK...

  • Page 5: Table Of Contents

    Contents Installation and Operation Manual X-TMF-SLAMf-MFC-eng Part Number: 541B032AAG ® Brooks Digital MFC's & MFM's August, 2009 Page Number Section 1 Introduction Scope ............................1-1 Purpose ............................1-1 Description ..........................1-1 Specifications ..........................1-2 Section 2 Installation General ............................2-1 Receipt of Equipment .........................
  • Page 6 Number Open Collector Alarm Output..................... 1-6 General Wiring ........................... 1-6 Response Performance of Brooks Digital MFC ................. 1-7 Linear Ramp-up or Ramp-down from 200% per Second to 0.5% per Second Setpoint Change ..1-8 Analog, DeviceNet and F Fieldbus Terminal Layouts ..........1-12 OUNDATION Model SLAMf50D Digital I/O DeviceNet MFC ................

  • Page 7: Section 1 Introduction

    The SLAMf Series covers an extremely broad range of flowrates. Model SLAMf50 can have a full scale flow as low as 3 ccm. With a high turndown ratio of 50:1, accurate gas flow can be measured or controlled down to 0.06 ccm! Model SLAMf53 can meter or control gas flow up to 2500 lpm.

  • Page 8: Specifications

    Brooks ® offers traditional 0-5 volt and 4-20mA analog options as well as RS-485 digital communications (“S-protocol”, based on HART). Brooks also offers control interface via digital network protocols like DeviceNet, a high- ® speed (up to 500k baud) digital communication network, or FOUNDATION Fieldbus.
  • Page 9 Pressure Ratings Flow Ranges N2 Equivalent P.E.D. Module H Category Controller Meter Model: Model: Min. FS Max. FS Unit Bar/psi SLAMF50 (1) SLAMF60 0.003 100bar/1500psi SLAMF51 SLAMF61 100bar/1500psi(3) SLAMF53 SLAMF63 2500 70bar/1000psi 1 for all 150lbs flanges 2 for all other connections...
  • Page 10 Section 1 - Introduction Installation and Operation Manual X-TMF-SLAMf-MFC-eng Part Number: 541B032AAG ® Brooks Digital MFC's and MFM's August, 2009 PHYSICAL: Materials of Construction ® Wetted parts - stainless steel with Viton fluoroelastomers or Buna-N ® ® Optional: Kalrez , Teflon...
  • Page 11 Section 1 - Introduction Installation and Operation Manual X-TMF-SLAMf-MFC-eng Part Number: 541B032AAG ® Brooks Digital MFC's and MFM's August, 2009 Command/Setpoint Input (Analog I/O capabilities) Voltage and Current type inputs (but not both simultaneously) are supported. Setpoint input types are software selectable as follows:...

  • Page 12: Open Collector Alarm Output

    Section 1 - Introduction Installation and Operation Manual X-TMF-SLAMf-MFC-eng Part Number: 541B032AAG ® Brooks Digital MFC's and MFM's August, 2009 Valve Override Signal Specifications (Analog I/O Versions only) Input Impedence: 800 kΩ Absolute Max. Input: -25 Vdc > VOR > 25 Vdc...

  • Page 13: Response Performance Of Brooks Digital Mfc

    Brooks devices also feature adaptive (optimized) PID control, including fast response. and linear ramp-up and/or ramp-down control characteristics. Calibration Selection Signal (Analog I/O versions only) Select one of ten gases and select PID tuning settings in analog mode.
  • Page 14 Section 1 - Introduction Installation and Operation Manual X-TMF-SLAMf-MFC-eng Part Number: 541B032AAG ® Brooks Digital MFC's and MFM's August, 2009 Figure 1-4 Linear Ramp-up and/or Ramp-down from 200% Per Second Down to 0.5 % Per Second Setpoint Change Table 1-2 Calibration Select Signal...
  • Page 15 The Brooks SLAMf Digital Series is equipped with RS-485 communication capability. This form of multi-drop capable communication provides access to many of the Brooks Smart II Digital Series functions for "control and monitor" operations, including: • Accurate setpoint adjustment flow output measurement (including units of measure selection) •...
  • Page 16 Brooks Digital MFC's and MFM's August, 2009 ® Fieldbus Communications: OUNDATION ® The Brooks SLAMf Digital Series is supporting F Fieldbus OUNDATION ® communication protocol. F Fieldbus is a digital network allowing OUNDATION usage of existing 4-20mA cables, avoiding costly re-wiring. Fully certified by passing ITK, this device has passed several Interoperability requirements over a broad range of hosts.
  • Page 17 Section 1 - Introduction Installation and Operation Manual X-TMF-SLAMf-MFC-eng Part Number: 541B032AAG ® Brooks Digital MFC's and MFM's August, 2009 Certifications: EMC Directive 89/336/EEC: Per EN 61326 Enclosure: Type 4X / IP66 Ambient Temperature: 0 F > Tamb < 150 F, (0 C >...

  • Page 18: Analog, Devicenet And F

    August, 2009 PC-based Support Tools Brooks Instrument offers a variety of PC-based process control and service tools to meet the needs of our customers. Smart DDE may be used with any unit supporting RS-485 in a multidrop configuration, thus allowing users to control and monitor their Brooks devices.

  • Page 19: Model Slamf50D Digital I/O Devicenet Mfc

    Section 1 - Introduction Installation and Operation Manual X-TMF-SLAMf-MFC-eng Part Number: 541B032AAG ® Brooks Digital MFC's and MFM's August, 2009 Figure 1-6 Model SLAMf50D Digital I/O DeviceNet MFC Figure 1-7 Model SLAMf50F Digital I/O F Fieldbus MFC OUNDATION 1-13...

  • Page 20: Model Slamf51 With Cable Gland (Pg11, M20 X 1.5, 1/2" Npt)

    Installation and Operation Manual X-TMF-SLAMf-MFC-eng Part Number: 541B032AAG ® Brooks Digital MFC's and MFM's August, 2009 Figure 1-8 Model SLAMf51 with Cable Gland (PG11, M20 x 1.5, 1/2" NPT) Figure 1-9 Model SLAMf53 with Cable Gland (PG11, M20 x 1.5, 1/2" NPT)

  • Page 21: Model Slamf60 With Cable Gland (Pg11, M20 X 1.5, 1/2" Npt)

    Installation and Operation Manual X-TMF-SLAMf-MFC-eng Part Number: 541B032AAG ® Brooks Digital MFC's and MFM's August, 2009 Figure 1-10 Model SLAMf60 with Cable Gland (PG11, M20 x 1.5, 1/2" NPT) Figure 1-11 Model SLAMf61 with Cable Gland (PG11, M20 x 1.5, 1/2" NPT)

  • Page 22: Model Slamf63 With Cable Gland (Pg11, M20 X 1.5, 1/2" Npt)

    Installation and Operation Manual X-TMF-SLAMf-MFC-eng Part Number: 541B032AAG ® Brooks Digital MFC's and MFM's August, 2009 Figure 1-12 Model SLAMf63 with Cable Gland (PG11, M20 x 1.5, 1/2" NPT) Figure 1-13 Model SLAMf63 with Cable Gland (PG11, M20 x 1.5, 1/2" NPT) with Flanged Connections...

  • Page 23: Section 2 Installation

    Part Number: 541B032AAG ® Brooks Digital MFC's and MFM's August, 2009 2-1 General This section provides installation instructions for the Brooks ® SLAMf Digital Series. Section 1, Figures 1-5 thru 1-12 show the dimensions and electrical connections. 2-2 Receipt of Equipment When the instrument is received, the outside packing case should be checked for damage incurred during shipment.

  • Page 24: Return Shipment

    Digital MFC's and MFM's August, 2009 2-4 Return Shipment Prior to returning any instrument to the factory, contact your nearest Brooks location for a Return Materials Authorization Number (RMA#). This can be obtained from one of the following locations: Brooks Instrument 407 W.

  • Page 25: In-Line Filter

    Note: Brooks provides many filter options. For those not listed here, please consult factory. 2-9 Installation Recommended installation procedures: a. The Brooks Smart II Digital MFC or MFM should be located in a clean, dry atmosphere relatively free from shock and vibration. b. Leave sufficient room for access to Self-zero function push-button.
  • Page 26 Special considerations to be taken when installing the SLAMf53 MFC: The Model SLAMf53 has a valve design that is different from standard low flow Brooks TMFC’s. The SLAMf53 consists of a dual stage, pilot operated valve. The pilot valve (located on top of the MFC) controls a differential pressure across the main valve which, in turn controls the flow through the device.

  • Page 27: Electrical Interface

    MFC and MFM includes +13.5 - 27 Vdc, supply common, and a setpoint signal. The Brooks Digital electrical interface is designed to facilitate low-loss, quiet signal connections. Separate returns (commons) are supplied for the analog setpoint, analog flow signal, and the power supply.

  • Page 28: Common Electrical Hookups, Voltage I/O Version

    BLK/WHT Calibration Select , Input RS-485 , Common B (-) RS-485, Common A (+) * Brooks Read Out Models 0151, 0152, 0154, 0254 Figure 2-1 Analog I/O Pin Connections, Top View Uncovered Figure 2-2 Common Electrical Hookups, Voltage I/O Version...
  • Page 29 Installation and Operation Manual X-TMF-SLAMf-MFC-eng Part Number: 541B032AAG ® Brooks Digital MFC's and MFM's August, 2009 Figure 2-3 Recommended I/O Wiring Configuration for Current Signals (Non-Isolated Power Supply) Figure 2-4 Recommended I/O Wiring Configuration for Current Signals (Isolated Power Supply)

  • Page 30: Operation Check Procedure (Analog I/O)

    Section 2 - Installation Installation and Operation Manual X-TMF-SLAMf-MFC-eng Part Number: 541B032AAG ® Brooks Digital MFC's and MFM's August, 2009 2-11 Operation Check Procedure a. Mount the MFC/MFM in its final orientation. b. Apply power to the MFC/MFM and allow approximately 45 minutes for the instrument to completely warm up and stabilize its temperature.

  • Page 31: Digital I/O: Devicenet Or Foundation Fieldbus

    PRODUCED from the device (MFC) as an INPUT into the network or the data is being CONSUMED by the device (MFC) is an OUTPUT from the network). The Brooks MFC supports 12 instances of Input Assemblies and 4 instances of Output Assemblies.
  • Page 32 Section 2 - Installation Installation and Operation Manual X-TMF-SLAMf-MFC-eng Part Number: 541B032AAG ® Brooks Digital MFC's and MFM's August, 2009 THIS PAGE WAS INTENTIONALLY LEFT BLANK 2-10...

  • Page 33: Section 3 Operation

    Section 3 Operation Installation and Operation Manual X-TMF-SLAMf-MFC-eng Part Number: 541B032AAG ® Brooks Digital MFC's and MFM's August, 2009 3-1 Operating Procedure After the flowmeter has been properly installed in the process, it is ready for operation. When initiating flow, slowly open the valve to avoid a flow surge.

  • Page 34: Features

    Digital performs much like a traditional analog MFC, but with improved accuracy, step response and valve control. The analog interface matches that of Brooks' popular analog MFCs so it can be retrofitted into tools using analog MFCs. Other versions of the SLAMf Series can provide a variety of digital protocols, for example DeviceNet and RS-485.

  • Page 35: Analog I/O Mode Of Operation

    Digital MFC's and MFM's August, 2009 3-4 Analog I/O Mode of Operation The following paragraphs describe the basic features of the Brooks SLAMf Digital Series Mass Flow Meters/Controllers. NOTE: Read Section 3-3, Features, before reading this section. See DeviceNet Supplemental Instruction Manual for specific details on communication features.

  • Page 36: Flow Sensor Operational Diagram

    Section 3 Operation Installation and Operation Manual X-TMF-SLAMf-MFC-eng Part Number: 541B032AAG ® Brooks Digital MFC's and MFM's August, 2009 Figure 3-1 Flow Sensor Operational Diagram (VCR End Connections Shown) Figure 3-2 Externally Accessible Adjustment for all Meters/Controllers.
  • Page 37 Section 3 Operation Installation and Operation Manual X-TMF-SLAMf-MFC-eng Part Number: 541B032AAG ® Brooks Digital MFC's and MFM's August, 2009 Several flow signal types are available: Valve Override (MFC Only) Connector Pin 12 on the 15 pin D-Connector allows the valve to be forced to its most closed state or its most open state, regardless of setpoint.

  • Page 38: Communications Features

    3-5-2 DeviceNet Communications Features The Brooks SLAMf Digital Series is also available with DeviceNet communication capability. DeviceNet is an open digital protocol capable of high speeds and easy system connectivity. Brooks Instrument has several...

  • Page 39: Foundation Fieldbus Communications Features

    • Ultra-fast (8ms) PID function block for Cascade control (all devices) 3-6 Alarms and Warnings (Analog versions only) This section outlines alarms and warnings associated with the Analog versions of the Brooks SLAMf Digital Series. For information describing alarms and warnings for Brooks DeviceNet units, reference X-DPT-DeviceNet-Digital-MFC-eng, Part Number 541B066AHG.

  • Page 40: Alarms And Warnings (Analog Versions Only)

    Alarms and Warnings are a user configurable feature. This feature may be adjusted via the Service Port using a special software application available from Brooks. Reference the Brooks Service Suite User Manual for more information about the Service Port and Service Tool software applications.

  • Page 41: Diagnostic Alarms (Analog Versions Only)

    Section 3 Operation Installation and Operation Manual X-TMF-SLAMf-MFC-eng Part Number: 541B032AAG ® Brooks Digital MFC's and MFM's August, 2009 Alarm Summary The following table summarizes the parameters for each alarm type and the respective default values. Alarm Severity Alarm Latching Contact Low...

  • Page 42: General Alarms And Warnings (Analog Versions Only)

    Section 3 Operation Installation and Operation Manual X-TMF-SLAMf-MFC-eng Part Number: 541B032AAG ® Brooks Digital MFC's and MFM's August, 2009 Safe Mode When the Device is in Safe Mode, the following behavioral characteristics of the device apply: Flow Output Signal will be set to its defined Safe State for the following...
  • Page 43 Section 3 Operation Installation and Operation Manual X-TMF-SLAMf-MFC-eng Part Number: 541B032AAG ® Brooks Digital MFC's and MFM's August, 2009 User Power Supply Alarm The User Power Supply Alarm monitors the Power Input to the device for values outside the device specification of 13.5 to 27 Vdc. The user can configure the voltage limits that activate this alarm in order to monitor their supply voltage for a tighter specification than the device requires.

  • Page 44: Calibration/Configuration Sets

    Calibration and configuration data sets may be adjusted by an advanced user via the Service Port using a special software application available from Brooks. Reference the Brooks Service Suite User Manual for more information about the Service Port and Service Tool software applications.

  • Page 45: Low Setpoint Command Cutoff

    RS-485 in a multidrop configuration, thus allowing users to control and monitor their Brooks devices. The Brooks Service Suite (Analog I/ O versions only) may be used to monitor, diagnose, tune and calibrate Brooks devices. The Brooks Service Suite interfaces with Brooks products via a special service port.
  • Page 46 Section 3 Operation Installation and Operation Manual X-TMF-SLAMf-MFC-eng Part Number: 541B032AAG ® Brooks Digital MFC's and MFM's August, 2009 THIS PAGE WAS INTENTIONALLY LEFT BLANK 3-14...

  • Page 47: Section 4 Maintenance & Troubleshooting

    ® Brooks Digital MFC's and MFM's August, 2009 4-1 Maintenance and Troubleshooting No routine maintenance is required on the Brooks SLAMf Digital MFC's and MFM's. If an in-line filter is used, the filtering elements should be periodically replaced or cleaned.

  • Page 48: System Checks

    Bench Troubleshooting 1. Establish a proper connection between the Brooks SLAMf Digital Series Mass Flow Meter or Controller (using Figure 4-1 as a reference) Switch on the power and allow the instrument to warm-up for 45 minutes. In case of a Controller model, adjust the Setpoint to zero.

  • Page 49: Cleaning Procedures

    (pin 9) and verify that the output signal falls below 2%. 4-1-2 Cleaning Procedures When deposition makes it necessary to clean the Brooks SLAMf Digital Series Mass Flow Controller or Mass Flow Meter, use the following procedures: 1.

  • Page 50: Calibration Procedure

    Digital MFC's and MFM's August, 2009 4-1-3 Calibration Procedure The calibration of Brooks Digital Series Mass Flow devices is not described in this manual. Such calibration requires accurate and traceable calibration equipment in addition to digital communications. If your device needs calibration Brooks Instrument can provide this service at one of its service locations.

  • Page 51: Troubleshooting

    (regardless of Setpoint) and (Section 4-1-2). there is flow through the meter/controller Defective electronic board Contact Brooks Instrument Flow cannot be achieved Clogged Control Valve Clean the control valve (Section 4-1-2) or regardless of Setpoint. return the device to the factory...
  • Page 52 Section 4 Maintenance & Installation and Operation Manual X-TMF-SLAMf-MFC-eng Troubleshooting Part Number: 541B032AAG ® Brooks Digital MFC's and MFM's August, 2009 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
  • Page 53 CE mærkning af Masse Flow udstyr Dato : Januar-1996. Brooks Instrument har gennemført CE mærkning af elektronisk udstyr med succes, i henhold til regulativet om elektrisk støj (EMC direktivet 89/336/EEC). Der skal dog gøres opmærksom på benyttelsen af signalkabler i forbindelse med CE mærkede udstyr.
  • Page 54 Date : January-1996. The Brooks (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility (EMC directive 89/336/EEC). Special attention however is required when selecting the signal cable to be used with CE marked equipment.
  • Page 55 Janvier 1996. Messieurs, Les équipements Brooks (électriques/électroniques) portant le label CE ont été testés avec succès selon les règles de la Compatibilité Electromagnétique (directive CEM 89/336/EEC). Cependant, la plus grande attention doit être apportée en ce qui concerne la sélection du câble utilisé pour véhiculer le signal d’un appareil portant le label CE.
  • Page 56 E’ richiesta comunque una speciale attenzione nella scelta dei cavi di segnale da usarsi con la strumentazione soggetta a marchio Qualità dei cavi di segnale e dei relativi connettori: Brooks fornisce cavi di elevata qualità che soddisfano le specifiche richieste dalla certificazione CE. Se l’utente intende usare propri cavi, questi devono possedere una schermatura del 100%.
  • Page 57 Januar 1996 Til den det angår Brooks Instrument elektrisk og elektronisk utstyr påført CE-merket har gjennomgått og bestått prøver som beskrevet i EMC forskrift om elektromagnetisk immunitet, direktiv 89/336/EEC. For å opprettholde denne klassifisering er det av stor viktighet at riktig kabel velges for tilkobling av det måletekniske utstyret.
  • Page 58 Reference : CE certification of Mass Flow Equipment Date : January 1996 Brooks (elektriska / elektronik) utrustning, som är CE-märkt, har testats och godkänts enligt gällande regler för elektromagnetisk kompabilitet (EMC direktiv 89/336/EEC). Speciell hänsyn måste emellertid tas vid val av signalkabel som ska användas tillsammans med CE-märkt utrustning.
  • Page 59 Installation and Operation Manual X-TMF-SLAMf-MFC-eng Part Number: 541B032AAG ® Brooks Digital MFC's and MFM's August, 2009 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
  • Page 60 BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with outstanding service and support to back it up. We operate first class repair facilities located around the world to provide rapid response and support.

This manual is also suitable for:

Slamf51Slamf53Slamf60Slamf61Slamf63

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