Brooks SLA5850 Installation And Operation Manual
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Brooks SLA5850 Installation And Operation Manual

Sla5800 series elastomer sealed, digital, thermal mass flow meters and controllers
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Installation and Operation Manual
X-TMF-SLA5800-Series-RevB-MFC-eng
Part Number: 541B187AAG
January, 2017
®
Brooks
SLA5800 Series
Elastomer Sealed, Digital,
Thermal Mass Flow Meters and Controllers
Model SLA5850
with RS485 Communications
Model SLA5850
with Profibus
Model SLA5850
®
with DeviceNet
Communications
®
Brooks
Digital MFC's & MFM's
®
Communications
Model SLA5851
with EtherCAT
®
Communications

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Summary of Contents for Brooks SLA5850

  • Page 1 Part Number: 541B187AAG ® Brooks Digital MFC's & MFM's January, 2017 ® Brooks SLA5800 Series Elastomer Sealed, Digital, Thermal Mass Flow Meters and Controllers Model SLA5850 Model SLA5850 ® with RS485 Communications with Profibus Communications Model SLA5851 Model SLA5850 ® with EtherCAT ®...
  • Page 2 Read before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.
  • Page 3 We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more.
  • Page 4 Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG ® Brooks Digital MFC's & MFM's January, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...

  • Page 5: Table Of Contents

    Contents Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG Brooks ® Digital MFC's & MFM's January, 2017 Paragraph Page Number Number Section 1 Introduction Scope ............................1-1 Purpose ............................1-1 Description ..........................1-1 Specifications ..........................1-2 Section 2 Installation General ............................2-1 Receipt of Equipment .........................
  • Page 6 SLA5800 Series Profibus Connections and Pinouts ..............1-9 SLA5800 Series DeviceNet Connections and Pinouts .............. 1-10 SLA5800 Series EtherCAT Connections and Pinouts ............... 1-11 Dimensions - Model SLA5850, Thru-Flow, RS485 ..............1-12 Dimensions - Model SLA5850, Downport, RS485..............1-12 1-10 Dimensions - Model SLA5851, Thru-Flow, EtherCAT ...............

  • Page 7: Section 1 Introduction

    The SLA5800 Series covers an extremely broad range of flow rates. Model SLA5850 can have a full scale flow as low as 3 ccm. With a high turndown ratio of 100:1 for any full scale range from 1-50 lpm N2 equivalent and 50:1 turndown for all other flow rates, accurate gas flow can be measured or controlled down to 0.06 ccm! Model SLA5853 can monitor or control gas...

  • Page 8: Specifications

    SLA5800 Series provide for ultra fast response characteristics. Broad Array of Communication Options Brooks offers traditional 0-5 volt and 4-20mA analog options as well as RS485 digital communications (“S-protocol”, based on HART). Brooks also offers control interfaces via digital network protocols like DeviceNet, a high speed (up to 500k baud) digital communication network, Profibus and EtherCAT.
  • Page 9 Optional Model Model Model Model Min. F.S. Min. F.S. Max. F.S. Max. F.S. Standard Standard Optional Optional SLA5850 SLA5860 0.003 50 lpm 1500 psi/103 bar 4500 psi/310 bar SLA5851 SLA5861 200 lpm* 1500 psi/103 bar NA** SLA5853 SLA5863 2500 lpm...
  • Page 10 Section 1 Introduction Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG ® Brooks Digital MFC's & MFM's January, 2017 Table 1-2 SLA5800 Series Electrical Specifications Communication Protocol Communication Protocol Communication Protocol Communication Protocol Communication Protocol RS485 RS485 Profibus Profibus ® ® ® ® ®...
  • Page 11 Section 1 Introduction Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG ® Brooks Digital MFC's & MFM's January, 2017 Table 1-3 SLA5800 Series Certifications Applicable Mark Agency Certification Standard Details Class I, Div 2, Group A, B, C, D Class I, Zone 2, IIC T4 UL &...

  • Page 12: General Wiring

    Calibration Selection Select one of 6 calibrations via Brooks Expert Support Tool (BEST) or digital signal (See communications protocol for your digital coms). Analog devices can be switched via voltage signals to Pin 11 & 8 on Firmware Version 1.18 &...

  • Page 13: Response Performance Of Brooks Digital Mfc

    Linear ramp-up/ramp-down is adjustable at 200% per second down to 0.5% per second setpoint change. Figure 1-2 Response Performance of Brooks Digital MFC Figure 1-3 Linear Ramp-up and/or Ramp-down from 200% Per Second Down to 0.5 % Per Second Setpoint Change...

  • Page 14: Sla5800 Series Rs485 15-Pin Analog Connector And Pinouts

    Refer to Figure 1-4 (Analog I/O pin connections), that enables the device to communicate via a personal computer for process control. Baud rate selections for the Brooks Digital Series related to RS485 are: 1200, 2400, 4800, 9600, 19200 and 38400 baud and can be selected via the Brooks Expert Support Tool (BEST) .

  • Page 15: Sla5800 Series Profibus Connections And Pinouts

    Transducer Pressure Controllers only. Figure 1-5 SLA5800 Series Profibus Connections and Pinouts Profibus Communications The Brooks SLA5800 is now equipped to support the Profibus communication protocol. Profibus is a fieldbus-based automation standard of Profibus and Profinet International (PI). Via a single bus...

  • Page 16: Sla5800 Series Devicenet Connections And Pinouts

    Figure 1-6 SLA5800 Series DeviceNet Connection and Pinouts DeviceNet Communications The Brooks SLA5800 Digital Series is also available with DeviceNet communication capability. DeviceNet is an open digital protocol capable of high speeds and easy system connectivity. Brooks Instrument has several...

  • Page 17: Sla5800 Series Ethercat Connections And Pinouts

    January, 2017 Figure 1-7 SLA5800 Series EtherCAT Connection and Pinouts EtherCAT Communications Brooks lnstrument now introduces the state-of-the-art EtherCAT communications interface on its SLA Enhanced Series platform. Many applications of Flow Controllers/Meters are moving to increase the use of automation. Automation comes in many forms including Ethernet based field buses.

  • Page 18: Dimensions - Model Sla5850, Thru-Flow, Rs485

    January, 2017 Note: Aux Input is used for Remote Transducer Pressure Controllers only. Figure1-8 Dimensions - Model SLA5850, Thru-Flow, RS485 Note: Aux Input is used for Remote Transducer Pressure Controllers only. Figure 1-9 Dimensions - Model SLA5850, Downport, RS485 1-12...

  • Page 19: Dimensions - Model Sla5851, Thru-Flow, Ethercat

    Section 1 Introduction Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG ® Brooks Digital MFC's & MFM's January, 2017 Note: Aux Input is used for Remote Transducer Pressure Controllers only. Figure 1-10 Dimensions - Model SLA5851, Thru-Flow, EtherCAT Note: Aux Input is used for Remote Transducer Pressure Controllers only.

  • Page 20: Dimensions - Model Sla5860, Thru-Flow, Profibus

    Section 1 Introduction Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG ® Brooks Digital MFC's & MFM's January, 2017 Note: Aux Input is used for Remote Transducer Pressure Controllers only. Figure 1-12 Dimensions - Model SLA5860, Thru-Flow, Profibus Figure 1-13 Dimensions - Model SLA5860, Thru-Flow, RS485...

  • Page 21: Dimensions - Model Sla5861, Thru-Flow, Rs485

    Section 1 Introduction Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG ® Brooks Digital MFC's & MFM's January, 2017 Note: Aux Input is used for Remote Transducer Pressure Controllers only. Figure 1-14 Dimensions - Model SLA5861, Thru-Flow, RS485 Note: Aux Input is used for Remote Transducer Pressure Controllers only.

  • Page 22: Dimensions - Model Sla5853, Thru-Flow, Profibus

    Section 1 Introduction Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG ® Brooks Digital MFC's & MFM's January, 2017 Note: Aux Input is used for Remote Transducer Pressure Controllers only. Figure 1-16 Dimensions - Model SLA5853, Thru-Flow, Profibus Note: Aux Input is used for Remote Transducer Pressure Controllers only.

  • Page 23: Section 2 Installation

    Number (RMA #) and complete a Decontamination Statement to accompany it: BrooksInstrument.com/Service. All instruments returned to Brooks also require a Material Safety Data Sheet (MSDS) for the fluid(s) used in the instrument. Failure to provide this information will delay processing of the instrument.

  • Page 24: Transit Precautions

    1 to 5 lpm 10 micron SLA5850/60 10 to 50 lpm 40 micron SLA5851/61 15 to 100 lpm 40 micron SLA5853/63 > 100 lpm Consult factory Note: Brooks provides many filter options. For those not listed here, please contact factory.

  • Page 25: Installation

    January, 2017 2-9 Installation Recommended installation procedures: a. The Brooks Digital MFC or MFM should be located in a clean, dry atmosphere relatively free from shock and vibration. b. Leave sufficient room for access to Self-zero function push-button. c. Install in such a manner that permits easy removal if the instrument requires servicing.
  • Page 26 Special considerations to be taken when installing the SLA5853 MFC: The Model SLA5853 has a valve design that is different from the standard low flow Brooks TMFC's. The SLA5853 consists of a dual stage, pilot operated valve. The pilot valve (located on the top of the MFC) controls a differential pressure across the main valve which, in turn controls the flow through the device.

  • Page 27: Electrical Interface

    For more information, please contact the Brooks Technical Service group. 2-10 Electrical Interface The setpoint signal is supplied as a 0(1) to 5 Vdc, 0 to 10 Vdc or 0(4)-20 mA analog signal.

  • Page 28: Rs485 D-Connector Shielded Cable Hookup Diagram, Voltage I/O Version

    Section 2 Installation Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG ® Brooks Digital MFC's & MFM's January, 2017 Figure 2-1 RS485 D-Connector Shielded Cable Hookup Diagram, Voltage I/O Version...
  • Page 29 Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG ® Brooks Digital MFC's & MFM's January, 2017 Figure 2-2 Recommended I/O Wiring Configuration for Current Signals (Non-Isolated Power Supply) Figure 2-3 Recommended I/O Wiring Configuration for Current Signals (Isolated Power Supply)

  • Page 30: Rs485 Multidrop Interconnection Tmfs And Pc

    Section 2 Installation Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG ® Brooks Digital MFC's & MFM's January, 2017 Figure 2-4 RS485 Multidrop Interconnection TMFs and PC The RS485 is a multidrop connection and allows a maximum of 32 devices to be connected to a computer system.

  • Page 31: Operation Check Procedure (Analog I/O)

    Section 2 Installation Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG ® Brooks Digital MFC's & MFM's January, 2017 2-11 Operation Check Procedure (Analog I/O) a. Mount the MFC/MFM in its final orientation. b. Apply power to the MFC/MFM and allow approximately 45 minutes for the instrument to completely warm up and stabilize its temperature.

  • Page 32: Operation Check Procedure (Digital I/O)

    (i.e. the data being PRODUCED from the device (MFC) as an INPUT into the network or the data is being CONSUMED by the device (MFC) is an OUTPUT from the network). NOTE: For additional DeviceNet, Profibus, Foundation Fieldbus and/or EtherCAT details, please see Brooks Supplemental Instruction Manuals. 2-10...

  • Page 33: Section 3 Operation

    Section 3 Operation Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG ® Brooks Digital MFC's & MFM's January, 2017 3-1 Overview This section contains the following information: • Theory of Operation • Features 3-2 Theory of Operation for Flow Measurement The thermal mass flow measurement system consists of two components: the restrictor and the flow sensor.

  • Page 34: Flow Sensor Operational Diagram

    Section 3 Operation Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG ® Brooks Digital MFC's & MFM's January, 2017 Figure 3-1 Flow Sensor Operational Diagram (VCR End Connections Shown)

  • Page 35: Features

    MFCs. Other versions of the Delta Class can provide a variety of digital protocols. The Brooks Digital equipment is capable of storing up to 6 different sets of gas calibration data. Each set includes a calibration curve, PID controller settings, valve performance data, and information about the calibration conditions.

  • Page 36: Analog I/O Mode Of Operation

    Digital MFC's & MFM's January, 2017 3-4 Analog I/O Mode of Operation The following paragraphs describe the basic features of the Brooks Digital Series Mass Flow Meters/Controllers. Functional Description The analog interface may include any of the following I/O options as...

  • Page 37: Communications Features

    Digital communication, designed to emulate the Brooks S-series "S-protocol" or pseudo-HART communications is available on the Brooks Digital Series via RS485. This form of multi-drop capable communication provides access to many of the Brooks Digital Series functions for "control and monitor" operations, including: •...

  • Page 38: Devicenet Communications Features

    Baud rate selections for DeviceNet products are 125K, 250K and 500K and can be selected via MAC ID switches mounted on the device. The DeviceNet communication link also provides access to many of the Brooks SLA5800 Digital Series functions for “control and monitor” operations, including: •...

  • Page 39: Alarms (Analog Versions Only)

    3-6 Alarms (Analog versions only) This section outlines alarms associated with the Analog versions of the Brooks Digital Series. For information describing alarms specifically for Brooks DeviceNet units, reference the following supplemental manual: X-DPT-DeviceNet-SLA5800-SLAMf-Series-RevB-MFC-eng Part Number: 541B190AAG. For information describing alarms specifically for Brooks Profibus units,...

  • Page 40: Alarms (Analog Versions Only) Configuration Attributes

    Alarms are a user configurable feature. This feature may be adjusted via the Diagnostics Port using a special software application available from Brooks. Reference the Brooks Expert Support Tool (BEST) User Manual for more information about the Diagnostic Port and software application.

  • Page 41: Diagnostic Alarms (Analog Versions Only)

    Section 3 Operation Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG ® Brooks Digital MFC's & MFM's January, 2017 3-6-2 Diagnostic Alarms (Analog versions only) A Diagnostic Alarm will be indicated when any of the diagnostics below detect a failure providing a visual indication via the red LED. The...

  • Page 42: Calibration/Configuration Sets

    Calibration and configuration data sets may be adjusted by an advanced user via the Diagnostics Port using a special software application available from Brooks. Reference the Brooks Expert Support Tool User Manual (BEST) for more information about the Diagnostic Port and software application.

  • Page 43: Setpoint Ramping

    The update rate of the totalizer in Non-Volatile Memory will be 5 seconds. 3-9 PC-based Support Tools Brooks Instrument offers a variety of PC-based process control and service tools to meet the needs of our customers. Smart Interface may be used with any unit supporting RS485 in a multidrop configuration, thus allowing users to control and monitor their Brooks devices.
  • Page 44 Section 3 Operation Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG ® Brooks Digital MFC's & MFM's January, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK 3-12...

  • Page 45: Section 4 Maintenance & Troubleshooting

    Part Number: 541B187AAG Brooks ® Digital MFC's & MFM's June, 2016 4-1 Maintenance and Troubleshooting No routine maintenance is required on the Brooks Digital MFC's and MFM's. If an in-line filter is used, the filtering elements should be periodically replaced or cleaned.

  • Page 46: Troubleshooting Analog Or Digital

    MFC must be set up with the same I/O assembly as the network master. Confirm these I/O settings are correct. NOTE: This information and all other detailed DeviceNet information is available in the Brooks DeviceNet Supplement Instruction Manual.

  • Page 47: System Checks

    Section 3-5 of this manual. 4-1-2 System Checks The Brooks Digital Series Flowmeters and Controllers are generally used as a component in gas handling systems, which can be complex in nature. It can therefore be very difficult to isolate a malfunction in the system. An inaccurately diagnosed malfunction can cause many hours of unnecessary downtime.
  • Page 48 Section 4 Maintenance & Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Troubleshooting Part Number: 541B187AAG Brooks ® Digital MFC's & MFM's June, 2016 Table 4-1 Sensor Troubleshooting SENSOR SCHEMATIC FUNCTION Heater Upstream Temperature Sensor (Su) Downstream Temperature Sensor (Sd) Sensor Common Heater Common...

  • Page 49: Bench Troubleshooting Circuit

    Figure 4-1 Bench Troubleshooting Circuit Bench Troubleshooting 1. Establish a proper connection between the Brooks Digital Series Mass Flow Meter or Controller (using Figure 4-1 as a reference) Switch on the power and allow the instrument to warm-up for 45 minutes. In case of a Controller model, adjust the Setpoint to zero.

  • Page 50: Cleaning Procedures

    4-1-4 Calibration Procedure The calibration of Brooks Digital Series Mass Flow devices is not described in this manual. Such calibration requires accurate and traceable calibration equipment in addition to digital communications.

  • Page 51: Troubleshooting

    (regardless of Setpoint) and (Section 4-1-3). there is flow through the meter/controller Defective electronic board Contact Brooks Instrument Flow cannot be achieved Clogged Control Valve Clean the control valve (Section 4-1-2) or regardless of Setpoint. return the device to the factory...
  • Page 52 Section 4 Maintenance & Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Troubleshooting Part Number: 541B187AAG Brooks ® Digital MFC's & MFM's June, 2016 THIS PAGE WAS INTENTIONALLY LEFT BLANK...

  • Page 53: Section A Essential Instructions

    Section A Essential Instructions Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG January, 2017 ® Brooks Digital MFC's and MFM's Bulgarian Brooks Instrument Brooks Instrument. Brooks Instrument : (1) . (2) Brooks Instrument (PED) 0,5 bar (g) 25 mm 1" (inch), (PED).
  • Page 54 P ed instalací si p e t te následující instrukce! Spole nost Brooks Instrument konstruuje, vyrábí a testuje tento produkt tak, aby splnil mnoho národních a mezinárodních standard . P ístroje musí být ádn nainstalovány, používány a udržovány tak, aby byl zajišt n jejich nep etržitý provoz v rámci normálních technických specifikací. Musíte dodržovat následující...
  • Page 55 Om kvalitet af signalkabler, kabeltilslutninger og koblinger: Brooks tilbyder kabler af højest kvalitet, som er tilpasset CEE kvalificeringens forskrifter. Hvis man vælger at bruge egne kabler, skal man vælge et kabel som har den nødvendige afskærmning for at sikre 100 % mod udefra kommende støj.
  • Page 56 Lees ze voordat u verder gaat! Brooks Instrument ontwerpt, produceert en test haar producten zodanig dat ze voldoen aan vele nationale en internationale normen. Deze producten moeten correct worden geïnstalleerd, bediend en onderhouden zodat ze binnen hun normale specificaties blijven werken.
  • Page 57 Olulised juhised Enne kasutamist lugege hoolikalt läbi! Brooks Instrument konstrueerib, valmistab ja katsetab oma tooteid selliselt, et need vastaksid paljudele riiklikele ja rahvusvahelistele standarditele. Ainult nõuetekohane paigaldamine, kasutamine ja hooldamine tagab toodete katkematu talitluse tavaspetsifikatsiooni raames. Brooks Instrumenti toodete paigaldamisel, kasutamisel ja hooldamisel tuleb täita alljärgnevaid juhiseid ja integreerida need asjakohasesse ohutusprogrammi.
  • Page 58 PED direktiiviä koskevat määräykset löytyvät käyttöoppaan ’’Tekniset tiedot” -luvusta. Käyttöoppaassa kuvatut tuotteet ovat 2014/34/EU EU-direktiivin mukaisia. Kaikki Brooks Instrumentin virtausmittarit kuuluvat ryhmään 1. Laitteet, jotka ovat suurempia, kuin 25 mm tai 1 tuuma, ovat PED I, II, III kategorien mukaisia.
  • Page 59 AVERTISSEMENT: n’utilisez pas cet instrument au-delà des spécifications énumérées dans le manuel d’utilisation. Le non-respect de cet avertissement peut entraîner de graves blessures et / ou endommager l’équipement. • Si vous ne comprenez pas l’une des instructions, prenez contact avec un représentant de Brooks Instrument pour obtenir des explications. •...
  • Page 60 Produkte mit einer Größe von 25 mm oder 1“ (inch) oder kleiner sind Sound Engineering Practice (SEP). Europäische Verordnung zur elektromagnetischen Verträglichkeit (EMV) Geräte von Brooks Instrument (elektrischer und elektronischer Art) mit CE-Zeichen haben den Test auf Einhaltung der Verordnung zur elektromagnetischen Verträglichkeit (EMV Richtlinie 2014/30/EU) erfolgreich bestanden.
  • Page 61 Section A Essential Instructions Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG January, 2017 ® Brooks Digital MFC's and MFM's Greek Brooks Instrument Brooks Instrument. ’ Brooks Instrument. : (1) . (2) Brooks Instrument. (PED) 0,5 bar (g) 25 mm (PED).
  • Page 62 üzemeltetni és karbantartani ahhoz, hogy mindenképpen a normál m ködési tartományuknak megfelel en üzemelhessenek. Az alábbi utasításokat be kell tartani, és be kell építeni a munkavédelmi programba a Brooks Instrument termékeinek telepítése, üzemeltetése és karbantartása során.
  • Page 63 Direttiva europea relativa alla compatibilità elettromagnetica (EMC) Le apparecchiature (elettriche/elettroniche) Brooks Instrument dispongono del marchio CE ed hanno superato positivamente i test per i requisiti di compatibilità elettromagnetica (Direttiva EMC 2014/30/EU). In ogni caso bisogna prestare particolare attenzione alla scelta dei cavi di segnale utilizzati per le apparecchiature con marchio CE.
  • Page 64 Lai nodrošin tu šo izstr d jumu turpm ku darb bu atbilstoši noteiktajiem parametriem, tie ir pareizi j uzst da, j lieto un j apkopj. Uzst dot, lietojot „Brooks Instrument” izstr d jumus un veicot to apkopi, ir j iev ro šie nor d jumi un j iek auj tie j su droš bas programm .
  • Page 65 SP JIMAS: nenaudokite šio prietaiso viršydami instrukcijoje ir eksploatacijos vadove nurodytus techninius duomenis. Nesilaikydami šio sp jimo galite sunkiai susižeisti ir (arba) sugadinti rang . Jei nesuprantate koki nors nurodym , kreipkit s „Brooks Instrument“ atstov , kad paaiškint . Paisykite vis sp jim , persp jim ir nurodym , pažym t ant gaminio arba pateikt su juo.
  • Page 66 Produkty o wielko ci 25 mm lub 1 cala lub mniejsze podlegaj zaleceniom „Uznanej Praktyki In ynierskiej” (SEP). Europejska dyrektywa dotycz ca kompatybilno ci elektromagnetycznej (EMC) Urz dzenia elektryczne / elektroniczne firmy Brooks Instrument posiadaj ce oznaczenie CE, przesz y pozytywnie testy pod k tem spe niania przez nich wymogów kompatybilno ci elektromagnetycznej (Dyrektywa EMC 2014/30/EU).
  • Page 67 Ler antes de proceder! A Brooks Instrument projecta, fabrica e testa os seus produtos de forma a satisfazer numerosas normas nacionais e internacionais. Estes equipamentos devem ser instalados, utilizados e mantidos de forma adequada, e devem funcionar dentro da sua gama de utilização. As instruções seguintes devem ser, durante a instalação, uso e/ou manutenção dos equipamentos da Brooks Instrument, apreendidas e integradas no plano de...
  • Page 68 În m sura în care indica iile c r ii ma inii nu sunt suficient de l muritoare, lua i leg tura cu reprezentantul Brooks Instrument pentru clarificarea problemei.
  • Page 69 Pre íta pred inštaláciou! Brooks Instrument svoje výrobky projektuje, vyrába a testuje takým spôsobom, aby tieto vyhoveli domácim aj medzinárodným normám. Tieto zariadenia je potrebné predpísaným spôsobom inštalova , prevádzkova a udržiava , na zabezpe enie ich spo ahlivej a normálnej prevádzky v celom pracovnom rozsahu.
  • Page 70 Pred servisom morate odstraniti tlak v obdelovalni liniji. e potrebujete rezervne dele, zagotovite, da usposobljeno osebje uporablja rezervne dele, ki jih je odobrila družba Brooks Instrument. Neodobreni deli in postopki lahko vplivajo na u inkovitost delovanja izdelka ali ogrozijo varno upravljanje postopka.
  • Page 71 ¡Léalos primero! El Brooks Instrument proyecta, fabrica y prueba sus productos de manera que éstos respondan a numerosas normas nacionales e internacionales. Dichas instalaciones deben ser emplazadas, operadas y mantenidas adecuadamente, para que puedan marchar de todas formas en conformidad con el alcance normal de funcionamiento.
  • Page 72 Läs detta innan du fortsätter! Brooks Instrument konstruerar, tillverkar och testar sina produkter med syfte att uppfylla alla nationella och internationella standarder. Dessa produkter måste installeras på rätt sätt, handhas och underhållas för att de skall fungera kontinuerligt enligt deras normala specifikation. De följande anvisningarna bör följas och integreras till Ert säkerhetsprogram varje gång när Brooks Instruments produkter installeras, handhas och underhålls.
  • Page 73 Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG ® Brooks Digital MFC's & MFM's January, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
  • Page 74 BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with outstanding service and support to back it up. We operate first class repair facilities located around the world to provide rapid response and support.

This manual is also suitable for:

Sla5853Sla5863Sla5851Sla5860Sla5861

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