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Summary of Contents for Brooks GF Series
- Page 1 Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 ® Brooks GF Series High Performance Gas Flow Controllers Model GF125 Analog I/O Model GF125 Digital I/O...
- Page 2 Essential Instructions Read this page before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they continue to operate within their normal specifications.
- Page 3 We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more.
- Page 4 Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
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Page 5: Table Of Contents
Patents ............................1-4 Section 2 Product Description Introduction ........................... 2-1 General Description ........................2-1 Operating Principles ........................2-2 Specifications for GF Series Controller ..................2-3 2-4-1 Specifications for GF120XSD Series Controller ................2-4 2-4-2 Specifications for GF120XSL Series Controller ................2-3 Product Labeling ........................... - Page 6 Introduction ........................... 7-1 OEM Tool Troubleshooting Checklist .................... 7-1 GF1XX Troubleshooting Guide ..................... 7-2 Section 8 GF Series Device Removal and Return Instructions Introduction ........................... 8-1 Purge Gas Lines Before Removing the GF1XX ................8-1 Remove and Replace the GF1XX ....................8-1 Package the GF1XX ........................
- Page 7 Contents Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 Figure Figure Number Number GF1XX Series High Performance Gas Flow Controller Analog and Digital ........1-1 GF1XX General Description ......................2-1 GF1XX Operating Principles ......................2-2 GF125 Side Can Label ........................
- Page 8 Contents Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
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Page 9: Introduction
The GF1XX is designed for semiconductor and other high purity manufacturing processes where fast settling times and superior flow accuracy are required. Some of the processes supported by the GF Series are sub-atmospheric deposition, low pressure plasma deposition, plasma enhanced atomic layer deposition, rapid thermal processing, UHP gas blending to name a few. -
Page 10: Notice And Caution Statements
1-5 Product Warranty Product warranty information can be found on the Back Cover of this Manual and on the Brooks website at www.BrooksInstrument.com. This information provides general warranty information, limitations, disclaimers, and applicable warranty periods according to product group. -
Page 11: Glossary Of Terms And Acronyms
Section 1 Introduction Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 1-9 Glossary of Terms and Acronyms Table 1-1 Terms and Acronyms Term or Acronym Definition Customer Special Requirement Chemical Vapor Deposition DeviceNet A 5-wire local network I/O communication device... -
Page 12: Patents
Section 1 Introduction Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 1-10 Patents The GF1XX Series High Performance Gas Flow Controller may be protected by the following US patents and their international filings: Patent/Pub. No. Title... -
Page 13: General Description
Section 2 Product Descripton Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 2-1 Introduction This section provides a general description, operating principles, product labeling, model code descriptions, and operating features. 2-2 General Description As shown in Figure 2-1, the GF1XX utilizes the industry standard IsoSensor™... -
Page 14: Operating Principles
Section 2 Product Descripton Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 2-3 Operating Principles GF1XX operating principles are described in Figure 2-2. Setpoint DeviceNet (if DeviceNet - serial data) Setpoint Microprocessor (if Rs485 - analog... -
Page 15: Specifications For Gf Series Controller
Section 2 Product Descripton Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 2-4 Specifications for GF Series Controllers Materials of Construction Gas Path SEMI F20 Compliant Surface Finish 4 µ in Ra (0.1 µm Ra) -
Page 16: Specifications For Gf120Xsd Series Controller
Section 2 Product Descripton Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 2-4-1 Specifications for GF120XSD Series Controllers NOTE: Materials of Construction, Electrical and Performance specifications are the same as stated in Section 2-4. Operating Conditions for GF120XSD... -
Page 17: Mode Code Description
Section 2 Product Descripton Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 Table 2-1 GF1XX Top Label Top Label Contents Sample of "Top Label" Serial Number A9253017027 Gas/Range NH3 5000 sccm Part Number (or user defined) -
Page 18: Standard Features
Section 2 Product Descripton Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 Table 2-2 GF1XX Flow Range And Communication Protocols Standard GF125 Flow Range Digital Configuration Footprint (N2 Equivalent) Digital RS485 Bin Value (inches) (min.-max. -
Page 19: Auto Shut-Off
Section 2 Product Descripton Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 2-7-6 Auto Shut-Off The Auto Shut-off feature closes the GF1XX valve when the set point drops below 1.5% of full scale. 2-7-7 LED Display As shown in Figure 2-4, each GF1XX is equipped with an LED display panel located at the top of the device. -
Page 20: Optional Features
Section 2 Product Descripton Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 2-8 Optional Features Optional features are set at the factory to customer requirements. Basic optional features are described below. Refer to Appendix A for further details. -
Page 21: Section 3 Installation Instructions
Section 3 Installation Instructions Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 3-1 Introduction This section discusses how to prepare your system and install the GF1XX. The installation process consists of purging the gas supply line prior to installation, unpacking and inspecting the GF1XX, connecting the GF1XX to the gas supply line, and testing for leaks. -
Page 22: Purge The Gas Supply Line Before Gf1Xx Installation
Section 3 Installation Instructions Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 3-3 Purge the Gas Supply Line Before GF1XX Installation NOTICE Before operating the GF1XX, the gas supply line must be completely purged with nitrogen or argon to ensure the line is free from toxic or flammable gases, contaminants, moisture, and oxygen. -
Page 23: Unpack And Inspect The Gf1Xx Device
In the case of the GF100/120 Series, which does not have an internal pressure sensor, it is recommended that the MFC is re-zeroed with process gas following the recommended Brooks procedure (see zeroing bulletin FSB-001-0015 for futher information). If your GF1XX is configured with downported fittings, follow Steps 1 though 4 below. -
Page 24: Gf1Xx Mounted To K1 Series Substrate Blocks
Section 3 Installation Instructions Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 Figure 3-4 GF1XX Mounted to K1 Series Substrate Blocks 2. Select the mounting screws noted in Table 3-1 below for downported devices. M4 screws are used on 1.125" devices, K1S. M5 screws are used on 1.5"... -
Page 25: Perform A Leak Test
Section 3 Installation Instructions Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 4. Using a torque wrench and a metric hex key, tighten the screws to the torque value as described in Table 3-2 and Torque Pattern Figure 3-5. - Page 26 Section 3 Installation Instructions Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
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Page 27: Section 4 Multiflo Configurator
GF1XX through 9 pin RS-232 on the PC to the diagnostic port on the MFC via a 2.5mm jack. Refer to Figure 4.1 and obtain the MultiFlo Cable Adaptor (P/N A331710003) from Brooks. Figure 4-1 MultiFlo Cable Adaptor Figure 4-2 RS-232/RS-485 converter (P/N A3323000001) Connect the MultiFlo Cable Adapter 2.5mm jack to the Diagnostic Port on... -
Page 28: Configure The Gas And Flow Range
Connect the RS-232 end of the converter to the Serial Port of a laptop or Download the MultiFlo Configurator software into your computer from the Brooks Instrument website www.BrooksInstrument.com/Software. Then install the MultiFlo Configurator as described in the MultiFlo Configurator Software Manual. -
Page 29: Section 5 Performance Checks
Section 5 Performance Checks Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 5-1 Introduction Four major conditions are required to ensure the GF1XX is operating properly once installation has been completed: • The GF1XX must be warmed up for at least 30 minutes. -
Page 30: Zeroing The Gf1Xx
Section 5 Performance Checks Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 5-3 Zeroing the GF1xx Many high density gases exhibit slight changes in zero output as a function of inlet pressure. Gases such as tungsten hexafluoride and many fluoro- carbons are especially sensitive to this problem. -
Page 31: Zeroing The Gf1Xx Flow From Lcd Display Panel
Section 5 Performance Checks Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 Figure 5-2 Display Reading Zero PSI 5-3-2 Zeroing GF1xx Flow from LCD Display Panel 1. Place the GF1XX under normal inlet operating pressure. Close the down stream valve to prevent any flow. - Page 32 Section 5 Performance Checks Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
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Page 33: Section 6 Maintenance Requirements
If reactive gases are being used, it is recommended that you send the GF1xx to a Brooks Service Center for cleaning and re-calibration at 6 month intervals, or twice a year. Refer to Section 8 for product removal, product packaging, and product return instructions. -
Page 34: Factory Calibration And Service
GF1XXs are serviceable on site for zeroing and configuration functions. Otherwise, they must be maintained, cleaned, and repaired only through an authorized Brooks Service Center. If a Brooks product is repaired by anyone other than an authorized Brooks Service Center during the... -
Page 35: Section 7 System Troubleshooting
Section 7 System Troubleshooting Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 7-1 Introduction This section includes an OEM tool Troubleshooting Checklist and an GF1XX Troubleshooting Guide that identifies symptoms, possible causes, and corrective actions. -
Page 36: Gf1Xx Troubleshooting Guide
Section 7 System Troubleshooting Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 7-3 GF1XX Troubleshooting Guide Table 7-2 GF1XX Troubleshooting Guide Symptoms & Possible Causes Corrective Action 1. No gas flow. Is the gas supply turned on? Check shut-off valve and pressure readout. - Page 37 Section 7 System Troubleshooting Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 Table 7-2 GF1XX Troubleshooting Guide (Continued) Symptoms & Possible Causes Corrective Action 4. No gas flow above some set-point. NOTE: When the setpoint is...
- Page 38 Section 7 System Troubleshooting Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 Table 7-2 GF1XX Troubleshooting Guide (Continued) Symptoms & Possible Causes Corrective Action 6. Gas flow, or GF1XX pressure reading oscillates. Are inlet and outlet pressures stable?
- Page 39 Section 7 System Troubleshooting Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 Table 7-2 GF1XX Troubleshooting Guide (Continued) Symptoms & Possible Causes Corrective Action 10. Calibration Drift. Gas box temperature too high? Zero is not correct.
- Page 40 Section 7 System Troubleshooting Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
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Page 41: Introduction
The following removal and return instructions are designed to minimize or eliminate contamination normally associated with the most highly reactive gases. Brooks has designed these instructions to reduce the overall exposure to foreign particles. 8-2 Purge Gas Lines Before Removing the GF1XX Refer to Section 3 for purging instructions. -
Page 42: Package The Gf1Xx
GF Series March, 2010 8-4 Package the GF1XX Perform the following steps when a GF1XX is transported to a Brooks Service Center. 1. All returned products must be accompanied with a Return Material Authorization (RMA) number. Call Brooks for a RMA number prior to shipment. -
Page 43: Appendix A: Product Description Code
Appendix A: Product Description Code Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 Table A-1 GF125 Product Description Code Table GF125 Pressure Transient Insensitive (PTI) Flow Ranges from 3 sccm–30 slpm N 2 Equivalent Configurable... -
Page 44: Gf100 Product Description Code Table
Appendix A: Product Description Code Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 Table A-2 GF100 Product Description Code Table Flow Ranges from 3 sccm–30 slpm N 2 Equivalent GF100 Configurable Gas Specific Standard Application... -
Page 45: Gf120 Product Description Code Table
Appendix A: Product Description Code Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 Table A-3 GF120 Product Description Code Table Flow Ranges from 3 sccm–30 slpm N 2 Equivalent GF120 Configurable Gas Specific Standard Application... - Page 46 1 1/2" C Seal 92mm 1 1/2" W Seal 92mm 1 1/8" C Seal w/ Poke Yoke Vacuum - Default (If Atmosphere req'd, please contact Brooks Product Management) Standard Fl ow Sensor Orientation - Default 5 pin DEVICENET micro (Unit "D", IN "D") Cable adapter to Cardedge (w/out VTP), RS485 through RJ11 jack s (Unit "E";...
- Page 47 2-character option code as defined: ex. DX, DeviceNet 11.CSR a.Customer Special Requirement, contact Brooks Apps Engineering for review of requirement and creation of CSR: nnnn b.If DNET connector, CSR required to define DNET attributes: 0924, generic, ODVA Std. configuration c.None Required: XXXX...
- Page 48 Appendix A: Product Description Code Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
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Page 49: Appendix B: Industry Standard References
Appendix B: Industry Standard References Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 Table B-1 Industry Standard References Reference Number Reference Description MIL-STD-810 Method 514.4, Category 1, Transportation Requirement Method 516.4, Procedure 1, Functional Shock Test Requirement... -
Page 50: Industry Standard References
Appendix B: Industry Standard References Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 THIS PAGE WAS INTENTIONALLY LEFT BLANK... -
Page 51: Gf1Xx Gas Table
Appendix C: GF1xx Gas Table Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 C-1 GF1XX Gas Table Table C-1 GF1XX Gas Table (Reference the following pages C-1 Through C-4). Table C-1 GF1XX Gas Table - Codes 1-97, Bins SH40 to SH45 Min inlet pressure for vac. - Page 52 10600 C2F4 Tetrafluoroethylene 19.7 19.7 2300 2301 4900 4901 9800 Si2H6 DISILANE 19.7 19.7 2300 2301 4900 4901 9800 For reference only, consult factory on the latest tables. For gases not specified for SH49 & SH50, contact Brooks Product Marketing.
- Page 53 Appendix C: GF1xx Gas Table Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 Table C-1 GF1XX Gas Table - Codes 99-965, Bins SH40 to SH45 Min inlet pressure for vac. exhaust (PSIA) SH40 SH41 SH42...
- Page 54 14.7 19.7 2001 5900 5901 12000 12001 24000 965 50%CH3SiHCl2/H2 50%Dichloromethylsilane/Hydrogen 11.7 13.7 1201 3100 3101 6600 6601 13000 For reference only, consult factory on the latest tables. For gases not specified for SH49 & SH50, contact Brooks Product Marketing.
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Page 55: Appendix D: Misc. Drawings
Section D Misc. Drawings Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 D-1 Electrical Connection D-1-1 DeviceNet Connections DeviceNet is a 5 wire local network connection that employs a command response communication protocol for communicating between a master and slave. Obtain a DeviceNet communication cable (Micro M-12) and fasten it to the 5-pin connector as shown in Figure D-1. - Page 56 X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 D-1-2 Digital/Analog Connector The GF Series devices are available with Analog 9-Pin D-Connectors shown in Figure D-2. Analog 9-Pin Connector (Refer to Figure D1-3 for Pin-Out Details) Figure D-2 GF1XX with 9-Pin Analog Connector...
- Page 57 Section D Misc. Drawings Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 D-1-3 Digital/Analog Adapters The GF Series devices are available with the following adapters. 1.50 DETAIL A 4.00 + .125 10 x .13 1.05 + .125 CONDUCTORS...
- Page 58 Section D Mics. Drawings Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 1.04 3.71 Pin-Out for DB9 to Card Edge (Corresponds to Connector Option "EX") UDG9 Device Side UDG9 MFC Card Edge MFC 20-pin Edge Card...
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Page 59: Dimensional Drawings
Part Number: 541B137AAG GF Series March, 2010 D-2 Dimensional Drawings The following drawings represent the available configurations for the Brooks Models GF100, GF120 and GF125. Figure D-8 DeviceNet 1-1/8" C-Seal 92mm Downported Figure D-9 Digital/Analog DB9, RS-485 1-1/8" C-Seal 92mm Downported... - Page 60 Section D Mics. Drawings Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 Figure D-10 Digital/Analog DB9, RS-485 1-1/2" W-Seal 80mm Downported Figure D-11 DeviceNet 124mm 1/4" VCR Fittings...
- Page 61 Section D Misc. Drawings Installation and Operation Manual X-TMF-GF Series-MFC-eng Part Number: 541B137AAG GF Series March, 2010 Figure D-12 Digital/Analog DB9, RS-485 124mm 1/4" VCR Fittings...
- Page 62 BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with outstanding service and support to back it up. We operate first class repair facilities located around the world to provide rapid response and support.
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