Brooks GF100 Series Installation And Operation Manual
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Brooks GF100 Series Installation And Operation Manual

Rs485 l-protocol supplemental manual for mass flow controllers and meters
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Installation and Operation Manual
X-DPT-RS485-GF100-Series-MFC-eng
Part Number: 541B183AAG
March, 2020
RS485 L-Protocol Supplemental Manual
for GF100 Series Mass Flow Controllers
and Meters
®
Brooks
GF125 Series and GF135 Series

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  • Page 1 Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG March, 2020 RS485 L-Protocol Supplemental Manual for GF100 Series Mass Flow Controllers and Meters ® Brooks GF125 Series and GF135 Series...
  • Page 2 L-Protocol Mass flow controllers and meters. Should you require any additional information concerning the RS485 L-Protocol Mass flow controllers and meters, please feel free to contact your local Brooks Sales and Service Office; see back cover for contact information, or visit us on the web at www.BrooksInstrument.com. We appreciate this opportunity to service your fluid measurement and control requirements, and trust that we will be able to provide you with further assistance in future.

  • Page 3: Table Of Contents

    Contents Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 Contents 1. Introduction .............................. 1 1.1. Purpose ............................1 1.2. Scope .............................. 1 2. Background .............................. 3 2.1. Topology ............................3 2.2. Communication Parameters ......................3 2.3.
  • Page 4 Contents Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 4.2. Abnormal Transaction Scenarios ....................46 4.2.1. Read Transaction Scenario ....................46 4.2.1.1. Packet Error ......................46 4.2.1.2. Read Error....................... 47 4.2.2. Write Transaction Scenario ......................48 4.2.2.1.

  • Page 5: Introduction

    Section 1 - Introduction Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 1. Introduction 1.1. Purpose The purpose of this document is to outline the generic RS485 multi-drop communication protocol for UNIT digital MFC.
  • Page 6 Section 1 - Introduction Installation and Operation Manual DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 • Query for Available Calibration Instances (Process Gases) - Master controller will use this message to query available number of calibration instances.

  • Page 7: Background

    Section 2 - Background Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 2. Background 2.1. Topology The controller acts as a Master device on an RS-485 multi-drop bus. It controls all transactions on the bus.

  • Page 8: Message Format

    Section 2 - Background Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 2.3. Message Format Messages on the bus are sent as packets with a fixed format, illustrated as the following diagram. Each packet begins with the target digital MFC...
  • Page 9 Section 2 - Background Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 Message Class ID Instance ID Attribute ID Query for MAC ID 0x03 0x01 0x01 Digital Mode Selection 0x69 0x01 0x03 Query for Present Control Mode...
  • Page 10 Section 2 - Background Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 THIS PAGE WAS INTENTIONALLY LEFT BLANK...

  • Page 11: Message Protocol Details

    Section 3 - Message Protocol Details Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 3. Message Protocol Details The following sub-sections describe in detail the supported messages. 3.1. Query for MAC ID Master controller will use this message to query the existence of a MFC controller.
  • Page 12 Section 3 - Message Protocol Details Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 Response message from a digital MFC controller to Master controller MAC ID (0 – Master controller) STX(0x02) Command Code(0x80 for read)

  • Page 13: Digital Mode Selection

    Section 3 - Message Protocol Details Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 3.2. Digital Mode Selection Master controller will use this message to set a MFC controller to digital or analog mode.

  • Page 14: Query Present Control Mode

    Section 3 - Message Protocol Details Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 3.3. Query Present Control Mode Master controller will use this message to query the present control mode. MAC ID (Targeted MFC controller address)
  • Page 15 Section 3 - Message Protocol Details Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 Response message from a digital MFC controller to Master controller MAC ID (0-Master Controller) STX(0x02) Command Code(0x80 for read) Packet Length(0x04)

  • Page 16: Freeze Follow

    Section 3 - Message Protocol Details Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 3.4. Freeze Follow Master controller will use this message to configure a MFC controller to act upon, or ignore, a new set point when received.

  • Page 17: New Setpoint

    Section 3 - Message Protocol Details Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 3.5. New Setpoint Master controller will use this message to send a new set point to a MFC controller. MAC ID (Targeted MFC controller address)

  • Page 18: Ramp Time

    Section 3 - Message Protocol Details Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 3.6. Ramp Time Master controller will use this message to send a ramp time to a MFC controller. The ramp time is how long the MFC controller should take to reach the final set point from the current set point.
  • Page 19 Section 3 - Message Protocol Details Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 3.6.1 Query for Ramp Time Setting Master controller will use this message to query the ramp time setting Request message from Master controller to a digital MFC controller...
  • Page 20 Section 3 - Message Protocol Details Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 Request message from Master controller to a digital MFC controller MAC ID (0 - controller address) STX(0x02) Command Code(0x80 for read)

  • Page 21: Filtered Setpoint

    X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG March, 2020 Brooks RS485 L-Protocol MFCs 3.7. Filtered Setpoint Master controller will use this message to get the current set point from a MFC controller. This is the current set point after ramping has been applied.
  • Page 22 Section 3 - Message Protocol Details Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 Response message from a digital MFC controller to Master controller MAC ID (0 – Master controller) STX(0x02) Command Code(0x80 for read)

  • Page 23: Indicated Flow

    Section 3 - Message Protocol Details Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 3.8. Indicated Flow Master controller will use this message to get the current flow reading from a MFC controller. Request message from Master controller to a digital MFC controller...
  • Page 24 Section 3 - Message Protocol Details Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 Response message from a digital MFC controller to Master controller MAC ID (0 – Master controller) STX(0x02) Command Code(0x80 for read)

  • Page 25: Valve Drive Current

    Section 3 - Message Protocol Details Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 3.9. Valve Drive Current Master controller will use this message to get the valve drive current. Request message from Master controller to a digital MFC controller...
  • Page 26 Section 3 - Message Protocol Details Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 Response message from a digital MFC controller to Master controller MAC ID (0 – Master controller) STX(0x02) Command Code(0x80 for read)

  • Page 27: Calibrated Instance (Process Gas) Selection

    Section 3 - Message Protocol Details Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 3.10. Calibration Instance (Process Gas) Selection Master controller will use this message to select which calibration instance is to be used for flow metering.

  • Page 28: Query For Calibration Instance (Process Gas) Selection

    Section 3 - Message Protocol Details Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 3.11. Query for Calibration Instance (Process Gas) Selection Master controller will use this message to query the selected calibration instance, which is currently being used for flow metering.
  • Page 29 Section 3 - Message Protocol Details Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 Response message from a digital MFC controller to Master controller MAC ID (0 – Master controller) STX(0x02) Command Code(0x80 for read)

  • Page 30: Query For Available Calibration Instance

    Section 3 - Message Protocol Details Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 3.12. Query for Available Calibration Instances (Process Gases) Master controller will use this message to query available number of calibration instances.
  • Page 31 Section 3 - Message Protocol Details Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 Response message from a digital MFC controller to Master controller MAC ID (0 – Master controller) STX(0x02) Command Code(0x80 for read)

  • Page 32: Auto Zero Enable/Disable

    Section 3 - Message Protocol Details Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 3.13. Auto Zero Enable/Disable Master controller will use this message to enable auto zero function. MAC ID (Targeted MFC controller address)

  • Page 33: Requested Zero Enable

    Section 3 - Message Protocol Details Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 3.14. Requested Zero Enable Master controller will use this message to enable requested function. MAC ID (Targeted MFC controller address)

  • Page 34: Query For Requested Zero Status

    Section 3 - Message Protocol Details Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 3.15. Query for Requested Zero Status Master controller will use this message to query if the requested zero function has been completed.
  • Page 35 Section 3 - Message Protocol Details Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 Response message from a digital MFC controller to Master controller MAC ID (0 – Master controller) STX(0x02) Command Code(0x80 for read)

  • Page 36: Query For Sensor Current Zero

    Section 3 - Message Protocol Details Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 3.16. Query for Sensor Current Zero Master controller will use this message to query the current sensor zero offset. Request message from Master controller to a digital MFC controller...
  • Page 37 Section 3 - Message Protocol Details Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 Response message from a digital MFC controller to Master controller MAC ID (0 – Master controller) STX(0x02) Command Code(0x80 for read)

  • Page 38: Query For Sensor Reference Zero

    Section 3 - Message Protocol Details Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 3.17. Query for Sensor Reference Zero Master controller will use this message to query the sensor reference zero offset. Request message from Master controller to a digital MFC controller...
  • Page 39 Section 3 - Message Protocol Details Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 Response message from a digital MPC controller to Master controller MAC ID (0 – Master controller) STX(0x02) Command Code(0x80 for read)

  • Page 40: Set Sensor Reference Zero

    Section 3 - Message Protocol Details Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 3.18. Set Sensor Reference Zero Master controller will use this message to set sensor reference zero offset. MAC ID (Targeted MFC controller address)

  • Page 41: Set Default Control Mode

    Section 3 - Message Protocol Details Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 3.19. Set Default Control Mode Master controller will use this message to set MFC control mode when first powered up.

  • Page 42: Query Default Control Mode

    Section 3 - Message Protocol Details Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 3.20. Query Default Control Mode Master controller will use this message to query the MFC wakeup control mode. MAC ID (Targeted MFC controller address)
  • Page 43 Section 3 - Message Protocol Details Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 message from Digital MFC controller to Master controller Response MAC ID (Targeted MFC controller address) STX(0x02) Command Code(0x80 for read)

  • Page 44: Query For Inlet Pressure (Gf125 Only)

    Section 3 - Message Protocol Details Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 3.21. Query for Inlet Pressure (GF125 Only) Master Controller will use this message to query the current pressure transducer reading.
  • Page 45 Section 3 - Message Protocol Details Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 Response message from a digital MFC controller to Master Controller MAC ID (0 – Master controller)) STX(0x02) Command Code(0x80 for read)

  • Page 46: Query For Temperature

    Section 3 - Message Protocol Details Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 3.22. Query for Temperature Master controller will use this message to query the current temperature reading. Request message from Master controller to a digital MFC controller...
  • Page 47 Section 3 - Message Protocol Details Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 Response message from a digital MFC controller to Master Controller MAC ID (0 – Master controller)) STX(0x02) Command Code(0x80 for read)
  • Page 48 Section 3 - Message Protocol Details Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 THIS PAGE WAS INTENTIONALLY LEFT BLANK...

  • Page 49: Software Design Requirement

    Section 4 - Software Design Requirement Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 4. Software Design Requirement ACK(0x06) 4.1. Normal Transaction Scenarios 4.1.1. Read Transaction Scenario * If the slave controller does not receive any response within a reasonable time (18-20 character times) after sending a message, it behaves as though it received an ACK.

  • Page 50: Write Transaction Scenario

    Section 4 - Software Design Requirement Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 4.1.2. Write Transaction Scenario 4.2. Abnormal Transaction Scenarios 4.2.1. Read Transaction Scenario There are two different types of abnormal read transaction scenarios: packet error or read error within the MFC controller.

  • Page 51: Read Error

    Section 4 - Software Design Requirement Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 4.2.1.2. Read Error If any errors occur within the MFC controller after the first ACK is sent (no packet errors), a NAK (0x16) will be sent to indicate an execution error.

  • Page 52: Write Transaction Scenario

    Section 4 - Software Design Requirement Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 4.2.2. Write Transaction Scenario There are two different types of abnormal write transaction scenarios: packet error or write error within the MFC controller.

  • Page 53: Protocol Timing

    Section 4 - Software Design Requirement Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 4.3. Protocol Timing Devices on the RS485 bus distinguish address characters from other packet characters by maintaining an idle timer. This timer is started at the end of each received character, and expires if the next character does not arrive within two bytes times (20 bit times).

  • Page 54: Message Sequence Between Master Controller And A Mfc Slave Controller

    Section 4 - Software Design Requirement Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 4.4. Message Sequence between Master Controller and a MFC Slave Controller Initialization IndicatedFlow...

  • Page 55: Mfc New Setpoint Conversion

    Section 4 - Software Design Requirement Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 4.5. MFC New Setpoint Conversion The NewSetpoint request takes values in the range of 0x4000 to 0xC000 which represent set points between 0% and 100% full scale. The linear...

  • Page 56: Requested Zero

    Section 4 - Software Design Requirement Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 4.6.1. Requested Zero When the requested zero command is issued by Master controller, the digital MFC controller should close the flow meter valve and wait until the sensor output is stabilized (typically 90 seconds).

  • Page 57: Calibration Instances

    Section 4 - Software Design Requirement Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 4.7. Calibration Instances Each calibration instance contains values needed by flow meter to calculate the actual gas flow rate for a particular process gas and flow range from sensor readings.
  • Page 58 Section 4 - Software Design Requirement Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 THIS PAGE WAS INTENTIONALLY LEFT BLANK...

  • Page 59: Advanced Diagnostics (Gf135 Only)

    5.1. New Communication Protocol Overview 5.1.1. Objectives and Problem Statement Through the years, issues found in the field on Brooks MFCs have been very difficult to troubleshoot due to lack of information given to failure analysis teams. Issues that are random in occurrence and are specific to the field setup are the most difficult to reproduce therefore troubleshooting takes longer.

  • Page 60: Specific Requirements

    Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 5.2. Specific Requirements 5.2.1. Introduction The following requirements are a subset of Brooks’ new communication protocol definition. 5.2.2. Advanced Protocol The advanced communication protocol is more fully defined in GF135-SRS- 011.
  • Page 61 Section 5 - Advanced Diagnostics (GF135 Only) Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 Attribute Access Class Instance Att. ID Values ROD Error Status READ ONLY 0: ROD Error (attribute 11) is not valid...
  • Page 62 Appendix - Tool - Device Communication Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 Attribute Access Class Instance Att. ID Values ROD 11 Status READ ONLY 0: ROD Error 11 is not valid 1: ROD Error 11 is valid...

  • Page 63: Tool - Device Communication

    Section 5 - Advanced Diagnostics (GF135 Only) Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 Attribute Access Class Instance Att. ID Values ROD Error 17 READ ONLY Float, Avg. error for setpoint 85-90% ROD Error 18 READ ONLY Float, Avg.
  • Page 64 Appendix - Tool - Device Communication Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 Time synchronization In order to provide accurate data logging for the trending diagnostic, the tool will need to provide accurate time synchronization. The MFC is capable of...

  • Page 65: Appendix: Tool - Device Communication

    Appendix - Tool - Device Communication Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 6. Appendix: Tool - Device Communication MFC's can have software configurable MAC ID's by sending the "Set MAC ID" command to the current MFC controller address or the default address (0xFF).
  • Page 66 Appendix - Tool - Device Communication Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
  • Page 67 Appendix - Tool - Device Communication Installation and Operation Manual X-DPT-RS485-GF100-Series-MFC-eng Part Number: 541B183AAG Brooks RS485 L-Protocol MFCs March, 2020 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
  • Page 68 BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with outstanding service and support to back it up. We operate first class repair facilities located around the world to provide rapid response and support.

This manual is also suitable for:

Gf125 seriesGf135 series

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