Brooks GF125 Manuals

Manuals and User Guides for Brooks GF125. We have 3 Brooks GF125 manuals available for free PDF download: Installation And Operation Manual, Supplemental Manual

Brooks GF125 Installation And Operation Manual (62 pages)

High Performance Gas Flow Controllers

Brand: Brooks | Category: Controller | Size: 2 MB

Table of Contents
5
Section 1 General Information

9
- GF1XX Series High Performance Gas Flow Controller Analog and Digital
  9
  - Notice and Caution Statements
    10
  - Product Warranty
    10
  - How to Order an Gf1Xx Device
    10
  - Industry Standard References
    10
  - GF1XX Gas Table
    10
  - Glossary of Terms and Acronyms
    11
  - Patents
    12
  - Introduction
    12
  - General Description
    13
- Intended Use
  9
- Introduction
  9
- Product Support References
  9
Section 2 Product Description

12
- GF1XX General Description
  13
- LED Display
  13
  - Operating Principles
    14
  - Specifications for GF Series Controller
    15
  - Specifications for GF120XSD Series Controller
    16
  - Specifications for GF120XSL Series Controller
    16
  - Product Labeling
    16
  - Mode Code Description
    17
  - Standard Features
    18
  - Mounting Attitude
    18
  - Factory Setup Conditions
    18
  - Calibration Traceability
    18
  - Materials
    18
  - Auto Shut-Off
    19
  - LED Display
    19
  - Optional Features
    20
  - Control Valve Options
    20
  - Flow Direction Option
    20
  - Fittings Option
    20
  - I/O Communication
    20
  - Cable Connector Options
    20
Section 3 Installation Instructions

21
Section 4 Multiflo Configurator

27
- Introduction
  27
- Multiflo Configurator
  27
- Configure the Gas and Flow Range
  28
- Multiflo Cable Adapter
  28
- Diagnostic Port
  28
Section 5 Performance Checks

29
Section 6 Maintenance Requirements

33
- Introduction
  33
- Routine Maintenance
  33
- Factory Calibration and Service
  34
- On-Site Service
  34
Section 7 System Troubleshooting

35
- Introduction
  35
- OEM Tool Troubleshooting Checklist
  35
- Environmental Factors
  35
  - GF1XX Troubleshooting Guide
    36
Section 8 GF Series Device Removal and Return Instructions

41
- Introduction
  41
- Purge Gas Lines before Removing the GF1XX
  41
- Remove and Replace the GF1XX
  41
- Package the GF1XX
  42
- Return Shipment of the GF1XX
  42
Appendix A: Product Description Code

43
Appendix B: Industry Standard References

49
- Industry Standard References
  50
Appendix C: GF Series Gas Table

51
- GF1XX Gas Table
  51
Appendix D: Misc. Drawings

55
- Electrical Connections
  55
- D-1-1 Devicenet Connector
  55
- Dimensional Drawings
  59

Brooks GF125 Supplemental Manual (54 pages)

EtherCAT Mass Flow Controllers and Meters

Brand: Brooks | Category: Measuring Instruments | Size: 1 MB

Brooks GF125 Installation And Operation Manual (68 pages)

RS485 L-Protocol Supplemental Manual for Mass Flow Controllers and Meters

Brand: Brooks | Category: Controller | Size: 0 MB

Table of Contents
3
1 Introduction

5
- Purpose
  5
- Scope
  5
2 Background

7
- Topology
  7
- Communication Parameters
  7
- Message Format
  8
3 Message Protocol Details

11
- Query for MAC ID
  11
- Digital Mode Selection
  13
- Query Present Control Mode
  14
- Freeze Follow
  16
- New Setpoint
  17
- Ramp Time
  18
- Filtered Setpoint
  21
- Indicated Flow
  23
- Valve Drive Current
  25
- Calibrated Instance (Process Gas) Selection
  27
- Query for Calibration Instance (Process Gas) Selection
  28
- Query for Available Calibration Instance
  30
- Auto Zero Enable/Disable
  32
- Requested Zero Enable
  33
- Query for Requested Zero Status
  34
- Query for Sensor Current Zero
  36
- Query for Sensor Reference Zero
  38
- Set Sensor Reference Zero
  40
- Set Default Control Mode
  41
- Query Default Control Mode
  42
- Query for Inlet Pressure (GF125 Only)
  44
- Query for Temperature
  46
4 Software Design Requirement

49
- Normal Transaction Scenarios
  49
  - Read Transaction Scenario
    49
  - Write Transaction Scenario
    50
- Abnormal Transaction Scenarios
  50
  - Read Transaction Scenario
    50
    
    Packet Error
    50
    
    Read Error
    51
  - Write Transaction Scenario
    52
    
    Packet Error
    52
    
    Write Error
    52
- Protocol Timing
  53
- Message Sequence between Master Controller and a MFC Slave Controller
  54
- MFC New Setpoint Conversion
  55
- Sensor Zero Filter
  55
  - Requested Zero
    56
  - Auto Zero
    56
- Calibration Instances
  57
- Analog / Digital Mode
  57
5 Advanced Diagnostics (GF135 Only)

59
- New Communication Protocol Overview
  59
  - Objectives and Problem Statement
    59
  - Protocol Description
    59
- Specific Requirements
  60
  - Introduction
    60
  - Advanced Protocol
    60
  - New Attributes
    60
- Tool - Device Communication
  63
6 Appendix: Tool - Device Communication

65

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Brooks GF125 Manuals

Brooks GF125 Installation And Operation Manual (62 pages)

Table of Contents

Section 1 General Information

Section 2 Product Description

Section 3 Installation Instructions

Section 4 Multiflo Configurator

Section 5 Performance Checks

Section 6 Maintenance Requirements

Section 7 System Troubleshooting

Section 8 GF Series Device Removal and Return Instructions

Appendix A: Product Description Code

Appendix B: Industry Standard References

Appendix C: GF Series Gas Table

Appendix D: Misc. Drawings

Brooks GF125 Supplemental Manual (54 pages)

Table of Contents

Brooks GF125 Installation And Operation Manual (68 pages)

Table of Contents

1 Introduction

2 Background

3 Message Protocol Details

4 Software Design Requirement

5 Advanced Diagnostics (GF135 Only)

6 Appendix: Tool - Device Communication

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