Ulvac MBD Series Instruction Manual page 22

MBD CRYO-METER Instruction Manual
Problem
The displayed Signal cable
temperature does
not change even
when the
cryopump is in
operation.
The displayed Signal cable
temperature is DC power cable
unstable. Power supply cord
Not numerical Signal cable
character(s) is/are DC power cable
displayed. Power supply cord
10
Table 6-2 Troubleshooting List (2/2)
Point Possible causes
1.Cryopump operational
problem
2.Wiring problem
3.MBD failure
4.MBS - C failure
1.Wiring
problem
(Noise and/or surge)
1.Wiring
problem
(Noise and / or surge)
2.MBD failure
ULVAC CRYOGENICS INCORPORATED
Check that the cryopump is operated
properly.
Also check that the change of status display
on MBS-C corresponds with the change of
temperature display on the MBD.
If so, the problem might be caused by an
operational problem, not by a failure of
MBD.
However, if no fault is found with the
operation, follow the same inspection
procedure shown in upper column.
and conduit Check the connections and damages of the
Signal cable and the DC power cable
between MBD and MBS-C. (UCI supplied
cables should be used.)
If no fault is found, check the wirings and
conduits of those cables. The cables are
sensitive and they should not be placed near
power source and/or drive output line.
Earth conductor of power lines should not be
placed near the cables of MBD either.
Also MBD Power supply cord should not be
near the main power lines connected to
power switching equipment.
Refer to "
MBD wiring" on page 5 and 6.
Also consult our customer support to solve
the problem.
and conduit Check the wirings and conduits first..
If there is no problem, there is a possibility of
MBD failure.
Please contact our customer support for
replacement of the product.
Action
Conduit Requirements for